Browse > Article
http://dx.doi.org/10.5369/JSST.2019.28.1.58

Design of Diaphragm for Ultra High Pressure Sensors and Its performance Evaluation Using a PZT Actuated Deformation Tester  

Yun, Dae Jhoong (School of Mechtronical Engineering, Pusan National Unversity)
Ahn, Jung Hwan (School of Mechtronical Engineering, Pusan National Unversity)
Publication Information
Journal of Sensor Science and Technology / v.28, no.1, 2019 , pp. 58-63 More about this Journal
Abstract
This research aims at designing a diaphragm made of SUS316L stainless steel for ultra high pressure sensors and evaluating its performance with a PZT driven deformation tester instead of high pressure chamber testing up to 100 MPa. Finite element method analysis indicates that the optimum thickness of a flat diaphragm is 1.5 mm not only to secure safety of sensors up to 100 MPa but also to enhance displacement measuring sensitivity. For this thickness, the maximum displacement at the center of the diaphragm is $5.3{\mu}m$. The PZT actuator must offer a force of 1,669 N to create a pressure of 100 MPa at the diaphragm surface in order to obtain a displacement of $5.3{\mu}m$. The performance evaluation by the PZT driven tester demonstrates nearly the same results as the same results as the sensors tested in the ultra high pressure chamber.
Keywords
Ultra high pressure; pressure sensor; Diaphragm; PZT; Deformation tester; Displacement;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
연도 인용수 순위
1 Y. H. Kwon, "Calculation of rated output in diaphragm type miniature load cell", J. Korean Soc. Precis. Eng., Vol. 7, No. 2, pp. 58-64, 1990.
2 C. Y. Kim and W. N. Sharp, "Development of a Fatigue Testing System for Micro-Specimens", Trans. Korean Soc. Mech. Eng. A, Vol. 34, No. 09, pp. 1201-1207, 2010.   DOI
3 J. H. Park and Y. J. Kim, "A Novel Tensile Specimen and Tester for Mechanical Properties of Thin Films", Trans. Korean Soc. Mech. Eng A, Vol. 31, No. 06, pp. 644-650, 2007.   DOI
4 J. M. Kim and G. S. Chung, "Fabrication of a micromachined ceramic thin-film type pressure sensor for high overpressure tolerance and its characteristics", J. Sens. Sci. Technol., Vol. 12, No. 5, pp. 199-204, 2003.   DOI
5 M. M. Kim, T. C. Nam, and Y. T. Lee, " Development of the High Temperature Silicon Pressure sensor", J. Sens. Sci. Technol., Vol. 13, No. 3, pp. 175-181, 2004.   DOI
6 B. K. Ju, B. J. Ha, K. S. Kim, M. H. Song, S. H. Kim, C. J. Kim, K. H. Tchah, M. H. Oh, " Formation of Silicon Diaphragm Using Silicon - Wafer Direct bonding / Electrochemical Etch - stopping and Its Application to Silicon pressure Sensor Fabrication", J. Sens. Sci. Technol., Vol. 3, No. 3, pp. 45-53, 1994.
7 C. Y. Kim, J. H. Song and D. Y. Lee, "Development of a fatigue testing system for thin films", Int. J. Fatigue, Vol. 31, No. 04, pp. 736-742, 2009.   DOI
8 B. Jorg and N. S. Jr. William, "Fatigue of Polycrystalline Silicon under long-term Cyclic Loading", Sens. Actuators A, Vol. 103, No. 1-2, pp. 9-15, 2003.   DOI
9 S. Troiler-McKinstry and P. Muralt, "Thin Film Piezoelectric for MEMS", J. Electroceram., Vol. 12, No. 1, pp. 7-17, 2004.   DOI
10 H. R. Lee, J. H. Ahn, J. O. Shin, and H. Y. Kim, "Design of Solenoid Actuator for FCV Cylinder Valve Considering Structural Safety", J. Korean Soc. Manuf. Technol. Eng., Vol. 25, No. 3, pp. 157-163, 2016.   DOI
11 D. J. Yoon and J. H. Ahn, "Development of a Test Equipment for Diaphragm Deflection Using a PZT Actuator", J. Korean Soc. Precis. Eng., Vol. 34, No. 12, pp. 927-932, 2017   DOI
12 M. Hommel, O. Kraft, S. P. Baker and E. Arzt, "Micro-Tensile and Fatigue Testing of Copper Thin Films on Substrates", MRS Proc., Vol. 546 , pp. 133-138, 1999.
13 J. P. Lee, H. J. Lee, J. H. Hwang, N. K. Lee and J. S. Bae, "A Study on a micro dynamic tester development for a micro property measurement of a micro metal specimen", Proc. Korean Soc. Noise Vib. Eng., Vol. 11, pp. 166-171, 2006.
14 S. Y. Kim and I. Kang, "A Study on the Development of a Novel Pressure based on Nano Carbon Piezoresistive Composite by Using 3D Printing", Trans. Korean Soc. Mech. Eng.A, Vol. 41, No. 3, pp. 187-192, 2017   DOI
15 C. S. Oh, H. G. Ahn, and H. J. Lee, "Development and Application of Material testers for the Thin Film", J. Korean Soc. Precis. Eng., Vol. 23, No. 03 pp. 163-170, 2006.