Deposition Characteristics of TiO2 Thin Films Prepared by DC Pulsed Magnetron Sputtering |
An, Eunsol
(Korea Institute of Industrial Technology (KITECH))
Heo, Sung-Bo (Korea Institute of Industrial Technology (KITECH)) Kim, Kyu-Sik (Korea Institute of Industrial Technology (KITECH)) Jung, Uoo Chang (Korea Institute of Industrial Technology (KITECH)) Park, Yong Ho (School of Materials Science and Engineering, Pusan National University) Park, In-Wook (Korea Institute of Industrial Technology (KITECH)) |
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