Design and Characterization of a Microwave Plasma Source Using a Rectangular Resonant Cavity |
Kim, H.T.
(Department of Nuclear Engineering, Seoul National Universtiy)
Park, Y.S. (Department of Nuclear Engineering, Seoul National Universtiy) Sung, C.K. (Department of Nuclear Engineering, Seoul National Universtiy) Yi, J.R. (Department of Nuclear Engineering, Seoul National Universtiy) Hwang, Y.S. (Department of Nuclear Engineering, Seoul National Universtiy) |
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