• JSTS:Journal of Semiconductor Technology and Science
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• 제4권2호
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• pp.117-123
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• 2004

A 30 nm $In_{0.7}GaAs$ High Electron Mobility Transistor (HEMT) with triple-gate has been successfully fabricated using the $SiO_2/SiN_x$ sidewall process and BCB planarization. The sidewall gate process was used to obtain finer lines, and the width of the initial line could be lessened to half by this process. To fill the Schottky metal effectively to a narrow gate line after applying the developed sidewall process, the sputtered tungsten (W) metal was utilized instead of conventional e-beam evaporated metal. To reduce the parasitic capacitance through dielectric layers and the gate metal resistance ($R_g$), the etchedback BCB with a low dielectric constant was used as the supporting layer of a wide gate head, which also offered extremely low Rg of 1.7 Ohm for a total gate width ($W_g$) of 2x100m. The fabricated 30nm $In_{0.7}GaAs$ HEMTs showed $V_{th}$of -0.4V, $G_{m,max}$ of 1.7S/mm, and $f_T$ of 421GHz. These results indicate that InGaAs nano-HEMT with excellent device performance could be successfully fabricated through a reproducible and damage-free sidewall process without the aid of state-of-the-art lithography equipment. We also believe that the developed process will be directly applicable to the fabrication of deep sub-50nm InGaAs HEMTs if the initial line length can be reduced to below 50nm order.

• 대한전자공학회논문지SD
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• 제49권5호
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• pp.16-21
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• 2012

본 논문에서는 CMOS 기반의 BJT 제작에 있어서 일반적인 BJT 구조에 비해 정합특성이 우수한 새로운 BJT 구조를 제안하고, 특성을 비교 분석하였다. 새로운 정합 구조가 기존의 정합 구조에 비해 콜렉터 전류 밀도 $J_C$는 0.361% 감소하였고, 전류이득 ${\beta}$는 0.166% 증가하여 큰 차이가 보이지 않았지만, 소자 면적이 10% 감소했으며, 콜렉터 전류($A_{Ic}$)와 전류이득($A_{\beta}$)의 정합 특성이 각각 45.74%, 38.73% 향상되었다. 이와 같이 정합특성이 개선된 주 이유는 쌍으로 형성된 BJT 소자들의 에미터 간의 거리가 감소한 것이라고 생각되며, deep n-well 저항의 표준편차 값이 다른 저항들에 비해 큰 것으로부터 간접적으로 증명이 된다고 여겨진다.

• 대한전자공학회논문지SD
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• 제46권12호
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• pp.105-112
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• 2009

본 논문에서는 $0.35{\mu}m$ Bipolar-CMOS-DMOS(BCD)공정으로 설계한 스마트 파워 IC 내의 가드링 코너 영역에서 발생하는 비정상적인 정전기 불량을 관측하고 이를 분석하였다. 칩내에서 래치업(Latch-up)방지를 위한 고전압 소자의 가드링에 연결되어 있는 Vcc단과 Vss 사이에 존재하는 기생 다이오드에서 발생한 과도한 전류 과밀 현상으로 정전기 내성 평가에서 Machine Model(MM)에서는 200V를 만족하지 못하는 불량이 발생하였다. Optical Beam Induced Resistance Charge(OBIRCH)와 Scanning Electronic Microscope(SEM)을 사용하여 불량이 발생한 지점을 확인하였고, 3D T-CAD 시뮬레이션으로 원인을 검증하였다. 시뮬레이션 결과를 통해 Local Oxidation(LOCOS)형태의 Isolation구조에서 과도한 정전기 전류가 흘렀을 때 코너영역의 형태에 따라 문제가 발생하는 것을 검증하였다. 이를 통해 정전기 내성이 개선된 가드링 코너 디자인 방법을 제안하였고 제품에 적용한 결과, MM 정전기 내성 평가에서 200V이상의 결과를 얻었다. 통계적으로 Test chip을 분석한 결과 기존의 결과 대비 20%이상 정전기 내성이 향상된 것을 확인 할 수 있었다. 이 결과를 바탕으로 BCD공정을 사용하는 칩 설계 시, 가드링 구조의 정전기 취약 지점을 Design Rule Check(DRC) 툴을 사용하여 자동으로 찾을 수 있는 설계 방법도 제안하였다. 본 연구에서 제안된 자동 검증방법을 사용하여, 동종 제품에 적용한 결과 24개의 에러를 검출하였으며, 수정 완료 제품은 동일한 정전기 불량은 발생하지 않았고 일반적인 정전기 내성 요구수준인 HBM 2000V / MM 200V를 만족하는 결과를 얻었다.

