• 제목/요약/키워드: Oxide bonding

검색결과 310건 처리시간 0.021초

도재소부용 금합금에서 인듐, 주석 첨가가 금속-도재계면 특성에 미치는 영향 (Effects of Indium and Tin on Interfacial Property of Porcelain Fused to Low Gold Alloys)

  • 남상용;곽동주;정석민
    • 대한치과기공학회지
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    • 제23권1호
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    • pp.31-43
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    • 2001
  • This study was performed to observe the micro-structure change of surface, behavior of oxide change of element, the component transformation of the alloy and the bonding strength between the porcelain interface in order to investigate effects of indium, tin on interfacial properties of porcelain fused to low gold alloy. Hardness of castings was measured with a micro-Vicker's hardness tester. The compositional change of the surface of heat-treated specimen was analyzed with an EDS and an EPMA. The interfacial shear bonding strength between alloy specimen and fused porcelain was measured with a mechanical testing system(MTS 858.20). The results were as follows: 1) The hardness value of alloy increased as increasing amount of indium addition. 2) The formation of oxidation increased as increasing indium and tin contents after heat treatment. 3) Diffusion of indium and tin elements increased as increasing indium and tin contents in metal-porcelain surface after porcelain fused to metal firing. 4) The most interfacial shear bonding strength was increased as increasing a composition of adding elements, and a heat-treatment time, and an oxygen partial pressure. From the results of this study it was found that the addition of alloying elements such as indium and tin increase hardness of as-cast alloy, produce surface oxide layer of adding elements by heat-treatment which may improve interfacial bonding strength between alloy and porcelain.

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접합 공정 조건이 Al-Al 접합의 계면접착에너지에 미치는 영향 (Effect of Bonding Process Conditions on the Interfacial Adhesion Energy of Al-Al Direct Bonds)

  • 김재원;정명혁;장은정;박성철;;;;김성동;박영배
    • 한국재료학회지
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    • 제20권6호
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    • pp.319-325
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    • 2010
  • 3-D IC integration enables the smallest form factor and highest performance due to the shortest and most plentiful interconnects between chips. Direct metal bonding has several advantages over the solder-based bonding, including lower electrical resistivity, better electromigration resistance and more reduced interconnect RC delay, while high process temperature is one of the major bottlenecks of metal direct bonding because it can negatively influence device reliability and manufacturing yield. We performed quantitative analyses of the interfacial properties of Al-Al bonds with varying process parameters, bonding temperature, bonding time, and bonding environment. A 4-point bending method was used to measure the interfacial adhesion energy. The quantitative interfacial adhesion energy measured by a 4-point bending test shows 1.33, 2.25, and $6.44\;J/m^2$ for 400, 450, and $500^{\circ}C$, respectively, in a $N_2$ atmosphere. Increasing the bonding time from 1 to 4 hrs enhanced the interfacial fracture toughness while the effects of forming gas were negligible, which were correlated to the bonding interface analysis results. XPS depth analysis results on the delaminated interfaces showed that the relative area fraction of aluminum oxide to the pure aluminum phase near the bonding surfaces match well the variations of interfacial adhesion energies with bonding process conditions.

Hot AC Anodising as a Cr(VI)-free Pre-treatment for Structural Bonding of Aluminium

  • Lapique, Fabrice;Bjorgum, Astrid;Johnsen, Bernt;Walmsley, John
    • 접착 및 계면
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    • 제4권2호
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    • pp.21-29
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    • 2003
  • Hot AC anodising has been evaluated us pre-treatment for aluminium prior to structural adhesive bonding. Phosphoric and sulphuric acid hot AC anodising showed very promising adhesion promoter capabilities with durability comparable with the best standard DC anodising procedures. AC anodising does not required etching prior to anodising and offers u pre-treatment time down to 20 seconds. The interface/interphase between the aluminium substrate and the adhesive was investigated in order to get a better understanding of the involved adhesion mechanisms and to explain the long-tenn properties. The alkaline medium formed at the oxide layer/adhesive interface has been shown to induce a partial dissolution of the oxide layer leading to the formation of metallic ions which diffuse in the adhesive (EPMA measurements). The effect of diffusion of the Al ions on adhesion and joint durability is still uncertain but studies showed that pre-bond moisture affected the joints durability and to some extent the diffusion length. specially for DC anodised samples. So far no direct correlation could be established between the diffusion length d and the joints durability but new trials with better control over the elapsed time between bonding and adhesive curing are expected to help getting a better understanding of the involved mechanisms.

