Journal of the Korean Society of Manufacturing Process Engineers (한국기계가공학회지)

The Korean Society of Manufacturing Process Engineers (한국기계가공학회)
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Study on the Performance of Flexible Tactile Sensors According to the Substrate Stiffness

기저판의 탄성에 따른 유연촉각센서의 성능변화 연구

  • 김송호 (티엔알바이오팹) ;
  • 김호찬 (안동대학교 기계자동차공학과) ;
  • 이인환 (충북대학교 기계공학부)
  • Received : 2021.07.28
  • Accepted : 2021.08.23
  • Published : 2021.09.30
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Abstract

Tactile sensors and integrated circuits that detect external stimuli have been developed for use in various industries. Most tactile sensors have been developed using the MEMS(micro electro-mechanical systems) process in which metal electrodes and strain sensors are applied to a silicon substrate. However, tactile sensors made of highly brittle silicon lack flexibility and are prone to damage by external forces. Flexible tactile sensors based on polydimethylsiloxane and using a multi-walled carbon nano-tube mixture as a pressure-sensitive material are currently being developed as an alternative to overcome these limitations. In this study, a manufacturing process of pressure-sensitive materials with low initial electrical resistance is developed and applied to the fabrication of flexible tactile sensors. In addition, flexible tactile sensors are developed with pressure-sensitive materials dispensed on a substrate with flexible mechanical properties. Finally, a study is conducted on the change in electrical resistance of pressure-sensitive materials according to the modulus of elasticity of the substrate.

Keywords

Acknowledgement

이 논문은 충북대학교 국립대학육성사업(2020)지원을 받아 작성되었음.

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