• Title/Summary/Keyword: Pressure sensors

Search Result 954, Processing Time 0.027 seconds

Fabrication of Ceramic Thin Film Type Pressure Sensors for High-Temperature Applications and Their Characteristics (고온용 세라믹 박막형 압력센서의 제작과 그 특성)

  • 정귀상
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.16 no.9
    • /
    • pp.790-794
    • /
    • 2003
  • This paper describes the fabrication and characteristics of ceramic thin film type pressure sensors based on Ta-N strain gauges for high temperature applications. Ta-N thin-film strain gauges are deposited onto a thermally oxidized Si diaphragm by RF sputtering in an argon-nitrogen atmos[here($N_2$ gas ratio: 8%, annealing condition: 90$0^{\circ}C$, 1 hr.), patterned on a wheatstone bridge configuration, and used as pressure sensing elements with a high stability and a high gauge factor. The sensitivity is 1.097 ~ 1.21 mV/Vㆍkgf/$\textrm{cm}^2$ in the temperature range of 25 ~ 200 $^{\circ}C$ and the maximum non-linearity resistance), non-linearity than existing Si piezoresistive pressure sensors. The fabricated ceramic thin-film type pressure sensor is expected to be usefully applied as pressure and load sensors that os operable under high-temperature.

Basic Study on The Long-period Fiber Grating Pressure Sensor for applying the Vessels (선박적용을 위한 장주기 광섬유 격자 압력센서의 기초연구)

  • Sohn, Kyung-Rak;Choi, Young-Gil;Jang, Se-In;Choi, Jae-Yun
    • Proceedings of the Korean Society of Marine Engineers Conference
    • /
    • 2005.11a
    • /
    • pp.202-203
    • /
    • 2005
  • we present a pressure sensor based on the mechanically formed long-period fiber gratings. The attenuation properties of an output power as a function of an external pressure is able to apply to the in-line fiber pressure sensors for the vessels.

  • PDF

Study on the Performance of Flexible Tactile Sensors According to the Substrate Stiffness (기저판의 탄성에 따른 유연촉각센서의 성능변화 연구)

  • Kim, Song Ho;Kim, Ho-Chan;Lee, In Hwan
    • Journal of the Korean Society of Manufacturing Process Engineers
    • /
    • v.20 no.9
    • /
    • pp.104-109
    • /
    • 2021
  • Tactile sensors and integrated circuits that detect external stimuli have been developed for use in various industries. Most tactile sensors have been developed using the MEMS(micro electro-mechanical systems) process in which metal electrodes and strain sensors are applied to a silicon substrate. However, tactile sensors made of highly brittle silicon lack flexibility and are prone to damage by external forces. Flexible tactile sensors based on polydimethylsiloxane and using a multi-walled carbon nano-tube mixture as a pressure-sensitive material are currently being developed as an alternative to overcome these limitations. In this study, a manufacturing process of pressure-sensitive materials with low initial electrical resistance is developed and applied to the fabrication of flexible tactile sensors. In addition, flexible tactile sensors are developed with pressure-sensitive materials dispensed on a substrate with flexible mechanical properties. Finally, a study is conducted on the change in electrical resistance of pressure-sensitive materials according to the modulus of elasticity of the substrate.

Design of Diaphragm for Ultra High Pressure Sensors and Its performance Evaluation Using a PZT Actuated Deformation Tester (초고압 압력센서용 다이어프램 설계 및 PZT 구동 변형시험기를 이용한 성능평가)

  • Yun, Dae Jhoong;Ahn, Jung Hwan
    • Journal of Sensor Science and Technology
    • /
    • v.28 no.1
    • /
    • pp.58-63
    • /
    • 2019
  • This research aims at designing a diaphragm made of SUS316L stainless steel for ultra high pressure sensors and evaluating its performance with a PZT driven deformation tester instead of high pressure chamber testing up to 100 MPa. Finite element method analysis indicates that the optimum thickness of a flat diaphragm is 1.5 mm not only to secure safety of sensors up to 100 MPa but also to enhance displacement measuring sensitivity. For this thickness, the maximum displacement at the center of the diaphragm is $5.3{\mu}m$. The PZT actuator must offer a force of 1,669 N to create a pressure of 100 MPa at the diaphragm surface in order to obtain a displacement of $5.3{\mu}m$. The performance evaluation by the PZT driven tester demonstrates nearly the same results as the same results as the sensors tested in the ultra high pressure chamber.

