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http://dx.doi.org/10.3795/KSME-B.2012.36.2.117

Measurement of Mechanical Properties of Thin Films Using a Combination of the Bulge Test and Nanoindentation  

Jung, Bong-Bu (Dept. of Mechanical Engineering, POSTECH)
Lee, Hun-Kee (Dept. of Materials Science and Engineering, MIT)
Park, Hyun-Chul (Dept. of Mechanical Engineering, POSTECH)
Publication Information
Transactions of the Korean Society of Mechanical Engineers B / v.36, no.2, 2012 , pp. 117-123 More about this Journal
Abstract
This paper discusses two different techniques used to measure the mechanical properties of thin films: the bulge test and the nanoindentation test. In the bulge test, a uniform pressure is applied to one side of the film. Measurement of the membrane deflection as a function of the applied pressure allows one to determine the mechanical properties such as Young's modulus, and the residual stress. A nanoindentation test is performed by pushing an indenter tip into the specimen and then withdrawing it, and then recording the indentation force as a function of the indenter position. A modified King's model is used to estimate the mechanical properties of the thin film in order to avoid the effects of the substrate layers. A combination of both the bulge test and the nanoindentation test can determine both Young's modulus and Poisson's ratio simultaneously.
Keywords
Bulge Test; Nano-Indentation Test; Thin Film; Young's Modulus; Poisson's Ratio;
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Times Cited By KSCI : 3  (Citation Analysis)
Times Cited By SCOPUS : 0
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