• Journal of the Korean institute of surface engineering
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• v.56 no.4
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• pp.219-226
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• 2023

Utilizing low-dimensional structures of oxide semiconductors is a promising approach to fabricate relevant gas sensors by means of potential enhancement in surface-to-volume ratios of their sensing materials. In this work, vertically aligned cupric oxide (CuO) nanorods are successfully synthesized on a transparent glass substrate via seed-mediated hydrothermal synthesis method with the use of a CuO nanoparticle seed layer, which is formed by thermally oxidizing a sputtered Cu metal film. Structural and optical characterization by x-ray diffraction (XRD), scanning electron microscopy (SEM), and Raman spectroscopy reveals the successful preparation of the CuO nanorods array of the single monoclinic tenorite crystalline phase. From gas sensing measurements for the nitrogen monoxide (NO) gas, the vertically aligned CuO nanorod array is observed to have a highly responsive sensitivity to NO gas at relatively low concentrations and operating temperatures, especially showing a high maximum sensitivity to NO at 200 ℃ and a low NO detection limit of 2 ppm in dry air. These results along with a facile fabrication process demonstrate that the CuO nanorods synthesized on a transparent glass substrate are very promising for low-cost and high-performance NO gas sensors.

• Applied Chemistry for Engineering
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• v.33 no.6
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• pp.600-605
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• 2022

In this study, nitrogen oxide (NO_x) removal experiments were performed using a graphene based ceramic filter coated with a V₂O₅-WO₃-TiO₂ catalyst. Graphene oxide (GO) was prepared by Hummer's method using graphite, and the reduced graphene oxide was produced by reducing with hydrazine (N₂H₄). Vanadium (V), Tungsten (W), and Titanium (Ti) were coated by the sol-gel method, and then a metal oxide-supported filter was prepared through a calcination process at 350 ℃. A NO_x removal efficiency test was performed for the catalytic ceramic filters with UV light in a humid condition. When graphene oxide (GO) and reduced graphene oxide (rGO) were present on the filter, the NOx removal efficiency was superior to that of the conventional ceramic filter. Most likely, this is due to an improvement in the adsorption properties of NOx molecules on graphene coated surfaces. As the concentration of graphene increased, higher NO_x removal efficiency was confirmed.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.7
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• pp.576-582
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• 2002

Nonvolatile semiconductor memory devices with reoxidized nitrided oxide(RONO) gate dielectrics were fabricated, and nitrogen distribution and bonding species which contribute to memory characteristics were analyzed. Also, memory characteristics of devices depending on the anneal temperatures were investigated. The devices were fabricated by retrograde twin well CMOS processes with $0.35\mu m$ design rule. The processes could be simple by in-situ process in growing dielectric. The nitrogen distribution and bonding states of gate dielectrics were investigated by Dynamic Secondary Ion Mass Spectrometry(D-SIMS), Time-of-Flight Secondary Ion Mass Spectrometry(ToF-SIMS), and X-ray Photoelectron Spectroscopy(XPS). As the nitridation temperature increased, nitrogen concentration increased linearly, and more time was required to form the same reoxidized layer thickness. ToF-SIMS results showed that SiON species were detected at the initial oxide interface which had formed after NO annealing and $Si_2NO$ species within the reoxidized layer formed after reoxidation. As the anneal temperatures increased, the device showed worse retention and degradation properties. It could be said that nitrogen concentration near initial interface is limited to a certain quantity, so the excess nitrogen is redistributed within reoxidized layer and contribute to electron trap generation.

• Journal of The Korean Society of Agricultural Engineers
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• v.62 no.5
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• pp.39-46
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• 2020

