Browse > Article

Thick-film ammonia gas sensor with high sensitivity and excellent selectivity  

Lee, Kyuchung (Department of Internet Information, Daecheon College)
Ryu, Kwang-Ryul (Department of IT Engineering, Mokwon University)
Hur, Chang-Wu (Department of IT Engineering, Mokwon University)
Publication Information
Journal of information and communication convergence engineering / v.2, no.1, 2004 , pp. 22-25 More about this Journal
Abstract
A highly sensitive ammonia gas sensor using thick-film technology has been fabricated and examined. The sensing material of the gas sensor is FeOx-$WO_{3}-SnO_{2}$ oxide semiconductor. The sensor exhibits resistance increase upon exposure to low concentration of ammonia gas. The resistance of the sensor is decreased, on the other hand, for exposure to reducing gases such as ethyl alcohol, methane, propane and carbon monoxide. A novel method for detecting ammonia gas quite selectively utilizing a sensor array consisting of an ammonia gas sensor and a compensation element has been proposed and developed. The compensation element is a Pt-doped $WO_{3}-SnO_{2}$gas sensor which shows opposite direction of resistance change in comparison with the ammonia gas sensor upon exposure to ammonia gas. Excellent selectivity has been achieved using the sensor array having two sensing elements.
Keywords
Ammonia gas sensor; Oxide semiconductor; Sensor array; Selectivity;
Citations & Related Records
연도 인용수 순위
  • Reference
1 T. Maekawa, J. Tamaki, N. Miura, and N. Yamazoe, New Aspects of Spillover Effect in Catalysis, ed. by T. Inui et al, Elsevier Science Publishers, Amsterdam, 1993, pp. 421-424
2 H. Nanto, T. Minami, and S. Takata, Zinc-oxide Thin Film ammonia Gas sensor with High Sensitivity and Excellent Selectivity, J. App. Phys., 60, 1986, pp. 482-484   DOI   ScienceOn
3 Y. Takao, K. Miyazaki, Y. Shimizu, and M. Egashira, Semiconductor Ammonia Gas Sensors with Double-Layered Structure, Tech. Digest, 8th Int. Conf. Solid-State Sens. Actuators (Transducer '93), Yokohama, Japan, June 7-10, 1993, pp. 360-363
4 S.-R. Kim, H.-K. Hong, C. H. Kwon, D. H. Yun, K. Lee, and Y. K. Sung, Ozone sensing properties of $InO_3$-based metal oxide semiconductor thick films, Sens. Actuators B, 66, 2000, pp. 59-62   DOI   ScienceOn
5 J. L. Gland and V. N. Korchak, Ammonia Oxidation on a Stepped Platinum Single-Crystal Surface, J. Catalysis, 53, 1978, pp. 9-23   DOI   ScienceOn
6 T. Maekawa, J. Tamaki, N. Miura, and N. Yamazoe, Gold-Loaded Tungsten Oxide Sensor for Detection of Ammonia in Air, Chem. Lett., 1992, pp. 639-642
7 C. H. Kwon, D. H. Yun, H.-K. Hong, S.-R. Kim, K. Lee, H. Y. Lim and K. H. Yoon, Multi-layered thick film gas sensor array for selective sensing by catalytic filtering technology, Sens. Actuators B, 65, 2000, pp. 327-330   DOI   ScienceOn
8 T. Pignet and L. D. Schmidt, Kinetics of$NH_3$ Oxidation on Pt, Rh and Pd, J. Catalysis, 40, 1975, pp. 212-225   DOI   ScienceOn