• 한국전기전자재료학회논문지
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• 제33권6호
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• pp.454-459
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• 2020

In this study, a TiO₂/TiO_2-x-based resistance variable memory was fabricated using a DC/RF magnetron sputtering system and ALD. In order to analyze the effect of oxygen plasma treatment on the performance of resistance random access memory (ReRAM), the TiO₂/TiO_2-x-based ReRAM was evaluated by applying RF power to the TiO_2-x oxygen-holding layer at 30, 60, 90, 120, and 150 W, respectively. The ReRAM was fabricated, and the electrical and surface area performances were compared and analyzed. In the case of ReRAM without oxygen plasma treatment, the I-V curve had a hysteresis curve shape, but the width was very small, with a relatively high surface roughness of the oxygen-retaining layer. However, in the case of oxygen plasma treatment, the HRS/LRS ratio for the I-V curve improved as the applied RF power increased; stable improvement was also noted in the surface roughness of the oxygen-retaining layer. It was confirmed that the low voltage drive was not smooth due to charge trapping in the oxygen diffusion barrier layer owing to the high intensity ReRAM applied with an RF power of approximately 150 W.

• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 2005년도 추계학술발표대회 논문집
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• pp.23-26
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• 2005

In this work, effects of oxygen plasma on surfc1ce characteristics of carbon fibers were investigated in impact strength of carbon fibers-reinforced composites. The surface properties of the carbon fibers were determined by acid/base values, FT-IR, and X-ray photoelectron spectroscopy (XPS). Also, the mechanical properties of the composites were studied by impact strength measurements. As experimental results, the $O_{IS}/C_{IS}$ ratio of the carbon fiber surfaces treated by oxygen plasma was increased compared to that of untreated ones, possibly due to development of oxygen-containing functional groups. The mechanical properties of the composites, including impact strength had been improved by the oxygen plasma on fibers. These results could be explained that the oxygen plasma resulted in the increase of the adhesion of between fibers and matrix in a composite system.

• 한국전기전자재료학회논문지
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• 제29권5호
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• pp.294-297
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• 2016

Titanium oxide ($TiO_2$) thin films were fabricated by unbalanced magnetron (UBM) sputtering. The fabricated $TiO_2$ films were treated by oxygen plasma under various RF powers. We investigated the characteristics of oxygen plasma treatment on the surface, structural, and physical properties of $TiO_2$ films prepared at various plasma treatment RF powers. UBM sputtered $TiO_2$ films exhibited higher contact angle value, smooth surface, and amorphous structure. However, the rms surface roughness $TiO_2$ films were rough, and the contact angle value was decreased with the increase of the plasma treatment RF power Also, the hardness value of $TiO_2$ film as physical properties was slightly increased with the increase of the plasma treatment RF power. In the results, the performance of $TiO_2$ films for self cleaning critically depended on the with the plasma treatment RF power.

• 공업화학
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• 제21권1호
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• pp.98-103
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• 2010

저압 플라즈마와 대기압 플라즈마를 사용하여 폴리카보네이트를 처리한 후 표면 개질 효과를 접촉각 측정을 통하여 비교 분석하였다. 플라즈마 처리 전의 폴리카보네이트의 탈이온수의 접촉각은 $82.31^{\circ}$이었으나 플라즈마 처리 후의 최소 접촉각은 산소 분위기의 저압 플라즈마에서 $9.17^{\circ}$의 최소 접촉각을 얻을 수 있었다. 플라즈마 방전 전력과 반응기체의 유량 증가에 따른 접촉각의 변화는 크지 않았으나 지속적으로 감소하는 특성을 보였다. 플라즈마 처리 후 경과시간에 따라 접촉각의 증가 현상을 보여 플라즈마 처리 후 후속 공정은 가급적 빨리 진행하는 것이 표면에너지 증가에 따른 효과를 이용하는데 효율적이다. 표면 화학결합 분석에서 산소분위기의 플라즈마 처리는 표면에 상대적으로 많은 극성 작용기를 형성하였다. 전반적으로 폴리카보네이트의 표면 개질에서 저압 산소플라즈마를 사용하여 처리하는 것이 대기압 플라즈마보다 효과적으로 친수성 표면을 만들 수 있었다.

• Applied Science and Convergence Technology
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• 제27권1호
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• pp.5-8
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• 2018

In this paper, plasma treatment effects on a ploy(dimethyl siloxane) substrate were analyzed for the applications of stretchable silver nanowire (Ag NWs) electrodes. The oxygen plasma treated sample shows the best performance compared to nitrogen treated and untreated samples. The lowest sheet resistance and reasonable stretching capability was achieved up to 20% strain condition without open circuit fail for the oxygen plasma treated sample.

• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 2005년도 춘계학술발표대회 논문집
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• pp.80-83
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• 2005

In this work, effects of oxygen plasma on surface characteristics of carbon fibers were investigated in mechanical properties interfacial of carbon fibers-reinforced composites. The surface properties of the carbon fibers were determined by acid/base values, FT-IR, and X-ray photoelectron spectroscopy (XPS). Also, the mechanical properties of the composites were studied in and critical stress intensity factor ($K_{IC}$) and critical strain energy release rate mode II ($G_{IIC}$) measurements. As experimental results, the $O_{lS}/C_{lS}$ ratio of the carbon fiber surfaces treated by oxygen plasma was increased compared to that of untreated ones, possibly due to development of oxygen-containing functional groups. The mechanical properties of the composites, including $K_{IC}$ and $G_{IIC}$ had been improved in the oxygen plasma on fibers. These results could be explained that the oxygen plasma was resulted in the increase of the adhesion of between fibers and matrix in a composite system.

• Structural Engineering and Mechanics
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• 제89권4호
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• pp.349-362
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• 2024

High-performance fiber-reinforced cement composites (HPFRCC) are new materials created and used to repair, strengthen, and improve the performance of different structural parts. When exposed to tensile tension, these materials show acceptable strain-hardening. All of the countries of the globe currently seem to have a need for these building materials. This study aims to create a low-carbon HPFRCC (high ductility) that is made from materials that are readily available locally which has the right mechanical qualities, especially an increase in tensile strain capacity and environmental compatibility. In order to do this, the effects of fiber volume percent (0%, 0.5%, 1%, and 2%), and determining the appropriate level, filler type (limestone powder and silica sand), cement type (ordinary Portland cement, and limestone calcined clay cement or LC3), matrix hardness, and fiber type (ordinary and oxygen plasma treated polypropylene fiber) were explored. Fibers were subjected to oxygen plasma treatment at several powers and periods (50 W and 200 W, 30, 120, and 300 seconds). The influence of the above listed factors on the samples' three-point bending and direct tensile strength test results has been examined. The results showed that replacing ordinary Portland cement (OPC) with limestone calcined clay cement (LC3) in mixtures reduces the compressive strength, and increases the tensile strain capacity of the samples. Furthermore, using oxygen plasma treatment method (power 200 W and time 300 seconds) enhances the bonding of fibers with the matrix surface; thus, the tensile strain capacity of samples increased on average up to 70%.

• 한국전기전자재료학회논문지
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• 제34권2호
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• pp.85-89
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• 2021

High reliability thin film transistors are important factors for next-generation displays. The reliability of transparent a-IGZO semiconductors is being actively studied for display applications. A plasma treatment can fill the oxygen vacancies in the channel layer and the channel layer/insulating layer interface so that the device can work stably under a bias voltage. This paper studies the effect of plasma treatment on the performance of a-IGZO TFT devices. The influence of different plasma gases on the electrical parameters of device and its working reliability are reviewed. The article mentions argon, fluorine, hydrogen and several ways of processing in the atmosphere. Among these methods, F (fluorine) plasma treatment can maximize equipment reliability. It is expected that the presented results will form a basis for further research to improve the reliability of a-IGZO TFT.

• 한국전기전자재료학회논문지
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• 제33권4호
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• pp.249-254
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• 2020

An 80 nm thick zinc aluminate thin film was deposited on a glass substrate via radio-frequency (rf) magnetron sputtering and heat treated to analyze changes in the wetting angles due to a surface modification. The thin films were modified from hydrophilic to hydrophobic by a simple thermal treatment. The surface modification from a heat treatment increased the wetting angles up to 111°, which was explained by the relationship with the excess surface area. The wetting angles of the annealed thin films decreased with increasing exposure time under ambient conditions, which was attributed to the oxygen vacancies in the films that were introduced during deposition. The annealed thin films were treated by ionized oxygen via oxygen plasma. After the oxygen plasma treatment, the decreased wetting angles were maintained at ~95° for 11 days.

• 공업화학
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• 제30권6호
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• pp.719-725
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• 2019

본 실험에서는 활성탄소섬유에 산소플라즈마 처리를 실시하여 산소작용기 도입 함량에 따른 유독성 화학작용제의 모사 가스인 dimethyl methylphosphonate (DMMP) 감응특성에 대하여 고찰하였다. 산소플라즈마 처리 유량이 증가할수록 활성탄소섬유 표면에 산소가 6.90%에서 최대 36.6%까지 도입되어 DMMP 가스 감응특성에 영향을 미치는 -OH가 증가하였다. 그러나 유량이 증가할수록 산소플라즈마 처리 시 발생한 산소 활성종으로 인하여 활성탄소섬유 표면에 식각이 발생하여 비표면적은 감소하는 경향을 보였다. DMMP 가스센서의 저항변화율은 산소플라즈마 처리 유량이 증가함에 따라 4.2%에서 최대 25.1%까지 증가하였다. 이는 산소플라즈마 처리로 인하여 활성탄소섬유에 발달된 -OH와 DMMP 가스의 수소결합으로 인한 것이라 여겨진다. 따라서 산소플라즈마 처리는 상온에서 유독성화학작용제 가스를 감지하기 위한 중요한 표면처리 방법 중 하나라고 판단된다.