This study evaluated the nitrogen oxide (NO_x) removal efficiency by air purification concrete blocks with titanium dioxide (TiO₂). The concrete in the mixtures had a 30% water:cement ratio, to which TiO₂ was added at 0%, 5%, and 10% of cement weight. The compressive strength reduction rate and removal efficiency of NO_x were investigated. The result of the compressive strength test in the study indicated that addition rate of TiO₂ did not lead to signifcant effect. In terms of the average removal efficiency of NO_x, mix No. 1 using a TiO₂ mixing ratio of 0% had a removal efficiency of 0.57% on average; thus, the removal effect w as not significant. For the other samples prepared by mixing, the average removal efficiencies for mix No. 2 (5% TiO₂) were 58.86% and 62.05% for normal and washing surface treatments, respectively, and those of sample No. 3 (10% TiO₂) were 59.94% and 67.61%. mixs No. 4 (5%) and No. 5 (10%), in which TiO₂ diluted with distilled water was sprayed onto the block surface, had an average NO_x removal efficiency of 61.72% and 68.48%, respectively. In terms of NOx removal efficiency, Mixs No. 3 and No. 5 with 10% TiO₂ were better than Mixs No. 2 and No. 4 with 5% TiO₂. In addition, analyzing the NO_x removal efficiency results from the fixing method, it was capable to apply mixing (washing) and the diluted spray methods. Therefore, it was found that the diluted spray method applied in this study can be employed in any manufacture of air purification concrete blocks.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11a
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• pp.17-20
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• 2001

Nonvolatile semiconductor memory devices with reoxidized nitrided oxide(RONO) gate dielectric were fabricated, and nitrogen distribution and bonding species which contributing memory characteristics were analyzed. Also, memory characteristics of devices according to anneal temperatures were investigated. The devices were fabricated by 0.35$\mu\textrm{m}$ retrograde twin well CMOS processes. The processes could be simple by in-situ process of nitridation anneal and reoxidation. The nitrogen distribution and bonding state of gate dielectric were investigated by Dynamic Secondary Ion Mass Spectrometry(D-SIMS), Time-of-Flight Secondary ton Mass Spectrometry(ToF-SIMS), and X-ray Photoelectron Spectroscopy(XPS). Nitrogen concentrations are proportional to nitridation anneal temperatures and the more time was required to form the same reoxidized layer thickness. ToF-SIMS results show that SiON species are detected at the initial oxide interface and Si$_2$NO species near the new Si-SiO$_2$ interface that formed after reoxidation. As the anneal temperatures increased, the device showed worse retention and degradation properties. These could be said that nitrogen concentration near initial interface is limited to a certain quantity, so excess nitrogen are redistributed near the Si-SiO$_2$ interface and contributed to electron trap generation.

• Korean Journal of Materials Research
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• v.26 no.2
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• pp.84-89
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• 2016

We present the rectifying and nitrogen monoxide (NO) gas sensing properties of an oxide semiconductor heterostructure composed of n-type zinc oxide (ZnO) and p-type copper oxide thin layers. A CuO thin layer was first formed on an indium-tin-oxide-coated glass substrate by sol-gel spin coating method using copper acetate monohydrate and diethanolamine as precursors; then, to form a p-n oxide heterostructure, a ZnO thin layer was spin-coated on the CuO layer using copper zinc dihydrate and diethanolamine. The crystalline structures and microstructures of the heterojunction materials were examined using X-ray diffraction and scanning electron microscopy. The observed current-voltage characteristics of the p-n oxide heterostructure showed a non-linear diode-like rectifying behavior at various temperatures ranging from room temperature to $200^{\circ}C$. When the spin-coated ZnO/CuO heterojunction was exposed to the acceptor gas NO in dry air, a significant increase in the forward diode current of the p-n junction was observed. It was found that the NO gas response of the ZnO/CuO heterostructure exhibited a maximum value at an operating temperature as low as $100^{\circ}C$ and increased gradually with increasing of the NO gas concentration up to 30 ppm. The experimental results indicate that the spin-coated ZnO/CuO heterojunction structure has significant potential applications for gas sensors and other oxide electronics.

• Clean Technology
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• v.17 no.2
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• pp.142-149
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• 2011

The adsorption and desorption behaviors of NO and $N_2O$ over two mixed oxide catalysts, AlCoPd (1/1/0.05) and AlCoFe (1/1/2), have been investigated for the lean $NO_x$ trap applications. The catalysts showed good adsorption capabilities for NO and $N_2O$ without needing oxidation step. The adsorption decreased a lot when they are co-adsorbed with oxygen. While NO kept high adsorbability and selectivity with respect to oxygen, those of $N_2O$ decreased sharply. From the TPD results, NO and $N_2O$ are considered to decompose into nitrogen and oxygen in the higher temperature range and the oxygen seems to be strongly attached to the catalysts even at high temperature.

