• Corrosion Science and Technology
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• v.9 no.1
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• pp.20-28
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• 2010

According to the bipolar model, ion selectivity of some species in the passive film is important factor to control the passivation. An increase of cation selectivity of outer layer of the passive film can stabilize the film and improves the corrosion resistance. Therefore, the formation and roles of ionic species in the passive film should be elucidated. In this work, two types of solution (hydrochloric or sulfuric acid) were used to test high N and Mo-bearing stainless steels. The objective of this work was to investigate the formation of oxyanions in the passive film and the roles of oxyanions in passivation of stainless steel. Nitrogen exists as atomic nitrogen, nitric oxide, nitro-oxyanions (${NO_x}^-$), and N-H species, not nitride in the passive film. Because of its high mobility, the enriched atomic nitrogen can act as a reservoir. The formation of N-H species buffers the film pH and facilitates the formation of oxyanions in the film. ${NO_x}^-$ species improve the cation selectivity of the film, increasing the oxide content and film density. ${NO_x}^-$ acts similar to a strong inhibitor both in the passive film and at active sites. This facilitates the formation of chromium oxide. Also, ${NO_x}^-$ can make more molybdate and nitric oxide by reacting with Mo. The role of Mo addition on the passivation characteristics of stainless steel may differ with the test environment. Mo exists as metallic molybdenum, molybdenum oxide, and molybdate and the latter facilitates the oxide formation. When nitrogen and molybdenum coexist in stainless steel, corrosion resistance in chloride solutions is drastically increased. This synergistic effect of N and Mo in a chloride solution is mainly due to the formation of nitro-oxyanions and molybdate ion. Oxyanions can be formed by a 'solid state reaction' in the passive film, resulting in the formation of more molybdate and nitric oxide. These oxyanions improve the cation selectivity of the outer layer and form more oxide and increase the amount of chromium oxide and the ratio of $Cr_2O_3/Cr(OH)_3$ and make the film stable and dense.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.284-284
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• 2011

Recently, the increasing degree of device integration in the fabrication of Si semiconductor devices, etching processes of nano-scale materials and high aspect-ratio (HAR) structures become more important. Due to this reason, etch selectivity control during etching of HAR contact holes and trenches is very important. In this study, The etch selectivity and etch rate of TEOS oxide layer using ACL (amorphous carbon layer) mask are investigated various process parameters in CH2F2/C4F8/O2/Ar plasma during etching TEOS oxide layer using ArF/BARC/SiOx/ACL multilevel resist (MLR) structures. The deformation and etch characteristics of TEOS oxide layer using ACL hard mask was investigated in a dual-frequency superimposed capacitively coupled plasma (DFS-CCP) etcher by different fHF/ fLF combinations by varying the CH2F2/ C4F8 gas flow ratio plasmas. The etch characteristics were measured by on scanning electron microscopy (SEM) And X-ray photoelectron spectroscopy (XPS) analyses and Fourier transform infrared spectroscopy (FT-IR). A process window for very high selective etching of TEOS oxide using ACL mask could be determined by controlling the process parameters and in turn degree of polymerization. Mechanisms for high etch selectivity will discussed in detail.

• Journal of the Korean Society of Safety
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• v.38 no.2
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• pp.30-35
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• 2023

Acetone is a widely used Volatile Organic Compound (VOC) in industries and laboratories. However, acetone affects human health adversely and causes fires and explosions. Early acetone detection and improved personnel training in safety and emergency management are necessary to prevent acetone-related accidents. The multi-VOC acetone detectors used currently have a sensitivity and selectivity limit. In this study, we discovered that Pt-loaded iron oxide (a metal oxide semiconductor) conversely, has high detection and selectivity for very low-levels of acetone gas. The loaded Pt catalyzes the reaction between the sensing materials' surface and the oxygen molecules in the air; this optimizes acetone detection and can decrease acetone-related illnesses, fires and explosions.

• Bulletin of the Korean Chemical Society
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• v.18 no.9
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• pp.1028-1031
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• 1997

Electrostatic interaction is a very important parameter for the membrane selectivity. In this work, the electrical double layer establishment on the surface of metal oxide material from the Stern-Grahame model has been described. Then, some examples of rejection using micro and mesoporous ceramic membranes have been given. A correlation between the charges of the membrane material and the species to be filtered has been precised. Two rejection mechanisms have to be taken into account the size of the solutes and the electrostatic interactions.