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Investigation of Pellet-Clad Mechanical Interaction in Failed Spent PWR Fuel

  • Jung, Yang Hong;Baik, Seung Je
    • Corrosion Science and Technology
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    • 제18권5호
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    • pp.175-181
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    • 2019
  • A failed spent fuel rod with 53,000 MWd/tU from a nuclear power plant was characterized, and the fission products and oxygen layer in the pellet-clad mechanical interaction region were observed using an EPMA (Electron Probe Micro-Analyzer). A sound fuel rod burned under similar conditions was used to compare and analyze, the results of the failed fuel rod. In the failed fuel rod, the oxide layer represented $10{\mu}m$ of the boundary of the cladding, and $35{\mu}m$ of the region outside the cladding. By comparison, in the sound fuel rod, the oxide layer was $8{\mu}m$, observed in the cladding boundary region. The cladding inner surface corrosion and the resulting fuel-cladding bonding were investigated using an EPMA. Zirconium existed in the bonding layer of the (U, Zr)O compound beyond the pellet cladding interaction gap of $20{\mu}m$, and composition of UZr2O3 was observed in the failed fuel rod. This paper presents the results of the EPMA examination of a spent fuel specimen, and a technique to analyze fission products in the pellet-clad mechanical interaction region.

플라즈마와 초음파를 이용한 무플럭스 솔데 플립칩 접합에 관한 연구 (A Study on Fluxless Solder Flip Chip Bonding Using Plasma & Ultrasonic Wave)

  • 홍순민;강춘식;정재필
    • 한국마이크로전자및패키징학회:학술대회논문집
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    • 한국마이크로전자및패키징학회 2001년도 추계 기술심포지움
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    • pp.138-140
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    • 2001
  • Fluxless flip chip bonding using plasma & ultrasonic wave was investigated in order to evaluate the effect of plasma & ultrasonic treatment on the bondability of the Sn-3.5wt%Ag solder bumped die to TSM-coated glass substrate. The $Ar+10%H_2plasma$ was effective in removing tin oxide on solder surface. The die shear strength of the plasma-treated Si-chip is higher than that of non-treated specimen but lower than that of specimen bonded with flux. The die shear strength with the bonding load at 25W ultrasonic power increased to 0.8N/bump for all bonding temperature but decreased above 1.0N/bump.

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A-8 Three -Dimensional Crystalizing Combined $\pi$-Bonding Orbitals ("O" S' Bonding) And Electrical And Mechanical Properties of Alloy Metals

  • Oh, Hung-Kuk
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 1995년도 춘계학술대회논문집
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    • pp.90-106
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    • 1995
  • The "O"S' BONDING make metallic and non-metalic crystal structures and form localized superconducting orbitals , which induce electrical conduction , semi-conduction, and superconduction. The orbitals are proced by Ampere's law, Faraday's law , Meissner effect, highcritical temperature of thecopper oxide layers. abnomal trans-membrane signal in cancer cell and plastic deformations bytwins and dislocations, In the case of alloying metals, the most deterimentla cases of electrical conduction are those of solid solution and intermetalic compound . The highest case for the hardness are also those of solid solution and intermetallic compound. It explains the contributions of the "O"S' BONDING for conduction bands and plastic deformation by twins and dislocations.ns and dislocations.

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Electrothermal Analysis for Super-Junction TMOSFET with Temperature Sensor

  • Lho, Young Hwan;Yang, Yil-Suk
    • ETRI Journal
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    • 제37권5호
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    • pp.951-960
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    • 2015
  • For a conventional power metal-oxide-semiconductor field-effect transistor (MOSFET), there is a trade-off between specific on-state resistance and breakdown voltage. To overcome this trade-off, a super-junction trench MOSFET (TMOSFET) structure is suggested; within this structure, the ability to sense the temperature distribution of the TMOSFET is very important since heat is generated in the junction area, thus affecting its reliability. Generally, there are two types of temperature-sensing structures-diode and resistive. In this paper, a diode-type temperature-sensing structure for a TMOSFET is designed for a brushless direct current motor with on-resistance of $96m{\Omega}{\cdot}mm^2$. The temperature distribution for an ultra-low on-resistance power MOSFET has been analyzed for various bonding schemes. The multi-bonding and stripe bonding cases show a maximum temperature that is lower than that for the single-bonding case. It is shown that the metal resistance at the source area is non-negligible and should therefore be considered depending on the application for current driving capability.