• International Journal of Oral Biology
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• v.41 no.3
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• pp.141-147
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• 2016

Reactive oxygen species (ROS) and nitrogen species (RNS) are both important signaling molecules involved in pain transmission in the dorsal horn of the spinal cord. Xanthine oxidase (XO) is a well-known enzyme for the generation of superoxide anions ($O_2^{\bullet-}$), while S-nitroso-N-acetyl-DL-penicillamine (SNAP) is a representative nitric oxide (NO) donor. In this study, we used patch clamp recording in spinal slices of rats to investigate the effects of $O_2^{\bullet-}$ and NO on the excitability of substantia gelatinosa (SG) neurons. We also used confocal scanning laser microscopy to measure XO- and SNAP-induced ROS and RNS production in live slices. We observed that the ROS level increased during the perfusion of xanthine and xanthine oxidase (X/XO) compound and SNAP after the loading of 2',7'-dichlorofluorescin diacetate ($H_2DCF-DA$), which is an indicator of intracellular ROS and RNS. Application of ROS donors such as X/XO, ${\beta}-nicotinamide$ adenine dinucleotide phosphate (NADPH), and 3-morpholinosydnomimine (SIN-1) induced a membrane depolarization and inward currents. SNAP, an RNS donor, also induced membrane depolarization and inward currents. X/XO-induced inward currents were significantly decreased by pretreatment with phenyl N-tert-butylnitrone (PBN; nonspecific ROS and RNS scavenger) and manganese(III) tetrakis(4-benzoic acid) porphyrin (MnTBAP; superoxide dismutase mimetics). Nitro-L-arginine methyl ester (NAME; NO scavenger) also slightly decreased X/XO-induced inward currents, suggesting that X/XO-induced responses can be involved in the generation of peroxynitrite ($ONOO^-$). Our data suggest that elevated ROS, especially $O_2^{\bullet-}$, NO and $ONOO^-$, in the spinal cord can increase the excitability of the SG neurons related to pain transmission.

• Korean Journal of Materials Research
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• v.23 no.6
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• pp.299-303
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• 2013

In this study, a micro gas sensor for $NO_x$ was fabricated using a microelectromechanical system (MEMS) technology and sol-gel process. The membrane and micro heater of the sensor platform were fabricated by a standard MEMS and CMOS technology with minor changes. The sensing electrode and micro heater were designed to have a co-planar structure with a Pt thin film layer. The size of the gas sensor device was about $2mm{\times}2mm$. Indium oxide as a sensing material for the $NO_x$ gas was synthesized by a sol-gel process. The particle size of synthesized $In_2O_3$ was identified as about 50 nm by field emission scanning electron microscopy (FE-SEM). The maximum gas sensitivity of indium oxide, as measured in terms of the relative resistance ($R_s=R_{gas}/R_{air}$), occurred at $300^{\circ}C$ with a value of 8.0 at 1 ppm $NO_2$ gas. The response and recovery times were within 60 seconds and 2 min, respectively. The sensing properties of the $NO_2$ gas showed good linear behavior with an increase of gas concentration. This study confirms that a MEMS-based gas sensor is a potential candidate as an automobile gas sensor with many advantages: small dimension, high sensitivity, short response time and low power consumption.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.37 no.5
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• pp.481-488
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• 2013

Nitric oxide ($NO_x$) formation characteristics in non-premixed diffusion flames of methane fuels have been investigated experimentally and numerically by adding 10% ammonia to the fuel stream, according to the variation of the oxygen ratio in the oxidizer with oxygen/carbon dioxide and oxygen/nitrogen mixtures. In an experiment of coflow jet flames, in the case of an oxidizer with oxygen/carbon dioxide, the $NO_x$ emission increased slightly as the oxygen ratio increased. On the other hand, in case of an oxygen/nitrogen oxidizer, the $NO_x$ emission was the maximum at an oxygen ratio of 0.7, and it exhibited non-monotonic behavior according to the oxygen ratio. Consequently, the $NO_x$ emission in the condition of oxyfuel combustion was overestimated as compared to that in the condition of conventional air combustion. To elucidate the characteristics of $NO_x$ formation for various oxidizer compositions, 1D and 2D numerical simulations have been conducted by adopting one kinetic mechanism. The result of 2D simulation for an oxidizer with oxygen/nitrogen well predicted the trend of experimentally measured $NO_x$ emissions.