• 반도체디스플레이기술학회지
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• 제20권3호
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• pp.27-31
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• 2021

VI probe, which is one of various in-situ plasma monitoring sensor, is frequently used for in-situ process monitoring in mass production environment. In this paper, we correlated the plasma etch results with VI probe data with the small amount of gas flow rate changes to propose usefulness of the VI probe in real-time process monitoring. Several different sized contact holes were employed for the etch experiment, and the etched profiles were measured by scanning electron microscope (SEM). Although the shape of etched hole did not show satisfactory relationship with VI probe data, the chamber status changed along the incremental/decremental modification of the amount of gas flow was successfully observed in terms of impedance monitoring.

• 한국진공학회지
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• 제18권2호
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• pp.97-101
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• 2009

현대의 반도체 산업에서 공정 중 가장 큰 비중을 차지하며, 가장 많은 자본과 인력을 소비하는 것이 바로 세정 공정이다. 세정공정은 소자의 작동에 영향을 미치고 기능을 저하시킬 수 있는 이물질 입자들을 제거하는 것이다. 특히 소자를 식각하기 위한 Photoresist(PR) 과정이 끝날 때마다 항상 세정 과정이 포함되어야 했다. 또한, Photoresist(PR) 공정 중 생성된 HDI-PR(high dose implanted photoresist)은 세정 과정에서 제거가 힘들기 때문에 현대의 고밀도 집적회로 세정 공정에서는 건식 세정과 습식 세정을 혼용하여 여러 단계의 세정 공정을 거치게 된다. 이 논문에서는 기존 플라즈마 방식으로 대표되는 건식 세정과 약액으로 대표되는 습식 세정을 동시에 사용하는 방식을 사용하여 약액활성화 방법(Plasma Liquid-Vapor Activation; PLVA)을 제안하여 실험을 실시하였고 HDI-PR을 활성화된 용액에 담근 후 Nano-Indenter를 이용하여 표면강도와 탄성계수를 측정했다. Nano-indenter는 특정한 기하학적 형태를 가지는 Tip을 표면에 압입한 후 압입하중과 압입깊이를 측정함으로서 시료의 표면강도와 탄성계수를 측정하였다. 그 결과 plasma로 활성화된 PR stripper 용액으로 strip한 후의 시료의 표면 강도가 크게 줄어든 것을 확인하였다. 이는 이후 물리적 표면 세정 공정을 후 공정으로 사용한다면 보다 효율적인 HDI-PR을 제거할 수 있을 것으로 사료된다.

• 한국진공학회지
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• 제17권5호
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• pp.408-418
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• 2008

본 논문에서는 집속이온빔의 플라즈마원을 위한 간단한 직육면체형태의 공진 공동을 설계하고 특성연구를 수행하였다. 공진에 최적인 공동 구조는 HFSS(High Frequency Structure Simulator)를 이용한 전기장 분포를 통해 구체적으로 계산하였다. 공진 공동은 내부 석영관 및 플라즈마 등의 유전체의 영향을 받기 때문에 공동의 한축 길이를 변화시킬 수 있는 구조로 설계되었다. 실험적으로 관찰되는 마이크로웨이브 방전시작전압을 통해 방전에 최적인 공동 길이를 측정하여 HFSS 계산된 값과 비교하였다. 공동은 석영관으로 인한 내부 유효유전율의 변화에 의해 석영관을 고려하지 않았던 길이에 비해 10cm가 감소된 길이에서 최적화됨을 공통적으로 확인할 수 있었다. 또한 압력변화에 따른 방전시작전압은 Paschen Curve와 유사한 결과를 나타내었다. 방전이 발생한 후에는 입력전력에 따라 플라즈마 밀도가 증가하였고 플라즈마의 영향으로 감소한 유효유전율에 의해 10cm가 증가한 길이에서 최적화가 되었다. 하지만 300W이상의 높은 입력 전력에서는 마이크로웨이브가 투과할 수 없는 고밀도 플라즈마 경계층(cut off layer)이 확장하여 더 이상 공동길이 조절을 통한 공동 최적화가 불가능함을 확인하였다. 따라서 고밀도 플라즈마를 만들기 위한 마이크로웨이브 공동의 정확한 설계를 위해 마이크로웨이브가 통과할 수 없는 고밀도 플라즈마 영역을 도체로 가정하고 그 외의 저밀도 플라즈마 영역을 밀도에 고유한 특정 유전율을 가지는 유전체로 설정하여 공동 내부의 전기장 분포를 해석하는 과정이 꼭 필요하다.

