Korean Journal of Materials Research (한국재료학회지)

Materials Research Society of Korea (한국재료학회)
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MEMS-Based Micro Sensor Detecting the Nitrogen Oxide Gases

산화질소 검출용 마이크로 가스센서 제조공정

  • Kim, Jung-Sik (Department of Materials Science and Engineering, The University of Seoul) ;
  • Yoon, Jin-Ho (Department of Materials Science and Engineering, The University of Seoul) ;
  • Kim, Bum-Joon (Department of Materials Science and Engineering, The University of Seoul)
  • 김정식 (서울시립대학교 신소재공학과) ;
  • 윤진호 (서울시립대학교 신소재공학과) ;
  • 김범준 (서울시립대학교 신소재공학과)
  • Received : 2013.03.18
  • Accepted : 2013.05.06
  • Published : 2013.06.27
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Abstract

In this study, a micro gas sensor for $NO_x$ was fabricated using a microelectromechanical system (MEMS) technology and sol-gel process. The membrane and micro heater of the sensor platform were fabricated by a standard MEMS and CMOS technology with minor changes. The sensing electrode and micro heater were designed to have a co-planar structure with a Pt thin film layer. The size of the gas sensor device was about $2mm{\times}2mm$. Indium oxide as a sensing material for the $NO_x$ gas was synthesized by a sol-gel process. The particle size of synthesized $In_2O_3$ was identified as about 50 nm by field emission scanning electron microscopy (FE-SEM). The maximum gas sensitivity of indium oxide, as measured in terms of the relative resistance ($R_s=R_{gas}/R_{air}$), occurred at $300^{\circ}C$ with a value of 8.0 at 1 ppm $NO_2$ gas. The response and recovery times were within 60 seconds and 2 min, respectively. The sensing properties of the $NO_2$ gas showed good linear behavior with an increase of gas concentration. This study confirms that a MEMS-based gas sensor is a potential candidate as an automobile gas sensor with many advantages: small dimension, high sensitivity, short response time and low power consumption.

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