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http://dx.doi.org/10.14775/ksmpe.2021.20.09.104

Study on the Performance of Flexible Tactile Sensors According to the Substrate Stiffness  

Kim, Song Ho (T&R BoFab)
Kim, Ho-Chan (Andong National University)
Lee, In Hwan (Chungbuk National University)
Publication Information
Journal of the Korean Society of Manufacturing Process Engineers / v.20, no.9, 2021 , pp. 104-109 More about this Journal
Abstract
Tactile sensors and integrated circuits that detect external stimuli have been developed for use in various industries. Most tactile sensors have been developed using the MEMS(micro electro-mechanical systems) process in which metal electrodes and strain sensors are applied to a silicon substrate. However, tactile sensors made of highly brittle silicon lack flexibility and are prone to damage by external forces. Flexible tactile sensors based on polydimethylsiloxane and using a multi-walled carbon nano-tube mixture as a pressure-sensitive material are currently being developed as an alternative to overcome these limitations. In this study, a manufacturing process of pressure-sensitive materials with low initial electrical resistance is developed and applied to the fabrication of flexible tactile sensors. In addition, flexible tactile sensors are developed with pressure-sensitive materials dispensed on a substrate with flexible mechanical properties. Finally, a study is conducted on the change in electrical resistance of pressure-sensitive materials according to the modulus of elasticity of the substrate.
Keywords
Flexible Tactile Senso; Multi-walled Carbon Nano Tubes; Polydimethylsiloxane(PDMS);
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