• 한국응용곤충학회지
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• 제52권1호
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• pp.35-43
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• 2013

국내 배추좀나방(Plutella xylostella) 집단은 피레스로이드 농약에 대해서 저항성을 보이며, 이는 이 살충제의 작용점인 소듐이온채널 유전자의 돌연변이에 기인된다. 더욱이 배추좀나방은 대부분 상용화된 살충제에 대해서 저항성을 발달시킬 수 있다. 본 연구는 배추좀나방을 효과적으로 방제하기 위해 내부기생성 천적인 프루텔고치벌(Cotesia plutellae)과 미생물농약인 Bacillus thuringiensis의 혼합처리 기술을 개발하기 위해 수행되었다. 프루텔고치벌이 감수성과 저항성 배추좀나방에 대한 기생 선호성에 차등이 있는 지 조사하기 위해 다섯 개 서로 다른 집단에 대해서 살충제 감수성과 프루텔고치벌 기생성 차이를 비교하였다. 이들 배추좀나방 집단들은 피레스로이드, 유기인계, 네오니코틴계 및 곤충성장조절제를 포함하는 세 종류의 상용 살충제에 대한 약제 감수성에서 뚜렷한 차이를 보였다. 그러나 이들 집단들은 프루텔고치벌에 의한 기생률에서는 차이를 보이지 않았다. 더욱이 기생된 배추좀나방은 B. thuringiensis에 대해서 감수성이 증가되었다. 프루텔고치벌이 갖는 면역억제인자 가운데 바이러스 유래 ankyrin 유전자(vankyrin)를 비기생된 배추좀나방에 발현시켰다. Vankyrin의 발현은 배추좀나방 3령충의 B. thuringiensis에 대한 감수성을 현격하게 증가시켰다. 즉, 프루텔고치벌에 의해 야기된 면역저하가 B. thuringiensis의 살충력을 증가시켰다. 이러한 결과들은 프루텔고치벌과 미생물농약인 B. thuringiensis의 혼합처리가 살충제 저항성 배추좀나방을 효과적으로 방제할 수 있다고 제시하고 있다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.133-133
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• 2008

Recently, as the down-scailing of field-effect transistor devices continues, Schottky-barrier field-effect transistors (SB-FETs) have attracted much attention as an alternative to conventional MOSFETs. SB-FETs have advantages over conventional devices, such as low parasitic source/drain resistance due to their metallic characteristics, low temperature processing for source/drain formation and physical scalability to the sub-10nm regime. The good scalability of SB-FETs is due to their metallic characteristics of source/drain, which leads to the low resistance and the atomically abrupt junctions at metal (silicide)-silicon interface. Nevertheless, some reports show that SB-FETs suffer from short channel effect (SCE) that would cause severe problems in the sub 20nm regime.[Ouyang et al. IEEE Trans. Electron Devices 53, 8, 1732 (2007)] Because source/drain barriers induce a depletion region, it is possible that the barriers are overlapped in short channel SB-FETs. In order to analyze the SCE of SB-FETs, we carried out systematic studies on the Schottky barrier overlapping in short channel SB-FETs using a SILVACO ATLAS numerical simulator. We have investigated the variation of surface channel band profiles depending on the doping, barrier height and the effective channel length using 2D simulation. Because the source/drain depletion regions start to be overlapped each other in the condition of the $L_{ch}$~80nm with $N_D{\sim}1\times10^{18}cm^{-3}$ and $\phi_{Bn}$ $\approx$ 0.6eV, the band profile varies as the decrease of effective channel length $L_{ch}$. With the $L_{ch}$~80nm as a starting point, the built-in potential of source/drain schottky contacts gradually decreases as the decrease of $L_{ch}$, then the conduction and valence band edges are consequently flattened at $L_{ch}$~5nm. These results may allow us to understand the performance related interdependent parameters in nanoscale SB-FETs such as channel length, the barrier height and channel doping.

