Fabrication of Ceramic Thin Film Type Pressure Sensors for High-Temperature Applications and Their Characteristics
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정귀상 (동서대학교 정보시스템공학부 메카트로닉스공학) |
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Ion-Beam sputtered thin film strain gauge pressure transducers
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DOI ScienceOn |
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A CAD environment for the numerical simulation of integrated piezoresistive transducers
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Novel pressure sensors with multilayer SOI structures
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DOI ScienceOn |
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Scaling limits in batch-fabricated silicon pressure sensors
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The characteristics of chromium nitride thin-film strain sauges
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과학기술학회마을 |
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The Fabrication of ceramic thin-film type pressure sensors for high-temperature applications
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A planar thick-film load cell
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Thin film pressure transducer with manganese film as the strain gauge
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DOI ScienceOn |
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Piezoresistive pressure sensors based on polycrystalline silicon
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DOI ScienceOn |
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Behaviour of Bi-Sb alloy thin-film as strain gauges
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DOI ScienceOn |
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Piezoresistive low pressure sensor with high sensitivity and high accuracy
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Sputtered silicon thin film for piezoresistive pressure microsensors
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Second order piezoresistance coefficients of the n-type silicon
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DOI |
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CMOS integrated silicon pressure sensor
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Pressure transducer with Au-Ni thin-film strain gauges
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DOI ScienceOn |
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