• Transactions of the Korean Society of Mechanical Engineers B
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• v.36 no.2
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• pp.117-123
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• 2012

This paper discusses two different techniques used to measure the mechanical properties of thin films: the bulge test and the nanoindentation test. In the bulge test, a uniform pressure is applied to one side of the film. Measurement of the membrane deflection as a function of the applied pressure allows one to determine the mechanical properties such as Young's modulus, and the residual stress. A nanoindentation test is performed by pushing an indenter tip into the specimen and then withdrawing it, and then recording the indentation force as a function of the indenter position. A modified King's model is used to estimate the mechanical properties of the thin film in order to avoid the effects of the substrate layers. A combination of both the bulge test and the nanoindentation test can determine both Young's modulus and Poisson's ratio simultaneously.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.9
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• pp.47-54
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• 2003

In this study, to achieve the optimal conditions for mechanical hyper-fine pattern fabrication process, deformation behavior of the materials during indentation was studied with numerical method by ABAQUS S/W. Polymer (PMMA) and brittle materials (Si, Pyrex glass) were used as specimens, and forming conditions to reduce the elastic re cover and pile-up were proposed. The indenter was modeled a rigid surface. Minimum mesh sizes of specimens are 1 -l0nm. Comparison between the experimental data and numerical result demonstrated that the finite element approach is capable of reproducing the loading-unloading behavior of a nanoindentation test. The result of the investigation will be applied to the fabrication of the hyper-fine pattern.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2008.05a
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• pp.273-276
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• 2008

Thermoplastic resin takes place stress relaxation and creep according to temperature and time. In room temperature, time dependent deformation (TDD) of polymer was carried out at previous study. In this study, it evaluates time dependent deformation to relate temperature. Nanoscale indents can be used as cells for molecular electronics and drug delivery, slots for integration into nanodevices, and defects for tailoring the structure and properties. Therefore, it is important to control pattern depth for change of indent depth by creep when using Nanoindenter. For evaluating TDD at high temperature, it is occurred thermal-nanoindentation test by changing hold time at maximum load. Temperature is putted at $90^{\circ}C$, hold time at maximum loads are putted at 1, 10, 50, 100, 200, 300 and 500s.

• Journal of the Korean Society for Nondestructive Testing
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• v.32 no.1
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• pp.41-46
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• 2012

As the development of MEMS/NEMS structure and application technology the demand for an assessment of the mechanical properties have increased. The mechanical properties are mainly evaluated by using tensile test or ultrasonic wave measurement. However, the new technology have been developed such as nano-indentation, guided wave method because they have a limitation in case of a thin plate and thin film. In the study, the guided wave velocities are measured by electromagnetic-acoustic transducer(EMAT), the material properties of thin metallic foils are obtained using optimization process of the theoretical and experimental group velocity of guided wave. The Young's modulus obtained by the optimization process(201.6 GPa), nano-indentation(207.0 GPa) and literature value(203.7 GPa) of a $50{\mu}m$ thick nickel thin plate shows good agreement within 3%.

• Journal of the Korean institute of surface engineering
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• v.51 no.3
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• pp.164-171
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• 2018

In this study, we have fabricated pure titanium (Ti)/hydroxyapatite (HA) double layer coating on medical grade PEEK from magnetron sputtering system, an investigation was performed whether the surface can be had more improve bio-active for orthopedi/dental applications than that of non-coated one. Pure Ti and HA coating layer were obtained by a radio-frequency and direct current power magnetron sputtering system. The microstructures surface, mechanical properties and wettability of the pure Ti/HA double layer deposited on the PEEK were analyzed by scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDS), X-ray diffraction (XRD), nano-indentation, and contact angle test. According to the EDS and XRD results, the composition and crystal structure of pure Ti and HA coated surface were verified. The elastic modulus and hardness value were increased by pure Ti and HA coating, and the pure Ti/HA double layer coating surface has the highest value. The contact angle showed higher value for pure Ti/HA double layered coating specimens than that of non-coated (PEEK) surface.