• 한국정보전자통신기술학회논문지
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• 제13권1호
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• pp.64-71
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• 2020

전력 반도체 소자의 게이트 구동 칩의 아날로그 회로를 트리밍하기 위해서는 eFuse OTP IP가 필요하다. 기존의 NMOS 다이오드 형태의 eFuse OTP 셀은 셀 사이즈가 작은 반면 DNW(Deep N-Well) 마스크가 한 장 더 필요로 하는 단점이 있다. 본 논문에서는 CMOS 공정에서 추가 공정이 필요 없으면서 셀 사이즈가 작은 PMOS-다이오드 형태의 eFuse OTP 셀을 제안하였다. 본 논문에서 제안된 PMOS-다이오드 형태의 eFuse OTP 셀은 N-WELL 안에 형성된 PMOS 트랜지스터와 기억소자인 eFuse 링크로 구성되어 있으며, PMOS 트랜지스터에서 기생적으로 만들어지는 pn 접합 다이오드를 이용하였다. 그리고 PMOS-다이오드 형태의 eFuse 셀 어레이를 구동하기 위한 코어 구동회로를 제안하였으며, SPICE 모의실험 결과 제안된 코어 회로를 사용하여 61㏀의 post-program 저항을 센싱하였다. 한편 0.13㎛ BCD 공정을 이용하여 설계된 PMOS-다이오드 형태의 eFuse OTP 셀과 512b eFuse OTP IP의 레이아웃 사이즈는 각각 3.475㎛ × 4.21㎛ (=14.62975㎛2)과 119.315㎛ × 341.95㎛ (=0.0408㎟)이며, 웨이퍼 레벨에서 테스트한 결과 정상적으로 프로그램 되는 것을 확인하였다.

• 한국균학회소식:학술대회논문집
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• 한국균학회 2015년도 춘계학술대회 및 임시총회
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• pp.45-46
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• 2015