• Journal of the Korean Applied Science and Technology
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• v.30 no.4
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• pp.649-655
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• 2013

Methanol was directly produced by the partial oxidation of methane with perovskite and mixed oxide catalysts. Perovskite ($ABO_3$) catalysts were prepared by the malic acid method with changing A and B site components. Three-component mixed oxide catalysts that have Mo and Bi as a main component were prepared by the co-precipitation method. Among the perovskite catalysts, $SrCrO_3$ showed the highest methanol selectivity of 11% at $400^{\circ}C$. For the three-component mixed oxide catalysts, there were no remarkable changes in methane conversion. Among the mixed oxide catalysts, Mo-Bi-Cr mixed oxide catalyst showed the highest methanol selectivity of 15.3% at $400^{\circ}C$. The catalytic activity and methanol selectivity of the three-component mixed oxide catalysts were directly proportional to the surface area of the catalysts.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.48 no.5
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• pp.309-314
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• 1999

The magnetized helical resonator plasma etcher has been built. Electron density and temperature were measured as functions of rf source power, axial magnetic field, and pressure. The results show electron density increases as the magnetic field increases and reached $2\times1012cm^{-3}$,/TEX>. The oxide etch rate and selectivity to polysilicon were investigated as the above mentioned conditions and self-bias voltage. We can obtain the much improved oxide etch selectivity to polysilicon (60 : 1) by applying the external axial weak magnetic field in magnetized helical resonator plasma etcher.

• Clean Technology
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• v.20 no.1
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• pp.7-12
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• 2014

Hydrogenolysis of glycerol to propylene glycol was performed over binary and ternary metal oxide catalysts. The conversion of glycerol and selectivity to propylene glycol were increased on Cu/Zn and Cu/Cr mixed oxides compared to pure CuO and ZnO oxides. The addition of alumina into Cu/Zn mixed oxide very highly increased the conversion of glycerol and selectivity to propylene glycol. The conversion of glycerol was increased with increasing the reaction temperature but the selectivity to propylene glycol was shown to have maximum value at $200^{\circ}C$ and then decreased at $250^{\circ}C$. The conversion of glycerol and selectivity to propylene glycol were decreased with increasing the glycerol concentration.

• Korean Chemical Engineering Research
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• v.50 no.1
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• pp.41-49
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• 2012

This study was aimed at the development of catalysts for the direct methanol synthesis by partial oxidation of methane. Mo-Bi-V-Al mixed oxide catalysts were prepared and characterized and used in the direct methanol synthesis reaction. The catalysts prepared by the sol-gel method had much larger surface areas than those prepared by the co-precipitation method. The larger the surface area was, the less the methanol selectivity was. The catalysts having larger surface area facilitate the complete oxidation of methane, decreasing the selectivity of methanol. The catalysts prepared by the sol-gel method showed higher methanol selectivity of 13% at $20^{\circ}C$ lower temperature than those prepared by the co-precipitation method. Through XRD analysis, it was revealed that the structures of the catalysts prepared by the two methods were different. In the reaction, methanol selectivity increased and carbon dioxide selectivity decreased with pressure due to the suppression of complete oxidation reaction at a high pressure.

• KIEE International Transactions on Electrophysics and Applications
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• v.3C no.1
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• pp.28-32
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• 2003

In this paper, we have studied the in-situ end point detection (EPD) for direct chemical mechanical polishing (CMP) of shallow trench isolation (STI) structures without the reverse moat etch process. In this case, we applied a high selectivity $1n (HSS) that improves the silicon oxide removal rate and maximizes oxide to nitride selectivity Quite reproducible EPD results were obtained, and the wafer-to-wafer thickness variation was significantly reduced compared with the conventional predetermined polishing time method without EPD. Therefore, it is possible to achieve a global planarization without the complicated reverse moat etch process. As a result, the STI-CMP process can be simplified and improved using the new EPD method.

• Journal of information and communication convergence engineering
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• v.2 no.1
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• pp.22-25
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• 2004

A highly sensitive ammonia gas sensor using thick-film technology has been fabricated and examined. The sensing material of the gas sensor is FeOx-$WO_{3}-SnO_{2}$ oxide semiconductor. The sensor exhibits resistance increase upon exposure to low concentration of ammonia gas. The resistance of the sensor is decreased, on the other hand, for exposure to reducing gases such as ethyl alcohol, methane, propane and carbon monoxide. A novel method for detecting ammonia gas quite selectively utilizing a sensor array consisting of an ammonia gas sensor and a compensation element has been proposed and developed. The compensation element is a Pt-doped $WO_{3}-SnO_{2}$gas sensor which shows opposite direction of resistance change in comparison with the ammonia gas sensor upon exposure to ammonia gas. Excellent selectivity has been achieved using the sensor array having two sensing elements.