• Tribology and Lubricants
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• v.28 no.5
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• pp.203-211
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• 2012

Atomic force microscopy (AFM) has been used as a tool, not only for imaging surfaces, but also for measuring surface forces and mechanical properties at the nano-scale. Force calibration is crucial for quantitatively measuring the forces that act between the AFM probe of a force sensing cantilever and a sample. In this work, the lateral force calibrations of a V-shaped cantilever were performed using the finite element method, multiple pivot loading, and thermal noise methods. As a result, it was shown that the multiple pivot loading method was appropriate for the lateral force calibration of a V-shaped cantilever. Further, through crosschecking of the abovementioned methods, it was concluded that the thermal noise method could be used for determining the lateral spring constants as long as the lateral deflection sensitivity was accurately determined. To obtain the lateral deflection sensitivity from the sticking portion of the friction loop, the contact stiffness should be taken into account.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.12-12
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• 2010

By using scanning tunneling microscopy/spectroscopy (STM/S), we can make images of various physical properties in nanometer-scale spatial resolutions. Here, I demonstrate imaging of two electron-correlated subjects; screening and superconductivity by STM/S. The electrostatic potential around a charge is described with the Coulomb potential. When the charge is located in a metal, the potential is modified because of the free electrons in the host. The potential modification, called screening, is one of the fundamental phenomena in the condensed matter physics. Using low-temperature STM we have developed a method to measure electrostatic potential in high spatial and energy resolutions, and observed the potential around external charges screened by two-dimensional surface electronic states. Characteristic potential decay and the Friedel oscillation were clearly observed around the charges [1]. Superconductivity of nano-size materials, whose dimensions are comparable with the coherence length, is quite different from their bulk. We investigated superconductivity of ultra-thin Pb islands by directly measuring the superconducting gaps using STM. The obtained tunneling spectra exhibit a variation of zero bias conductance (ZBC) with a magnetic field, and spatial mappings of ZBC revealed the vortex formation [2]. Size dependence of the vortex formation will be discussed at the presentation.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.241.1-241.1
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• 2013

최근 고집적화된 금속-산화막 반도체 metal oxide semiconductor (MOS) 소자는 크기가 점점 작아짐에 따라 얇은 산화막과 다양한 High-K 물질과 전극에 대하여 연구되고 있다. 이러한 소자의 열적 안정성과 균일성을 얻기 위해 다양한 열처리 방법이 사용되고 있으며, 일반적인 열처리 방법으로는 conventional thermal annealing (CTA)과 rapid thermal annealing (RTA)이 많이 이용되고 있다. 본 실험에서는 microwave radiation에 의한 열처리로 소자의 특성을 개선시킬 수 있다는 사실을 확인하였고, 상대적으로 $100^{\circ}C$ 이하의 저온에서도 공정이 이루어지기 때문에 열에 의한 소자 특성의 열화를 억제할 수 있으며, 또한 짧은 처리 시간 및 공정의 단순화로 비용을 효과적으로 절감할 수 있다. 본 실험에서는 metal-oxide-silicon (MOS) 구조의 capacitor를 제작한 다음, 기존의 CTA나 RTA 처리가 아닌 microwave radiation을 실시하여 MOS capacitor의 전기적인 특성에 미치는 microwave radiation 효과를 평가하였다. 본 실험은 p-type Si 기판에 wet oxidation으로 300 nm 성장된 SiO2 산화막 위에 titanium/aluminium (Ti/Al) 금속 전극을 E-beam evaporator로 형성하여 capacitance-voltage (C-V) 특성 및 current-voltage (I-V) 특성을 평가하였다. 그 결과, microwave 처리를 통해 flat band voltage와 hysteresis 등이 개선되는 것을 확인하였고, microwave radiation 파워와 처리 시간을 최적화하였다. 또한 일반적인 CTA 열처리 소자와 비교하여 유사한 전기적 특성을 확인하였다. 이와 같은 microwave radiation 처리는 매우 낮은 온도에서 공정이 이루어짐에도 불구하고 시료 내에서의 microwave 에너지의 흡수가 CTA나 RTA 공정에서의 열에너지 흡수보다 훨씬 효율적으로 이루어지며, 결과적으로 산화막과 실리콘 기판의 계면 특성 개선에 매우 효과적이라는 것을 나타낸다. 따라서, microwave radiation 처리는 향후 저온공정을 요구하는 nano-scale MOSFET의 제작 및 저온 공정이 필수적인 display 소자 제작의 해결책으로 기대한다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.100-104
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• 2005

The injection molding is very effective process for various plastic products due to its high productivity. It is also good fur precise products like optical parts. Various thermoplastic materials are also available with this injection molding process. In recent, however, as the overall size of the product increases and micro or nano scale of patterns are applied to the products, we now have some problems such as low fidelity of the replication of the pattern, high molding pressure, or warpage from the in-mold stress. Injection/compression molding is studied to overcome those problems in molding large thin plate with micro pattern array on its surface. An injection compression mold is designed to 3 pieces mold for side gate. We install 4 pressure transducers and 9 thermocouples to measure the melt pressure and surface temperature in the cavity during the process. As a result, the maximum molding pressure for injection compression molding is reduced to 1/3 compared to injection molding and the uniformity of the pressure in the cavity is enhanced by about 15%.

