Property Comparison of Ru-Zr Alloy Metal Gate Electrode on ZrO2 and SiO2
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Seo, Hyun-Sang
(한국항공대학교 항공전자공학과)
Lee, Jeong-Min (한국항공대학교 항공전자공학과) Son, Ki-Min (한국항공대학교 항공전자공학과) Hong, Shin-Nam (한국항공대학교 항공전자공학과) Lee, In-Gyu (한국항공대학교 항공전자공학과) Song, Yo-Seung (한국항공대학교 항공전자공학과) |
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