• Title/Summary/Keyword: Oxygen plasma treatment

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Effect of Plasma Treatment on TiO2/TiO2-x Resistance Random Access Memory (플라즈마 표면처리가 TiO2/TiO2-x 저항 변화형 메모리에 미치는 영향)

  • Kim, Han-Sang;Kim, Sung-Jin
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.33 no.6
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    • pp.454-459
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    • 2020
  • In this study, a TiO2/TiO2-x-based resistance variable memory was fabricated using a DC/RF magnetron sputtering system and ALD. In order to analyze the effect of oxygen plasma treatment on the performance of resistance random access memory (ReRAM), the TiO2/TiO2-x-based ReRAM was evaluated by applying RF power to the TiO2-x oxygen-holding layer at 30, 60, 90, 120, and 150 W, respectively. The ReRAM was fabricated, and the electrical and surface area performances were compared and analyzed. In the case of ReRAM without oxygen plasma treatment, the I-V curve had a hysteresis curve shape, but the width was very small, with a relatively high surface roughness of the oxygen-retaining layer. However, in the case of oxygen plasma treatment, the HRS/LRS ratio for the I-V curve improved as the applied RF power increased; stable improvement was also noted in the surface roughness of the oxygen-retaining layer. It was confirmed that the low voltage drive was not smooth due to charge trapping in the oxygen diffusion barrier layer owing to the high intensity ReRAM applied with an RF power of approximately 150 W.

Influence of Oxygen Plasma Treatment on Impact Behaviors of Carbon Fibers-reinforced Composites (산소 플라즈마 처리가 탄소섬유강화 복합재료의 충격특성에 미치는 영향)

  • Oh, Jin-Seok;Lee, Jae-Rock;Park, Soo-Jin
    • Proceedings of the Korean Society For Composite Materials Conference
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    • 2005.11a
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    • pp.23-26
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    • 2005
  • In this work, effects of oxygen plasma on surfc1ce characteristics of carbon fibers were investigated in impact strength of carbon fibers-reinforced composites. The surface properties of the carbon fibers were determined by acid/base values, FT-IR, and X-ray photoelectron spectroscopy (XPS). Also, the mechanical properties of the composites were studied by impact strength measurements. As experimental results, the $O_{IS}/C_{IS}$ ratio of the carbon fiber surfaces treated by oxygen plasma was increased compared to that of untreated ones, possibly due to development of oxygen-containing functional groups. The mechanical properties of the composites, including impact strength had been improved by the oxygen plasma on fibers. These results could be explained that the oxygen plasma resulted in the increase of the adhesion of between fibers and matrix in a composite system.

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Effects of Oxygen Surface Treatment on the Properties of TiO2 Thin Film for Self-cleaning Application (자기세정을 위한 스퍼터링 TiO2 박막의 산소 표면처리에 따른 특성)

  • Kim, Nam-Hoon;Park, Yong Seob
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.29 no.5
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    • pp.294-297
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    • 2016
  • Titanium oxide ($TiO_2$) thin films were fabricated by unbalanced magnetron (UBM) sputtering. The fabricated $TiO_2$ films were treated by oxygen plasma under various RF powers. We investigated the characteristics of oxygen plasma treatment on the surface, structural, and physical properties of $TiO_2$ films prepared at various plasma treatment RF powers. UBM sputtered $TiO_2$ films exhibited higher contact angle value, smooth surface, and amorphous structure. However, the rms surface roughness $TiO_2$ films were rough, and the contact angle value was decreased with the increase of the plasma treatment RF power Also, the hardness value of $TiO_2$ film as physical properties was slightly increased with the increase of the plasma treatment RF power. In the results, the performance of $TiO_2$ films for self cleaning critically depended on the with the plasma treatment RF power.

