• Title/Summary/Keyword: O-compatible

검색결과 173건 처리시간 0.031초

$ZrO_2$ 절연막을 이용한 Ta-Mo 합금 MOS 게이트 전극의 특성 (MOS characteristics of Ta-Mo gate electrode with $ZrO_2$)

  • 안재홍;김보라;이정민;홍신남
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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    • pp.157-159
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    • 2005
  • MOS capacitors were fabricated to study electrical and chemical properties of Ta-Mo metal alloy with $ZrO_2$. The work function of Ta-Mo alloy were varied from 4.1eV to 5.1eV by controlling the composition. When the atomic composition of Mo is 10%, good thermal stability up to $800^{\circ}C$ was observed and work function of MOS capacitor was 4.1eV, compatible for NMOS application. But pure Ta exhibited very poor thermal stability. After $600^{\circ}C$ annealing, equivalent oxide thickness of tantalum gate MOS capacitor was continuously decreased. Barrier heights of Ta-Mo alloy and pure metal that supported the work function values were calculated from Fowler-Nordheim analysis. As a result of these electrical?experiments, Ta-Mo metal alloy with $ZrO_2$ is excellent gate electrode for NMOS.

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Enhanced Low-field Magnetoresistance of La0.7Sr0.3Mn1+dO3-Mn3O4 Composite Films Prepared by ex-situ Solid Phase Crystallization

  • Kang, Young-Min;Kim, Hyo-Jin;Yoo, Sang-Im
    • Journal of Magnetics
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    • 제17권4호
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    • pp.265-270
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    • 2012
  • We report improved low-field magnetoresistance (LFMR) effects of the $La_{0.7}Sr_{0.3}Mn_{1+d}O_3-Mn_3O_4$ composite films with the nominal composition of $La_{0.7}Sr_{0.3}MnO_3$(LSMO)-50 mol% $Mn_3O_4$. The composite films were fabricated by ex-situ solid phase crystallization (SPC) of amorphous films at the annealing temperature region of $900-1100^{\circ}C$ for 2 h in a pure oxygen atmosphere. The amorphous films were deposited on polycrystalline $BaZrO_3$ (poly-BZO) substrates by dc-magnetron sputtering at room temperature. The Curie temperatures ($T_C$) of all composite films were insignificantly altered in the range of 368-372 K. The highest LFMR value of 1.29 % in 0.5 kOe with the maximum dMR/dH value of $37.4%kOe^{-1}$ at 300 K was obtained from 900 nm-thick composite film annealed at $1100^{\circ}C$. The improved LFMR properties of the composite films are attributed to effective spin-dependent scattering at the $La_{0.7}Sr_{0.3}Mn_{1+d}O_3$ grain boundaries sharpened by adjacent chemically compatible $Mn_3O_4$ grains.

식품 접촉 모사 환경에서 식품유사용매의 LDPE-나노 TiO2 복합필름 재질특성 영향 평가 (Effect of Food Simulants on the Properties of LDPE-Nano TiO2 Composite Film in Food Contact Environment)

  • 이우석;최재천;박세종;김미경;고성혁
    • 한국포장학회지
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    • 제23권3호
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    • pp.125-132
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    • 2017
  • The effect of food simulants on properties and light barrier function of LDPE-nano $TiO_2$ composite film has been investigated. LDPE-nano $TiO_2$ composite films were prepared with 5.0wt% $TiO_2$ content by melt-extrusion. To simulate food contact environment, according to KFDA standards and specifications for food utensils, containers and packages, food simulants were selected with deionized water, 50% ethanol, 4% acetic acid and n-heptane and composite films were immersed in each food simulant at $70^{\circ}C$, 30 min except n-heptane ($25^{\circ}C$, 60 min). A variety of material properties, including crystallinity, chemical bonds, surface morphology, mechanical, oxygen barrier and optical properties, of LDPE-nano $TiO_2$ composite film were examined with and without the food simulants treatment. As a result, under regulated migration condition, LDPE-nano $TiO_2$ composite showed extremely stable in all properties tested in the study in contact with food simulants indicating that $TiO_2$ nanoparticles are physicochemically stable and quite compatible with LDPE. Results enable us to anticipate migration of $TiO_2$ will probably not occur. To evaluate influence of migration of $TiO_2$ on food stuffs, their color, pH and acidity were observed as well.

