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http://dx.doi.org/10.5757/JKVS.2008.17.5.408

Design and Characterization of a Microwave Plasma Source Using a Rectangular Resonant Cavity  

Kim, H.T. (Department of Nuclear Engineering, Seoul National Universtiy)
Park, Y.S. (Department of Nuclear Engineering, Seoul National Universtiy)
Sung, C.K. (Department of Nuclear Engineering, Seoul National Universtiy)
Yi, J.R. (Department of Nuclear Engineering, Seoul National Universtiy)
Hwang, Y.S. (Department of Nuclear Engineering, Seoul National Universtiy)
Publication Information
Journal of the Korean Vacuum Society / v.17, no.5, 2008 , pp. 408-418 More about this Journal
Abstract
The rectangular resonant cavity was designed and characterized as a microwave plasma source for focused ion beam. The optimum cavity was calculated analytically and analyzed in detail by using HFSS(High Frequency Structure Simulator). Since the resonant cavity can be affected by the permittivity of quartz chamber and plasma, the cavity is designed to be changeable in one direction. By observing the microwave input power at which the breakdown begins, the optimum cavity length for breakdown is measured and compared with the calculated one, showing in good agreement with the optimum length reduced by 10cm according to the permittivity change in the presence of quartz chamber. The shape of breakdown power curve as a function of pressure appears to be similar to Paschen-curve. After breakdown, plasma densities increase with microwave power and the reduced effective permittivity in the cavity with plasma results in larger optimum length. However, it is not possible to optimize the cavity condition for high density plasmas with increased input power, because too high input power causes expansion of density cutoff region where microwave cannot penetrate. For more accurate microwave cavity design to generate high density plasma, plasma column inside and outside the density cutoff region needs to be treated as a conductor or dielectric.
Keywords
Microwave; Plasma; Resonant cavity; Resonance; Cavity length;
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Times Cited By KSCI : 1  (Citation Analysis)
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