Clubroot disease of crucifers has occurred since 1957. It has spread to the whole China, especially in the southwest and nourtheast where it causes 30-80% loss in some fields. The disease has being expanded in the recent years as seeds are imported and the floating seedling system practices. For its effective control, the Ministry of Agriculture of China set up a program in 2010 and a research team led by Dr. Yueqiu HE, Yunnan Agricultural University. The team includes 20 main reseachers of 11 universities and 5 institutions. After 5 years, the team has made a lot of progresses in disease occurrence regulation, resources collection, resistance identification and breeding, biological agent exploration, formulation, chemicals evaluation, and control strategy. About 1200 collections of local and commercial crucifers were identified in the field and by artificiall inoculation in the laboratories, 10 resistant cultivars were breeded including 7 Chinese cabbages and 3 cabbages. More than 800 antagostic strains were isolated including bacteria, stretomyces and fungi. Around 100 chemicals were evaluated in the field and greenhouse based on its control effect, among them, 6 showed high control effect, especially fluazinam and cyazofamid could control about 80% the disease. However, fluzinam has negative effect on soil microbes. Clubroot disease could not be controlled by bioagents and chemicals once when the pathogen Plasmodiophora brassicae infected its hosts and set up the parasitic relationship. We found the earlier the pathogent infected its host, the severer the disease was. Therefore, early control was the most effective. For Chinese cabbage, all controlling measures should be taken in the early 30 days because the new infection could not cause severe symptom after 30 days of seeding. For example, a biocontrol agent, Bacillus subtilis Strain XF-1 could control the disease 70%-85% averagely when it mixed with seedling substrate and was drenching 3 times after transplanting, i.e. immediately, 7 days, 14 days. XF-1 has been deeply researched in control mechanisms, its genome, and development and application of biocontrol formulate. It could produce antagonistic protein, enzyme, antibiotics and IAA, which promoted rhizogenesis and growth. Its The genome was sequenced by Illumina/Solexa Genome Analyzer to assembled into 20 scaffolds then the gaps between scaffolds were filled by long fragment PCR amplification to obtain complet genmone with 4,061,186 bp in size. The whole genome was found to have 43.8% GC, 108 tandem repeats with an average of 2.65 copies and 84 transposons. The CDSs were predicted as 3,853 in which 112 CDSs were predicted to secondary metabolite biosynthesis, transport and catabolism. Among those, five NRPS/PKS giant gene clusters being responsible for the biosynthesis of polyketide (pksABCDEFHJLMNRS in size 72.9 kb), surfactin(srfABCD, 26.148 kb, bacilysin(bacABCDE 5.903 kb), bacillibactin(dhbABCEF, 11.774 kb) and fengycin(ppsABCDE, 37.799 kb) have high homolgous to fuction confirmed biosynthesis gene in other strain. Moreover, there are many of key regulatory genes for secondary metabolites from XF-1, such as comABPQKX Z, degQ, sfp, yczE, degU, ycxABCD and ywfG. were also predicted. Therefore, XF-1 has potential of biosynthesis for secondary metabolites surfactin, fengycin, bacillibactin, bacilysin and Bacillaene. Thirty two compounds were detected from cell extracts of XF-1 by MALDI-TOF-MS, including one Macrolactin (m/z 441.06), two fusaricidin (m/z 850.493 and 968.515), one circulocin (m/z 852.509), nine surfactin (m/z 1044.656~1102.652), five iturin (m/z 1096.631~1150.57) and forty fengycin (m/z 1449.79~1543.805). The top three compositions types (contening 56.67% of total extract) are surfactin, iturin and fengycin, in which the most abundant is the surfactin type composition 30.37% of total extract and in second place is the fengycin with 23.28% content with rich diversity of chemical structure, and the smallest one is the iturin with 3.02% content. Moreover, the same main compositions were detected in Bacillus sp.355 which is also a good effects biocontol bacterial for controlling the clubroot of crucifer. Wherefore those compounds surfactin, iturin and fengycin maybe the main active compositions of XF-1 against P. brassicae. Twenty one fengycin type compounds were evaluate by LC-ESI-MS/MS with antifungal activities, including fengycin A $C_{16{\sim}C19}$, fengycin B $C_{14{\sim}C17}$, fengycin C $C_{15{\sim}C18}$, fengycin D $C_{15{\sim}C18}$ and fengycin S $C_{15{\sim}C18}$. Furthermore, one novel compound was identified as Dehydroxyfengycin $C_{17}$ according its MS, 1D and 2D NMR spectral data, which molecular weight is 1488.8480 Da and formula $C_{75}H_{116}N_{12}O_{19}$. The fengycin type compounds (FTCPs $250{\mu}g/mL$) were used to treat the resting spores of P. brassicae ($10^7/mL$) by detecting leakage of the cytoplasm components and cell destruction. After 12 h treatment, the absorbencies at 260 nm (A260) and at 280 nm (A280) increased gradually to approaching the maximum of absorbance, accompanying the collapse of P. brassicae resting spores, and nearly no complete cells were observed at 24 h treatment. The results suggested that the cells could be lyzed by the FTCPs of XF-1, and the diversity of FTCPs was mainly attributed to a mechanism of clubroot disease biocontrol. In the five selected medium MOLP, PSA, LB, Landy and LD, the most suitable for growth of strain medium is MOLP, and the least for strains longevity is the Landy sucrose medium. However, the lipopeptide highest yield is in Landy sucrose medium. The lipopeptides in five medium were analyzed with HPLC, and the results showed that lipopeptides component were same, while their contents from B. subtilis XF-1 fermented in five medium were different. We found that it is the lipopeptides content but ingredients of XF-1 could be impacted by medium and lacking of nutrition seems promoting lipopeptides secretion from XF-1. The volatile components with inhibition fungal Cylindrocarpon spp. activity which were collect in sealed vesel were detected with metheds of HS-SPME-GC-MS in eight biocontrol Bacillus species and four positive mutant strains of XF-1 mutagenized with chemical mutagens, respectively. They have same main volatile components including pyrazine, aldehydes, oxazolidinone and sulfide which are composed of 91.62% in XF-1, in which, the most abundant is the pyrazine type composition with 47.03%, and in second place is the aldehydes with 23.84%, and the third place is oxazolidinone with 15.68%, and the smallest ones is the sulfide with 5.07%.