실리콘 기판위에서의 Cr-Doped SrZrO3 박막의 저항변화 특성 (Resistive Switching Properties of Cr-Doped SrZrO3 Thin Film on Si Substrate)

  • 양민규;고태국;박재완;이전국
    • 한국재료학회지
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    • 제20권5호
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    • pp.241-245
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    • 2010
  • One of the weak points of the Cr-doped SZO is that until now, it has only been fabricated on perovskite substrates, whereas NiO-ReRAM devices have already been deposited on Si substrates. The fabrication of RAM devices on Si substrates is important for commercialization because conventional electronics are based mainly on silicon materials. Cr-doped ReRAM will find a wide range of applications in embedded systems or conventional memory device manufacturing processes if it can be fabricated on Si substrates. For application of the commercial memory device, Cr-doped $SrZrO_3$ perovskite thin films were deposited on a $SrRuO_3$ bottom electrode/Si(100)substrate using pulsed laser deposition. XRD peaks corresponding to the (112), (004) and (132) planes of both the SZO and SRO were observed with the highest intensity along the (112) direction. The positions of the SZO grains matched those of the SRO grains. A well-controlled interface between the $SrZrO_3$:Cr perovskite and the $SrRuO_3$ bottom electrode were fabricated, so that good resistive switching behavior was observed with an on/off ratio higher than $10^2$. A pulse test showed the switching behavior of the Pt/$SrZrO_3:Cr/SrRuO^3$ device under a pulse of 10 kHz for $10^4$ cycles. The resistive switching memory devices made of the Cr-doped $SrZrO_3$ thin films deposited on Si substrates are expected to be more compatible with conventional Si-based electronics.

감즙과 양파껍질 추출액을 이용한 혼합염색의 특징 (The Characteristics of Mixed Dyeing Using Persimmons Juice and Onion Outer Skin Extract)

  • 한영숙;유혜자;이혜자
    • 한국의류학회지
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    • 제30권1호
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    • pp.115-124
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    • 2006
  • Natural dyes are environmentally and human compatible. But they are not various or not fast in color. The mixed dyeing have been attempted to solve these disadventages of natural dyes. The persimmon juice dyed fabrics have brown-color and good hygienic properities however low color fastness. The onion dyeing show similar brown-color and have good color fastness caused by querectin existed in onion outer skins. Mixed dyeing was carryied out on silk fabrics using persimmion juice and onion outer skin extract in this study. The mixing method were persimmon juice dyeing and then onion dyeing(P-O), onion dyeing and then persimmon juice dyeing(O-P) and dyeing in the mixture of persimmon juice and onion outer skin extract simultaneously(P+O). The mordants were none-mordent, gallic acid after-treatment and alum after-treatment. Several persimmon juice dyed fabrics were irradiated for 2 hours before onion dyeing(PU-O). The color values of dyed silk fabrics were as follows. The persimmon juice dyed silk fabric developed to yellow-red color after 2 hours of uv irradiation. Onion dyed fabrics show similar yellow-red color after dyeing without uv irradiation. The effect of alum after-treatment on color difference were highest in onion dyeing. The dyeabilities of both P-O and O-P were higher than persimmom juice dyeing and onion dyeing. The dyeabilities of P+O was lower than persimmom juice dyeing and onion dyeing. The value of color difference of alum-treated fabric was the highest. The color difference of P-O and O-P caused from 2 to 4 hours of uv-irradiation were lower than those of persimmon juice dyed fabrics. Onion skin extract could prevent the color-change of persimmon juice dyed fabrics in mixed dyeing. The color difference of PU-O was higher than the P-O.