• Proceedings of the Polymer Society of Korea Conference
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• 2006.10a
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• pp.142-143
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• 2006

Combinatorial methods are being used increasingly to develop the next generation of polymers, coatings and adhesive formulations. Allied to this approach, a new genre of measurement and characterization methods are emerging. These characterization techniques are required to handle and take measurements from small samples. This has led to a number of uses for this technology which usefully fall between convention test specimen and micro- or nano-scale test methods. A versatile measurement platform will be presented which can offer useful indentation, puncture, compression, adhesion and scratch resistance data for a wide variety of material types and that continues to develop and evolve in capability.

• Journal of the Korean Society for Precision Engineering
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• v.30 no.5
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• pp.552-558
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• 2013

In recent years the interest on flexible display has been increasing as a future display due to its bendable characteristics. An ITO(indium tin oxide) layer, which is part of a flexible display, can be broken easily while bending because it is made of brittle materials. This brittle property can cause the malfunction of flexible display. To analyze fracture characteristics of ITO layer, bending test was conducted commonly. However, it is not possible to know specific phenomena on bended ITO layer by simple bending test only. Accordingly, in this study, the FE(finite element) model is developed similarly to a real flexible display to analyze stress distribution of flexible display under bending condition, especially on ITO layer. To validate FE model, actual bending test was conducted and the test results were compared with the simulation results by measuring reaction forces during bending. By using the developed model, FE analysis about the effect of design parameter (Thickness & Young's Modulus of BL) on ITO Layer was performed. By explained FE analysis above, this research draws a conclusion of reliable design guide of flexible display, especially on ITO layer.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1115-1119
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• 2005

The paper proposes the elastic modulus evaluation technique of a cantilever beam by vibration analysis based on time-average electronic speckle pattern interferometry (TA-ESPI) with non-contact and nondestructive and Euler-Bernoulli equation. General approaches for the measurement of elastic modulus of thin film are Nano indentation test, Bulge test and Micro-tensile test and so on. They each have strength and weakness in the preparation of test specimen and the analysis of experimental result. ESPI has been developed as a common measurement method for vibration mode visualization and surface displacement. Whole-field vibration mode shape (surface displacement distribution) at a resonance frequency can be visualized by ESPI. And the maximum surface displacement distribution from ESPI is a clue to find the resonance frequency at each vibration mode shape. And the elastic modules of test material can be easily estimated from the measured resonance frequency and Euler-Bernoulli equation. The TA-ESPI vibration analysis technique is able to give the elastic modulus of materials through the simple processing of preparation and analysis.

• Journal of Welding and Joining
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• v.33 no.2
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• pp.40-46
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• 2015

This study was performed to investigate the effect of ultrasonic nano crystal surface modification (UNSM) on residual stress mitigation after Weld Inlay repair for butt dissimilar metal weld with Alloy 82/182 in reactor vessel In/Outlet nozzle. As-welded and Weld Inlay specimens were made in accordance with design standard of ASME Code Case N-766, and two planes of their weld specimens were peened by the optimum UNSM process condition. Peening characteristics for weld specimens after UNSM treatment were evaluated by surface roughness and Vickers hardness test. And, residual stress for weld specimens developed from before and after UNSM treatment was measured and evaluated by instrumented indentation technique. Consequently, it was revealed that the mitigation of residual stress in weld metal after Weld Inlay repair of reactor vessel In/Outlet nozzle could be possible through UNSM treatment.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.240-245
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• 2004

Tensile properties of hard coating material, TiN, were evaluated using micro-tensile testing system. TiN has been known as a hard coating material commonly used today. Micro-tensile testing system consisted of a micro tensile loading system and a micro-ESPI(Electronic Speckle Pattern Interferometry) system. Micro-tensile loading system had a maximum load capacity of 500mN and a resolution of 4.5 nm in stroke. TiN thin film $1{\mu}m$ thick was deposited on the Si wafer pre-deposited of $Si_3N_4$ film substrate by the closed field unbalanced magnetron sputtering (CFUBMS) process. Three kinds of micro-tensile specimen with the respective width of $50{\mu}m$, $100{\mu}m$ and $500{\mu}m$ were fabricated by MEMS process. The mechanical properties including tensile strength and elastic modulus were determined using the micro-tensile testing system and compared by those obtained by nano-indentation