Mold 법에 의해 제작된 FED용 전계에미터어레이의 특성 분석 (Fabrication & Properties of Field Emitter Arrays using the Mold Method for FED Application)

  • 류정탁;조경제;이상윤;김연보
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 하계학술대회 논문집
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    • pp.347-350
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    • 2001
  • A typical Mold method is to form a gate electrode, a gate oxide, and emitter tip after fabrication of mold shape using wet-etching of Si substrate. In this study, however, new Mold method using a side wall space structure is used in order to make sharper emitter tip with a gate electrode. Using LPCVD(low pressure chemical vapor deposition), a gate oxide and electrode layer are formed on a Si substrate, and then BPSG(Boro phospher silicate glass) thin film is deposited. After, the BPSG thin film is flowed into a mold as high temperature in order to form a sharp mold structure. Next TiN thin film is deposited as a emitter tip substance. The unfinished device with a glass substrate is bonded by anodic bonding techniques to transfer the emitters to a glass substrate, and Si substrate is etched using KOH-deionized water solution. Finally, we made sharp field emitter array with gate electrode on the glass substrate.

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티타늄과 비귀금속 합금에 중간층으로 적용한 Au bonding agent의 금속-도재 결합에 대한 평가 (Evaluation of Bond Strength in cp-Ti and Non-precious Metal-Ceramic System Using a Gold Bonding Agent)

  • 이정환;안재석
    • 대한치과기공학회지
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    • 제31권4호
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    • pp.15-23
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    • 2009
  • The aim of this study was to evaluate the bond strength of using a Au bonding agent applied on cp-Ti and nonprecious metal-gold-ceramic system. Metallic frameworks(diameter: 5mm, height: 20mm)(N=56, n=7per group) cast in Ni-Cr alloy, Co-Cr alloy and cp-Ti were obtained using acrylic templates and airborne particle abraded with $110{\mu}m$ aluminum oxide. Au bonding agent was applied on wash opaque firing as intermediate layer. SEM and SEM/EDS line profile were performed on the cutting the cross-section of the metal substrate-porcelain with intermediate Au coating. Groups were tested using shear bond strength(SBS) testing at 0.5mm/min. The mean SBS values for the ceramic-Au layer-metal combination were significantly higher than those ceramic-metal combination. While ceramic-Au layer-cp-Ti combinations failed to increase bond strength instead of using a titanium bonding porcelain. The appication of using Au intermediate layer significantly improve the bond strength combination with metal-ceramic system.

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산화막위에 증착된 금속박막과 산화막과의 계면결합에 영향 미치는 열처리 효과 (Annealing Effect on Adhesion Between Oxide Film and Metal Film)

  • 김응수
    • 대한전자공학회논문지SD
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    • 제41권1호
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    • pp.15-20
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    • 2004
  • 산화막위에 증착된 금속박막과 산화막과의 계면효과를 조사하였다. 산화막으로는 현재 반도체소자제조공정에 많이 사용되고 있는 BPSG 산화막과 PETEOS 산화막을 사용하였다. 이 두 종류의 산화막위에 적층구조의 금속박막을 형성한 후, 금속박막의 열처리에 의한 계면의 영향을 SEM (scanning electron microscopy), TEM (transmission electron microscopy), AES (auger electron spectroscopy)를 사용하여 조사하였다. BPSG 산화막위에 증착된 금속박막을 $650^{\circ}C$ 이상에서 RTP anneal을 한 경우, BPSG 산화막과 금속박막의 계면결합상태가 좋지 않았고, BPSG 산화막과 금속박막의 계면에 phosphorus가 축적된 영역을 확인하였다. 반면에 PETEOS 산화막위에 증착된 금속박막의 경우, RTP anneal 온도에 관계없이 계면결합상태는 좋았다. 본 연구에서 BPSG 산화막위에 금속박막을 증착할 경우 RTP anneal 온도는 $650^{\circ}C$ 보다 작게 하여야 함을 알 수 있었다.