옥천변성대 북동부(충주-황강리 지역)내 앰피볼라이트의 암석 화학적 고찰

  • 유영복;김형식
    • 한국광물학회:학술대회논문집
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    • 한국광물학회.한국암석학회 2001년도 공동학술발표회 논문집
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    • pp.132-132
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    • 2001
  • 옥천변성대의 충주-황강리 지역내 앰피볼라이트의 기원암은 염기성 화성암으로 쏠레이아이트 계열의 변이질암에 속한다. Fe $O^{*}$/MgO값의 변화에 대하여 분별작용에 의해 영향을 받는 주성분 원소와 미량원소들의 변화를 보게되면 Ti $O_2$, Fe $O^{*}$와 불호정성 원소(incompatible element)인 Zr, Nb, Hf, Ta, Th 등은 분별작용동안 증가하는 반면 호정성 원소(compatible element)인 MgO, $Al_2$ $O_3$, Ni, Cr 등은 감소하는 경향을 보여주고 있다. Fe $O^{*}$/MgO, Ti $O_2$ 그리고 Fe $O^{*}$는 심해성 쏠레이아이트 영역으로부터 분화된 경향을 나타내 주고 있다. Ni, Cr은 Fe $O^{*}$/MgO값의 증가에 따라 급속히 감소하며 안정한 대륙과 해저화산의 영역에 도시되고 있으며 칼크-알칼리(CA)와는 관계가 없고 쏠레이아이트의 영역에서 변화 패턴을 보여주어 앰피볼라이트가 활동적인 대륙연변부의 지구조 환경보다는 안정한 대륙이나 해저화산과 관계가 더 있음을 시사한다. 경휘토류 원소(LREE)는 중휘토류 원소(HREE)에 비해 더욱 부화된 특성을 띠고 원자번호가 증가하면서 표준화된 휘토류 원소패턴의 경사가 점차 감소하는 경향을 보여주고 있다. 대부분의 시료들은 큰 Eu이상치를 갖고 있지 않아 마그마 정출 과정동안 사장석의 분별작용이 거의 수반되지 않았음을 지시하고 전체적인 휘토류 원소의 패턴은 거의 평행하게 나타나므로 기원 마그마가 유사함을 의미하고 있다. 비유동성 원소를 이용한 여러 판별도표들을 통해서 본암은 대륙성 현무암질암으로서 판내부 환경에서 유래되었으며 대륙내부 열곡의 알칼리 현무암과 대륙성 현무암 영역에 속하는 것으로 보아서 대륙지각내 열곡작용과 같은 장력운동에 수반되어 생성된 것임을 시사해 주고 있다. 앰피볼라이트의 지각혼성화를 평가하기 위해 이에 필요한 몇 개의 지화학적 매개변수를 계산한 결과 La/Ta, La/Nb, Nb/Th들의 값이 오염 안된 마그마의 값을 지시해 주어 본암이 지각혼성화 작용을 받지 않은 것으로 나타났다. 대부분의 시료들은 P-타입 MORB의 영역에 속하며 소수의 시료가 T-타입 MORB의 영역에 도시되고 있어 본 앰피볼라이트의 생성에는 양적으로 다른 두 가지의 유사한 마그마가 수반된 것으로 추정된다. 것으로 추정된다.

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DC 펄스 마그네트론 스퍼터링으로 증착된 TiO2 박막의 특성변화에 관한 연구 (Deposition Characteristics of TiO2 Thin Films Prepared by DC Pulsed Magnetron Sputtering)

  • 안은솔;허성보;김규식;정우창;박용호;박인욱
    • 한국표면공학회지
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    • 제48권2호
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    • pp.43-49
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    • 2015
  • This study reports a fabrication of $TiO_2$ on the surface of dental implants by pulsed d.c. magnetron sputtering from a Ti target. A systematic investigation on the microstructure and mechanical properties of $TiO_2$ films was carried out with the variation of $O_2$ contents and substrate temperatures. The effects of deposition parameters on the fabricated structures were investigated by X-ray diffraction (XRD) technique and field emission scanning electron microscope (FE-SEM). Hydrophilic properties were evaluated by measuring water contact angles on the film surface. With increasing $O_2$ contents up to 40%, surface roughness of $TiO_2$ film increased while relatively smooth surface was obtained with 50% $O_2$ contents. Surface roughness and adhesion strength both increased as substrate temperature increased up to $200^{\circ}C$. From these results, hydrophilic and adhesive properties of the present $TiO_2$ films synthesized with 40% $O_2$ at $200^{\circ}C$ are regarded to be suitable for bio-compatible applications.