Development of Direct Printed Flexible Tactile Sensors

  • Lee, Ju-Kyoung;Lee, Kyung-Chang;Kim, Hyun-Hee
    • Journal of the Korean Society of Industry Convergence
    • /
    • v.20 no.3
    • /
    • pp.233-243
    • /
    • 2017
  • This paper proposes a structure of direct-printed flexible tactile-sensor. These flexible tactile sensors are based on pressure-sensing materials that allow pressure to be measured according to resistance change that in turn results from changes in material size because of compressive force. The sensing material consists of a mixture of multi walled carbon nanotubes (MWCNTs) and TangoPlus, which gives it flexibility and elasticity. The tactile sensors used in this study were designed in the form of array structures composed of many lines so that single pressure points can be measured. To evaluate the performance of the flexible tactile sensor, we used specially designed signal-processing electronics and tactile sensors to experimentally verify the sensors' linearity. To test object grasp, tactile sensors were attached to the surface of the fingers of grippers with three degrees of freedom to measure the pressure changes that occur during object grasp. The results of these experiments indicate that the flexible tactile sensor-based robotic gripper can grasp objects and hold them in a stable manner.

Multipoint Pressure-detection Sensors using Microbanding-induced Long-period Fiber Gratings (마이크로밴딩 장주기 광섬유 격자를 이용한 다중위치 압력감지 센서)

  • Sohn, Kyung-Rak;Choi, Young-Gill;Jang, Se-In;Choi, Jae-Yun;Shim, Joon-Hwan
    • Journal of Advanced Marine Engineering and Technology
    • /
    • v.30 no.3
    • /
    • pp.449-454
    • /
    • 2006
  • We present a pressure sensor based on the mechanically induced long-period fiber gratings (LPFG) for detecting the multi-location strain variation. The theoretical analysis is performed using a graphic method for a weakly guiding step-index fiber. The calculated results are in good agreement with the experimental results. In this study, from the fact that the optical parameters of a single-mode fiber slightly differ from manufacturing company to manufacturing company, the multipoint pressure-detection sensor systems composed two identical LPFGs are realized. When the pressure is applied two LPFG sensors at once, the resonance peaks are separated as much as about 40 nm. These types of sensor systems are well suited as a multipoint monitoring of strain or temperature in the ship or the smart structure.

Developmemt of automobile sensor monitoring system (자동차 센서 모니터링 시스템 개발)

  • Choi, Nakg-Won;Lee, Sang-Hoon
    • Journal of Sensor Science and Technology
    • /
    • v.14 no.3
    • /
    • pp.150-155
    • /
    • 2005
  • We propose a newly developed automobile sensor monitoring system incorporated with a tire pressure monitoring sensor(TPMS). The RF-transmitter based on a tire pressure sensor, sends a frame data about measured tire-pressure to RF receiver. And the various sensing signals based on sensors such as fuel-level sensor, engine oil level sensor and temperature sensors, are converted into 10-bit digital data. The microprocessor displays converting data such as tire pressure, trip distance, fuel quantity, coolant temperature and car-room temperature, on LCD panel. The proposed system can be successfully adapted to monitoring of the tire pressure and various automobile sensors.