• Journal of Astronomy and Space Sciences
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• 제37권1호
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• pp.51-60
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• 2020

This study designs and analyzes satellite formation flying concepts for the Small scale magNetospheric and Ionospheric Plasma Experiments (SNIPE) mission, that will observe the near-Earth space environment using four nanosats. To meet the requirements to achieve the scientific objectives of the SNIPE mission, three formation flying concepts are analyzed: a cross-shape formation, a square-shape formation, and a cross-track formation. Of the three formation flying scenarios, the cross-track formation scenario is selected as the final scenario for the SNIPE mission. The result of this study suggests a relative orbit control scenario for formation maintenance and reconfiguration, and the initial relative orbits of the four nanosats meeting the formation requirements and thrust limitations of the SNIPE mission. The formation flying scenario is validated by calculating the accumulated total thrust required for the four nanosats. If the cross-track formation scenario presented in this study is applied to the SNIPE mission, it is expected that the mission will be successfully accomplished.

• 반도체디스플레이기술학회지
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• 제9권4호
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• pp.39-43
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• 2010

According to recent changes in industry for the semiconductor device, a gap between patterns in wafer is getting narrow. And this narrow gap makes a failure of uniform deposition between center and edge on the wafer. In this paper, for solving this problem, we analyze and manipulate the gas flow inside of the HDP CVD chamber by using CFD(Computational Fluid Dynamics). This simulation includes design manipulations in heights of the chamber and shape of center nozzle in the upper side of the chamber. The result of simulation shows 1.28 uniformity which is lower 3% than original uniformity.

• 한국정밀공학회지
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• 제14권1호
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• pp.142-149
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• 1997

Ceramic-coated anilox roll for printing is resistant to corrosion and wear, and hence has enhanced life and quality. Laser engraving is used typically for machining holes to store ink in this roll. Since engraved hole size and shape are directly related to laser processing parameters, it is necessary to know the rela- tionships among these parameters. In this study, the parameters for engraving of ;oasma sprayed ceramic coatings with Nd:YAG laser were studied. Relationships between hole shape and processing parameters were analyzed. Cr$_{2}$O$_{3}$ceramic was found to be most suitable for Nd:YAG laser engraving. It was found that hole depth can be increased by using higher energy pulses. Effect of using different assistant gases was small to the final results. For better results, it was suggested to use a very stable laser with shorter pulses and higher pulse energy.

• 한국세라믹학회지
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• 제37권1호
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• pp.57-62
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• 2000

In this study, an attempt was made to demonstrate the possibility of using laser scribing method in manufacturing the barrier ribs of plasma display panel. The scribing with a CO2 laser was conducted on the green tape produced by the doctor blade tape casting method. Among the processing parameters, the quenching gas pressure, shape of mask, and laser power were found to affect the depth and angle of the scibed barrier ribs.

• 한국전기전자재료학회논문지
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• 제31권2호
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• pp.80-84
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• 2018

In this study, we investigated plasmon effects to maximize the sterilization of dielectric discharge. We predicted the effect using the finite difference time domain (FDTD) method as a function of electrode shape, size, and period. The structure of the electrode was designed with a thickness of 100 nm of silver nanoparticles on a glass substrate, and was varied according to the shape, size, and period of the electrode hole. Based on the results, it was confirmed that the effect of plasmons was independent of the shape of the electrode hole. It was thus confirmed that the plasmon effect depended only on the size and period of the holes. Further, the plasmon effect was affected by the size rather than period of the holes. Because the absorption of light by the metal varied according to the size of the hole, the plasmon effect generated by the absorption of light also varied. The best results were obtained when the radius and period of the electrode holes were $0.1{\mu}m$ and $0.4{\mu}m$, respectively.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.378-383
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• 2007

As the Minimally Invasive Surgery (MIS) is developed, an interventional procedure becomes the major of the spine surgery in the world. Despite of the use of the expensive medical equipments, the success chance of the nucleoplasty is about 30%. The reason is that the shape of the cannular needle is similar to that of the conventional injector and looks like the straight. Because the tip of these straight needles is not able to reach in the vicinity of the disc bulging or the protrusion, which are the cause of the low back pain and because the far indirect plasma discharge results in the decompression, the nucleoplasty has the limit. Many incurable diseases has not been solved due to the unexistence of the advanced technique for the MIS human body cannula device. If 3-D direction controllable cannular catheter (whose direction is accurately controlled after inserting into the bodies to cure the lesion) is developed, it is expected that new devised cannular catheter can cure many incurable diseases simultaneously. Therefore, the aims of this research are to develop the new devised cannular catheter of SMA direction controller for the medical situation, which has been produced through many previous trial-error procedures, and to produce the commercial medical device.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제48권2호
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• pp.133-140
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• 1999

The relationships between discharge characteristics and sustain electrode shape are studied in AC PDP by calculating the electric field and measuring discharge voltage, luminance and current. The maximum electric field is obtained for the triangle shape electrode. It is 1.8 times larger than uniform electric field type. It has been shown thatthe firing voltage is largely affected by the degree of electric field concentration. But, as the difference of the maximum and minimum value of electric field in a cell increases, the luminance and luminance efficiency decrease. And, the charge variation during discharge is proportional to the area of electrode.