Magnetic and Magnetotransport Properties of (1-x) $La_{0.7}Sr_{0.3}MnO_3-xRE_2O_3$ (RE=La, Nd) Composites

  • Kim, Hyo-Jin;Kang, Young-Min;Yoo, Sang-Im
    • 한국자기학회:학술대회 개요집
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    • 한국자기학회 2009년도 정기총회 및 동계학술연구발표회
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    • pp.192-192
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    • 2009
  • Magnetic and magnetotransport properties of (1-x) $La_{0.7}Sr_{0.3}MnO_3-xRE_2O_3$ (RE=La, Nd) (x = 0.025, 0.05, 0.075, 0.1, 0.2, 0.3) composite polycrystalline samples were systematically studied. Samples were prepared using conventional solid-state reaction. LSMO and $RE_2O_3$ react at high temperature and become chemically compatible. The ferromagnetic-paramagnetic transition temperatures ($T_c$) of the LSMO-$Nd_2O_3$ composite samples were decreased 313K~349K with increasing x, while the $T_c$ values of the LSMO-$La_2O_3$ composite samples were almost unaltered in the range of 355K~358K, representing that the ferromagnetism of LSMO might be more seriously degraded by Nd substitution on the ($La_{0.7}Sr_{0.3}$) site. However, LSMO-$RE_2O_3$ composite samples exhibit greatly enhanced low field magnetoresistance (LFMR) and dMR/dH value without an appreciable increase in its resistivity. Remarkably improved LFMR properties are attributed to LSMO grain boundaries acting as effective spin-dependent scattering centers. The relationship among the $RE_2O_3$ addition, microstructure, magnetic and magnetotransport properties will be discussed in this paper.

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ZrO2와 SiO2 절연막에 따른 Ru-Zr 금속 게이트 전극의 특성 비교 (Property Comparison of Ru-Zr Alloy Metal Gate Electrode on ZrO2 and SiO2)

  • 서현상;이정민;손기민;홍신남;이인규;송용승
    • 한국전기전자재료학회논문지
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    • 제19권9호
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    • pp.808-812
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    • 2006
  • In this dissertation, Ru-Zr metal gate electrode deposited on two kinds of dielectric were formed for MOS capacitor. Sample co-sputtering method was used as a alloy deposition method. Various atomic composition was achieved when metal film was deposited by controlling sputtering power. To study the characteristics of metal gate electrode, C-V(capacitance-voltage) and I-V(current-voltage) measurements were performed. Work function and equivalent oxide thickness were extracted from C-V curves by using NCSU(North Carolina State University) quantum model. After the annealing at various temperature, thermal/chemical stability was verified by measuring the variation of effective oxide thickness and work function. This dissertation verified that Ru-Zr gate electrodes deposited on $SiO_{2}\;and\;ZrO_{2}$ have compatible work functions for NMOS at the specified atomic composition and this metal alloys are thermally stable. Ru-Zr metal gate electrode deposited on $SiO_{2}\;and\;ZrO_{2}$ exhibit low sheet resistance and this values were varied with temperature. Metal alloy deposited on two kinds of dielectric proposed in this dissertation will be used in company with high-k dielectric replacing polysilicon and will lead improvement of CMOS properties.

블렌딩 기법을 적용한 과산화수소 추진제의 저장성 및 재료 적합성 평가 (Storability and Material Compatibility Test of Blended Hydrogen Peroxide Propellant)

  • 이정섭;장동욱;권세진
    • 한국추진공학회지
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    • 제16권5호
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    • pp.20-28
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    • 2012
  • 친환경 추진제인 과산화수소의 성능 향상을 위해 블렌딩 기법을 적용하였다. 90 wt.% 과산화수소에 독성이 낮은 에탄올을 블렌딩 하였으며, 저장성 평가 결과 연료에 의한 저장성 저하는 나타나지 않았다. 재료 적합성 및 내열 평가 결과 Inconel X750과 Topheat A가 높은 적합성과 내열 특성을 보였으며, SUS 316L 역시 적합성이 우수하였다. 내열 특성 향상을 위해 $Al_2O_3$, $Y_2O_3$, $ZrO_2$를 코팅 후 내구성 평가를 수행한 결과, $Y_2O_3$ 코팅은 사용이 부적합하였으며, 재료의 사용 가능 온도가 코팅의 접착성과 관련이 있음을 확인하였다. 블렌딩 기법을 통한 성능 향상을 확인하기 위해 추력기 실험을 진행하였으며, 실험 결과 반응기 온도가 $870^{\circ}C$로, 90 wt.% 과산화수소의 단열 분해 온도인 $760^{\circ}C$보다 높음을 확인하였다.