• 설비공학논문집
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• 제18권10호
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• pp.819-825
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• 2006

In a SOFC/GT (solid oxide fuel cell/gas turbine) hybrid power generation system, the recuperator is an indispensible component to enhance system performance. Since the expansion ratio to the recuperator core is very large, generally, the effective header design to distribute the flow uniformly before entering the core is crucial to guarantee the required performance. In the present study, we focus on the design of a diffuser type recuperator header with a 90 degree turn inlet port. To reduce the flow separation and recirculation flows, multiple horizontal vanes are used. The number of horizontal vanes is varied from 0 to 24. The air flow velocity is measured at 40 points just behind the core outlet by using a hot wire anemometer. Then, the flow non-uniformity is evaluated from the measured flow velocity. The experimental results showed that inlet air velocity did not effect on relative flow non-uniformity. According to increasing the number of horizontal vanes, flow non-uniformity reduced about $40{\sim}50%$ than without using horizontal vanes.

• 한국전기전자재료학회논문지
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• 제21권2호
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• pp.93-98
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• 2008

We investigated the effect of process temperature on removal rate and non-uniformity based on single head kinematics in oxide CMP. Generally, it has been known that the temperature profile directly transfers to the non~uniformity of removal rate on the wafer, which has similar tendency with the sliding distance of wafer. Experimental results show that platen velocity is a dominant factor in removal rate as well as average temperature. However, the non-uniformity does not coincide between process temperature and removal rate, due to slurry accumulation and low deviation of temperature. Resultantly, the removal rate is strongly dependent on the rotational speed of platen, and its non -uniformity is controlled by the rotational speed of polishing head. It means lower WIWNU (With-in-wafer-non-uniformity) can be achieved in the region of higher head speed.

• 한국가시화정보학회:학술대회논문집
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• 한국가시화정보학회 2004년도 추계학술대회 논문집
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• pp.48-51
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• 2004

Chemical Mechanical Polishing(CMP) is popularly used in production of semiconductor because of large area polishing ability probability of improvement for more integrated circuit. However, present CMP processing causes some non-uniformity errors which can be critical for highly integrated circuit. Previous studies predict that flow-field of slurry during CMP can create non-uniformity, but no quantitative measurement has conducted. In this study, using PIV, slurry velocity flow-field during CMP is measured by changing the ratio of RPM of pad and carrier with tuned PIV system adequate for small room in CMP machine and Cabot's non-groove pad Epad-A100. The result show that velocity of slurry is majorly determined by pad-rpm and the ratio of between carrier and pad rpm make some changes in streamlines.

• 한국정밀공학회지
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• 제23권5호
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• pp.59-67
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• 2006

Chemical Mechanical Polishing(CMP) in semiconductor production is characterized its output property by Removal Rate(RR) and Non-Uniformity(NU). Some previous works show that RR is determined by production of pressure and velocity and NU is also largely affected by velocity of flowfield during CMP. This study is about the direct measurement of velocity of slurry during CMP and whole flowfield upon the non-groove pad by Particle Image Velocimetry(PIV). Typical PIV system is modified adequately for inspecting CMP and slurry flowfield is measured by changing both pad rpm and carrier rpm. We performed measurement with giving some variation in the kinds of pad. The results show that the flowfield is majorly determined not by Carrier but by Pad in the case of non-groove pad.

• Journal of Magnetics
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• 제22권2호
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• pp.315-325
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• 2017

Magnetically suspended sensitive gyroscopes (MSSGs) provide an interesting alternative for achieving precious attitude angular measurement. To effectively reduce the measurement error caused by the non-uniformity of the air-gap flux density in a MSSG, this paper proposes a novel compensation method based on measuring and modeling of the air-gap flux density. The angular velocity measurement principle and the structure of the MSSG are described, and then the characteristic of the air-gap flux density has been analyzed in detail. Next, to compensate the flux density distribution error and improve the measurement accuracy of the MSSG, a real-time compensation method based on the online measurement with hall probes is designed. The common issues caused by the non-uniformity of the air-gap flux density can be effectively resolved by the proposed method in high-precision magnetically suspended configurations. Comparative simulation results before and after compensation have verified the effectiveness and superiority of the proposed compensation method.