Using nano-micro-control technology to improve breathing pressure in vocal music technique teaching innovation

  • Jiayue Cui;Hongliang Zhang
    • Advances in nano research
    • /
    • v.15 no.3
    • /
    • pp.239-251
    • /
    • 2023
  • In the present study, we aim to use nanotechnology sensors/actuators to capture pressure and frequency of voice singers and to send signals for improving breathing pressure. In this regard, a circular composite structure having 3 different layers are used. The core layer is nano-composite material reinforced with graphene nanoplatelets. The face sheets are piezo electric materials connected to electrical circuit capable of measuring and applying voltage to the piezoelectric layers. This sensors have extremely smaller size than conventional sensors attached to the neck of singer and, hence, minimizes the influences on the output voice of the singer. A brief theoretical framework are presented for nonlocal strain gradient theory and geometry of the sensor is described in detail. The controlling procedure along with experimental results on 20 amateur and professional singer participants are also presented. The results of the study indicate that the participants could gain benefit from the device for improving their ability in phonation and keeping their frequency at a constant level although they have difficulty in the beginning of the experiment getting used to the device.

The development of a variable capacitive pressure sensor for TPMS(tire pressure monitoring system) (TPMS 적용을 위한 가변 정전 용량형 압력센서 개발)

  • Choi, Bum-Koo;Kim, Do-Hyung;Oh, Jae-Geun
    • Journal of Sensor Science and Technology
    • /
    • v.14 no.4
    • /
    • pp.265-271
    • /
    • 2005
  • In this study, a variable capacitive pressure sensor is fabricated for TPMS (Tire Pressure Monitoring System). This study is for developing sensors which consecutively measure the tire pressure given as 30 psi from the industrial standard. For improving non-linearity of the prior capacitive pressure sensors, it is suggested that touch mode capacitive pressure sensor be applied. In addition, initial capacitance is designed as small as possible for the conformity to the wireless sensor. ANSYS, commercial FEA package, is used for designing and simulating the sensor. The device is progressed by MEMS (Micro Electro Mechanical Systems) fabrication and packaged with PDMS. The result is obtained sensitivity, 1 pF/psi, through a pressure test. The simulation result is discrepant from experiment one. Wafer's uniformity is presumed as the main reason of discrepancy.

The Classification and Investigation of Smart Textile Sensors for Wearable Vital Signs Monitoring (웨어러블 생체신호 모니터링을 위한 스마트텍스타일센서의 분류 및 고찰)

  • Jang, Eunji;Cho, Gilsoo
    • Fashion & Textile Research Journal
    • /
    • v.21 no.6
    • /
    • pp.697-707
    • /
    • 2019
  • This review paper deals with materials, classification, and a current article investigation on smart textile sensors for wearable vital signs monitoring (WVSM). Smart textile sensors can lose electrical conductivity during vital signs monitoring when applying them to clothing. Because they should have to endure severe conditions (bending, folding, and distortion) when wearing. Imparting electrical conductivity for application is a critical consideration when manufacturing smart textile sensors. Smart textile sensors fabricate by utilizing electro-conductive materials such as metals, allotrope of carbon, and intrinsically conductive polymers (ICPs). It classifies as performance level, fabric structure, intrinsic/extrinsic modification, and sensing mechanism. The classification of smart textile sensors by sensing mechanism includes pressure/force sensors, strain sensors, electrodes, optical sensors, biosensors, and temperature/humidity sensors. In the previous study, pressure/force sensors perform well despite the small capacitance changes of 1-2 pF. Strain sensors work reliably at 1 ㏀/cm or lower. Electrodes require an electrical resistance of less than 10 Ω/cm. Optical sensors using plastic optical fibers (POF) coupled with light sources need light in-coupling efficiency values that are over 40%. Biosensors can quantify by wicking rate and/or colorimetry as the reactivity between the bioreceptor and transducer. Temperature/humidity sensors require actuating triggers that show the flap opening of shape memory polymer or with a color-changing time of thermochromic pigment lower than 17 seconds.