Effects of Low Pressure and Atmospheric Pressure Plasma Treatment on Contact Angle of Polycarbonate Surface (저압 및 대기압 플라즈마 처리를 통한 폴리카보네이트의 접촉각 변화특성 비교)

  • Won, Dong Su;Kim, Tae Kyung;Lee, Won Gyu
    • Applied Chemistry for Engineering
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    • v.21 no.1
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    • pp.98-103
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    • 2010
  • The effect of plasma treatment on surface characteristics of polycarbonate (PC) films was investigated using low pressure plasma and atmospheric pressure plasma with oxygen and argon. Untreated PC has a contact angle of $82.31^{\circ}$ with de-ionized water which reduced to $9.17^{\circ}$ as the lowest value after being treated with a low pressure plasma treatment with oxygen. Increase of delivered powers such as RF and AC with a high frequency and gas flow rates was not effective to reduce contact angles dramatically but gave the trend of reducing gradually. The surface of PC treated with plasma shows a low contact angle but the contact angle increases rapidly according to the exposure time in air ambient. Oxygen plasma was more effective to generate the polar functional group regardless of the type of plasma. Conclusively, a low plasma treatment with oxygen is more recommendable when the hydrophilic surface of PC is required.

Analysis of Plasma Treatment Effects on a Compliant Substrate for High Conductive, Stretchable Ag Nanowires

  • Jeong, Jonghyun;Jeong, Jaewook
    • Applied Science and Convergence Technology
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    • v.27 no.1
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    • pp.5-8
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    • 2018
  • In this paper, plasma treatment effects on a ploy(dimethyl siloxane) substrate were analyzed for the applications of stretchable silver nanowire (Ag NWs) electrodes. The oxygen plasma treated sample shows the best performance compared to nitrogen treated and untreated samples. The lowest sheet resistance and reasonable stretching capability was achieved up to 20% strain condition without open circuit fail for the oxygen plasma treated sample.

Effect of Plasma Treatment on Mechanical Properties of Carbon Fibers-reinforced Composites (플라즈마 처리가 탄소섬유강화 복합재료의 기계적특성에 미치는 영향)

  • Oh, Jin-Seok;Lee, Jae-Rock;Park, Soo-Jin
    • Proceedings of the Korean Society For Composite Materials Conference
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    • 2005.04a
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    • pp.80-83
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    • 2005
  • In this work, effects of oxygen plasma on surface characteristics of carbon fibers were investigated in mechanical properties interfacial of carbon fibers-reinforced composites. The surface properties of the carbon fibers were determined by acid/base values, FT-IR, and X-ray photoelectron spectroscopy (XPS). Also, the mechanical properties of the composites were studied in and critical stress intensity factor ($K_{IC}$) and critical strain energy release rate mode II ($G_{IIC}$) measurements. As experimental results, the $O_{lS}/C_{lS}$ ratio of the carbon fiber surfaces treated by oxygen plasma was increased compared to that of untreated ones, possibly due to development of oxygen-containing functional groups. The mechanical properties of the composites, including $K_{IC}$ and $G_{IIC}$ had been improved in the oxygen plasma on fibers. These results could be explained that the oxygen plasma was resulted in the increase of the adhesion of between fibers and matrix in a composite system.

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Mechanical behavior of HPFRCC using limestone calcined clay cement (LC3) and oxygen plasma treated PP fibers

  • Sajjad Mirzamohammadi;Masoud Soltani
    • Structural Engineering and Mechanics
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    • v.89 no.4
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    • pp.349-362
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    • 2024
  • High-performance fiber-reinforced cement composites (HPFRCC) are new materials created and used to repair, strengthen, and improve the performance of different structural parts. When exposed to tensile tension, these materials show acceptable strain-hardening. All of the countries of the globe currently seem to have a need for these building materials. This study aims to create a low-carbon HPFRCC (high ductility) that is made from materials that are readily available locally which has the right mechanical qualities, especially an increase in tensile strain capacity and environmental compatibility. In order to do this, the effects of fiber volume percent (0%, 0.5%, 1%, and 2%), and determining the appropriate level, filler type (limestone powder and silica sand), cement type (ordinary Portland cement, and limestone calcined clay cement or LC3), matrix hardness, and fiber type (ordinary and oxygen plasma treated polypropylene fiber) were explored. Fibers were subjected to oxygen plasma treatment at several powers and periods (50 W and 200 W, 30, 120, and 300 seconds). The influence of the above listed factors on the samples' three-point bending and direct tensile strength test results has been examined. The results showed that replacing ordinary Portland cement (OPC) with limestone calcined clay cement (LC3) in mixtures reduces the compressive strength, and increases the tensile strain capacity of the samples. Furthermore, using oxygen plasma treatment method (power 200 W and time 300 seconds) enhances the bonding of fibers with the matrix surface; thus, the tensile strain capacity of samples increased on average up to 70%.

