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Finite Element Analysis of Nano Deformation for Hyper-fine Pattern Fabrication by Application of Nanoidentation Process (II)  

이정우 (부산대학교 정밀기계공학과)
윤성원 (부산대학교 정밀기계공학과)
강충길 (부산대학교 기계공학부, 정밀정형 및 금형가공연구소)
Publication Information
Journal of the Korean Society for Precision Engineering / v.20, no.9, 2003 , pp. 47-54 More about this Journal
Abstract
In this study, to achieve the optimal conditions for mechanical hyper-fine pattern fabrication process, deformation behavior of the materials during indentation was studied with numerical method by ABAQUS S/W. Polymer (PMMA) and brittle materials (Si, Pyrex glass) were used as specimens, and forming conditions to reduce the elastic re cover and pile-up were proposed. The indenter was modeled a rigid surface. Minimum mesh sizes of specimens are 1 -l0nm. Comparison between the experimental data and numerical result demonstrated that the finite element approach is capable of reproducing the loading-unloading behavior of a nanoindentation test. The result of the investigation will be applied to the fabrication of the hyper-fine pattern.
Keywords
Nanoindentation; Hyper-fine pattern; Nano-Scratch; Pile-up; Elastic recovery;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
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