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 1998년도 추계 학술대회논문집
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• pp.121-126
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• 1998

A numerical optimization procedure is developed to find the inlet velocity profile that yields the most uniform epitaxial layer in a vertical MOCVD reactor. It involves the solution of fully elliptic equations of motion, temperature, and concentration; the finite volume method based on SIMPLE algorithm has been adopted to solve the Navier-Stokes equations. The overall optimization process is highly nonlinear and has been efficiently treated by the sequential linear programming technique that breaks the non-linear problem into a series of linear ones. The optimal profile approximated by a 6th-degree Chebyshev polynomial is very successful in reducing the spatial non-uniformity of the growth rate. The optimization is particularly effective to the high Reynolds number flow. It is also found that a properly constructed inlet velocity profile can suppress the buoyancy driven secondary flow and improve the growth-rate uniformity.

• 반도체디스플레이기술학회지
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• 제22권4호
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• pp.19-25
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• 2023

With an attempt to investigate the correlation between the internal pressure distribution of slit nozzle and the thickness uniformity of slot-coated thin films, we have performed computational fluid dynamics (CFD) simulations of slit nozzles and slot coating of high-viscosity (4,800 cPs) polydimethylsiloxane (PDMS) using a gantry slot-die coater. We have calculated the coefficient of variation (CV) to quantify the pressure and velocity distributions inside the slit nozzle and the thickness non-uniformity of slot-coated PDMS films. The pressure distribution inside the cavity and the velocity distribution at the outlet are analyzed by varying the shim thickness and flow rate. We have shown that the cavity pressure uniformity and film thickness uniformity are enhanced by reducing the shim thickness. It is addressed that the CV value of the cavity pressure that can ensure the thickness non-uniformity of less than 5% is equal to and less than 1%, which is achievable with the shim thickness of 150 ㎛. It is also found that as the flow rate increases, the average cavity pressure is increased with the CV value of the pressure unchanged and the maximum coating speed is increased. As the shim thickness is reduced, however, the maximum coating speed and flow rate decrease. The highly uniform PDMS films shows the tensile strain as high as 180%, which can be used as a stretchable substrate.

• 한국초전도저온공학회:학술대회논문집
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• 한국초전도저온공학회 1999년도 제1회 학술대회논문집(KIASC 1st conference 99)
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• pp.109-112
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• 1999

The normal zone propagation (NZP) velocity and V-I characteristics of two Bi-2223 pancake coils with different Ag/SC ratio were investigated by experiment. Non-uniformity of Ic and broad restive transition was oberserbed in two coils. The NZP velocity of azimuth direction is faster than radius direction, and the NZP velocity of coil with higher Ag/SC ratio is faster than another coil with lower Ag/SC ratio.

• 한국자동차공학회논문집
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• 제4권4호
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• pp.72-79
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• 1996

The recent trend of higher output engines with more auxiliary parts is resulting in greater heat generation in the engine compartment. In order to maximize the heat dissipation and eliminate the inefficient flow in the engine compartment, it is necessary to understand the flow field under the hood. In this respect, experimental study as well as numerical analysis should be conducted. The automated measuring system was constructed to obtain three dimensional mean flow data with high accuracy. The measurements have been made on a vehicle with a steady incoming air flow. The result shows that there exists a high degree of non-uniformity in the mean flow velocity at the front of radiator.

• 설비공학논문집
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• 제13권3호
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• pp.209-216
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• 2001

A numerical study is peformed to investigate the effect of circumferential velocity generated by the guide vane on the nozzle flow of a jet fan, s a way of increasing the penetration force of jet fan with nozzle of 175mm diameter. For the validation of numerical results. the velocity is measured by a 5-hole pitot tube and flow visualization is conducted by the tuft method. Under the inlet condition that the maximum circumferential velocity in the stator outlet of the present jet fan is 1.8m/s, the axial velocity in the nozzle outlet has the feature that the velocity at the axis is low and the velocity near the wall high. Therefore, to increase the throw length of the jet fan, the configuration of the fairing and nozzle needs to be developed and the precise revise of the stator angle is required, In addition, the bigger the circumferential velocity, the smaller the axial velocity at the axis and the bigger non-uniformity of the flow distribution.