• Journal of the Korean Society for Precision Engineering
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• v.33 no.5
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• pp.409-417
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• 2016

It is well known that Morpho butterflies show distinctive, brilliant and iridescent colors and have micro-nano scale structures, instead of dyes and pigments, on their wings. This structural coloration is regarded as a novel technique to express color with a long lifetime, ease and precise tenability. Here, we studied optical multilayer thin films with thickness of several tens of nm ($TiO_2$ and $SiO_2$) and lens-shape micro-patterns. Fabrication and characterization of the multilayer stacking structure and the micro-pattern structure were performed and the films were analyzed via several optical measuring techniques. Finally, we discussed how the micro-pattern structure could enhance independence with color changes according to the viewing angle.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.29 no.4 s.235
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• pp.512-518
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• 2005

Polymeric fibers with nanometer-scale diameters are produced by electrospinning. When the electrical forces at the surface of a polymer solution or melt overcome the surface tension then electrospinning occurs. Polycarbonate has been electrospun. Electrospun fibers are observed by scanning electron microscopy and transmission electron microscopy. The surface morphology of e-spun fiber has been studied by many variables that are involved in different polymer concentrations, solvent mixing ratios and ambient parameters. The average diameters of the electrospun fibers range from 200 nm to 4,570 nm when the PC concentration is decreasing from 15.5\;wt{\%}\;to\;25\;wt{\%}.$ The higher concentration of the polymer solution makes the fibers thicker due to preventing the fiber stretching. With respect evaporation effects, the solvent mixing ratios cause significant changes of the fiber size distribution. As a matter of fact the fiber diameter steadily increases with increasing amount of DMF until the solvent mixture is at THF:DMF ratio of 60:40.

• Journal of the Korean Society for Nondestructive Testing
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• v.34 no.6
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• pp.457-466
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• 2014

This paper presents an analytic and numerical simulation of the generation and propagation of pico-second ultrasound with nano-scale wavelength, enabling the production of bulk waves in thin films. An analytic model of laser-matter interaction and elasto-dynamic wave propagation is introduced to calculate the elastic strain pulse in microstructures. The model includes the laser-pulse absorption on the material surface, heat transfer from a photon to the elastic energy of a phonon, and acoustic wave propagation to formulate the governing equations of ultra-short ultrasound. The excitation and propagation of acoustic pulses produced by ultra-short laser pulses are numerically simulated for an aluminum substrate using the finite-difference method and compared with the analytical solution. Furthermore, Fourier analysis was performed to investigate the frequency spectrum of the simulated elastic wave pulse. It is concluded that a pico-second bulk wave with a very high frequency of up to hundreds of gigahertz is successfully generated in metals using a 100-fs laser pulse and that it can be propagated in the direction of thickness for thickness less than 100 nm.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.18 no.1
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• pp.110-122
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• 2008

Pneumatic vibration isolator typically consisting of dual-chamber pneumatic springs and a rigid table are widely employed for proper operation of precision instruments such as optical devices or nano-scale equipments owing to their low stiffness- and high damping-characteristics. As environmental vibration regulations for precision instruments become more stringent, it is required to improve further the isolation performance. In order to facilitate their design optimization or active control, a more accurate mathematical model or complex stiffness is needed. Experimental results we obtained rigorously for a dual-chamber pneumatic spring exhibit significantly amplitude dependent behavior, which cannot be described by linear models in earlier researches. In this paper, an improvement for the complex stiffness model is presented by taking two major considerations. One is to consider the amplitude dependent complex stiffness of diaphragm necessarily employed for prevention of air leakage. The other is to employ a nonlinear model for the air flow in capillary tube connecting the two pneumatic chambers. The proposed amplitude-dependent complex stiffness model which reflects dependency on both frequency and excitation amplitude is shown to be very valid by comparison with the experimental measurements. Such an accurate nonlinear model for the dual-chamber pneumatic springs would contribute to more effective design or control of vibration isolation systems.

• Advances in nano research
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• v.5 no.2
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• pp.141-169
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• 2017

In this paper, a nanobeam connected to a rotating molecular hub is considered. The vibration behavior of rotating functionally graded nanobeam based on Eringen's nonlocal theory and Euler-Bernoulli beam model is investigated. Furthermore, axial preload and porosity effect is studied. It is supposed that the material attributes of the functionally graded porous nanobeam, varies continuously in the thickness direction according to the power law model considering the even distribution of porosities. Porosity at the nanoscopic length scale can affect on the rotating functionally graded nanobeams dynamics. The equations of motion and the associated boundary conditions are derived through the Hamilton's principle and generalized differential quadrature method (GDQM) is utilized to solve the equations. In this paper, the influences of some parameters such as functionally graded power (FG-index), porosity parameter, axial preload, nonlocal parameter and angular velocity on natural frequencies of rotating nanobeams with pure ceramic, pure metal and functionally graded materials are examined and some comparisons about the influence of various parameters on the natural frequencies corresponding to the simply-simply, simplyclamped, clamped-clamped boundary conditions are carried out.

• Advances in nano research
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• v.8 no.1
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• pp.25-36
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• 2020

Rotating systems concern with torsional vibration, and it should be considered in vibration analysis. To do this, the time-dependent torsional vibrations in a single-walled carbon nanotube (SWCNT) under the linear and harmonic external torque, are investigated in this paper. Eringen's nonlocal elasticity theory is considered to demonstrate the nonlocality and constitutive relations. Hamilton's principle is established to derive the governing equation of motion and consequently related boundary conditions. An analytical method, called the Galerkin method, is utilized to discretize the driven differential equations. Linear and harmonic torsional loads, along with determined amplitude, are applied to the SWCNT as the external torques. SWCNT is considered under the clamped-clamped end supports. In free vibration, analysis of small scale effect reveals the capability of natural frequencies in different modes, and this results desirably are in coincidence with another study. The forced torsional vibration in the time domain, especially for carbon nanotubes, has not been done before in the previous works. The previous forced studies were devoted to the transverse vibrations. It should be emphasized that the dynamical analysis of torsion is novel, workable, and at the beginning of the path. The variations of nonlocal parameter, CNT's thickness, and the influence of excitation frequency on time-dependent angular displacement and nondimensional angular displacement are investigated in the context.