Effects of Plasma Treatment on the Reliability of a-IGZO TFT

  • Xin, Dongxu;Cui, Ziyang;Kim, Taeyong;Yi, Junsin
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.34 no.2
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    • pp.85-89
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    • 2021
  • High reliability thin film transistors are important factors for next-generation displays. The reliability of transparent a-IGZO semiconductors is being actively studied for display applications. A plasma treatment can fill the oxygen vacancies in the channel layer and the channel layer/insulating layer interface so that the device can work stably under a bias voltage. This paper studies the effect of plasma treatment on the performance of a-IGZO TFT devices. The influence of different plasma gases on the electrical parameters of device and its working reliability are reviewed. The article mentions argon, fluorine, hydrogen and several ways of processing in the atmosphere. Among these methods, F (fluorine) plasma treatment can maximize equipment reliability. It is expected that the presented results will form a basis for further research to improve the reliability of a-IGZO TFT.

Enhancement of Hydrophobicity by a Heat Treatment of Zinc Aluminate Thin Film Deposited on Glass Substrate (글라스 기판 위에 증착된 Zin Aluminate 박막의 열처리를 통한 소수성 특성의 향상)

  • Seo, Sang-Young;Yoon, Soon-Gil
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.33 no.4
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    • pp.249-254
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    • 2020
  • An 80 nm thick zinc aluminate thin film was deposited on a glass substrate via radio-frequency (rf) magnetron sputtering and heat treated to analyze changes in the wetting angles due to a surface modification. The thin films were modified from hydrophilic to hydrophobic by a simple thermal treatment. The surface modification from a heat treatment increased the wetting angles up to 111°, which was explained by the relationship with the excess surface area. The wetting angles of the annealed thin films decreased with increasing exposure time under ambient conditions, which was attributed to the oxygen vacancies in the films that were introduced during deposition. The annealed thin films were treated by ionized oxygen via oxygen plasma. After the oxygen plasma treatment, the decreased wetting angles were maintained at ~95° for 11 days.

Effects of Oxygen Functional Groups introduced onto Activated Carbon Fibers on Gas Sensing Property of Chemical Warfare Agent (활성탄소섬유에 도입된 산소작용기가 유독성 화학작용제 감응특성에 미치는 영향)

  • Kim, Su Hyun;Kim, Min-Ji;Song, Eun Ji;Lee, Young-Seak
    • Applied Chemistry for Engineering
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    • v.30 no.6
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    • pp.719-725
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    • 2019
  • In this study, activated carbon fibers were treated with oxygen plasma to investigate gas sensing properties of the dimethyl methylphosphonate (DMMP), which is a simulant gas of the chemical warfare agent, according to oxygen functional group contents. As the flow rate of oxygen plasma treatment increased, oxygen groups were introduced to the surface of activated carbon fibers from 6.90 up to 36.6%, increasing the -OH group which influences the DMMP gas sensing properties. However, as the flow rate of oxygen plasma increases, the specific surface area tends to decrease because etching on the surface of activated carbon fibers occurs due to active species generated during the oxygen plasma treatment. The resistance change rate of the DMMP gas sensor increased from 4.2 up to 25.1% as the oxygen plasma treatment flow rate increased. This is attributed to the hydrogen bonding between DMMP gas and introduced hydroxyl functional group on activated carbon fibers by the oxygen plasma treatment. Therefore, the oxygen plasma is considered to be one of the important surface treatment methods for detecting chemical warfare agents at room temperature.