• 한국표면공학회지
• /
• 제48권6호
• /
• pp.360-370
• /
• 2015

As the size of the semiconductor devices shrinks to nanometer scale, the importance of plasma etching process to the fabrication of nanometer scale semiconductor devices is increasing further and further. But for the nanoscale devices, conventional plasma etching technique is extremely difficult to meet the requirement of the device fabrication, therefore, other etching techniques such as use of multi frequency plasma, source/bias/gas pulsing, etc. are investigated to meet the etching target. Until today, various pulsing techniques including pulsed plasma source and/or pulse-biased plasma etching have been tested on various materials. In this review, the experimental/theoretical studies of pulsed plasmas during the nanoscale plasma etching on etch profile, etch selectivity, uniformity, etc. have been summarized. Especially, the researches of pulsed plasma on the etching of silicon, $SiO_2$, and magnetic materials in the semiconductor industry for further device scaling have been discussed. Those results demonstrated the importance of pulse plasma on the pattern control for achieving the best performance. Although some of the pulsing mechanism is not well established, it is believed that this review will give a certain understanding on the pulsed plasma techniques.

• Journal of Astronomy and Space Sciences
• /
• 제37권2호
• /
• pp.95-104
• /
• 2020

Properties of plasmas that constitute the plasma sheet in the near-Earth magnetotail vary according to the solar wind conditions and location in the tail. In this case study, we present multi-spacecraft observations by Cluster that show a transition of plasma sheet from cold, dense to hot, tenuous state. The transition was associated with the passage of a spatial boundary that separates the plasma sheet into two regions with cold, dense and hot, tenuous plasmas. Ion phase space distributions show that the cold, dense ions have a Kappa distribution while the hot, tenuous ions have a Maxwellian distribution, implying that they have different origins or are produced by different thermalization processes. The transition boundary separated the plasma sheet in the dawn-dusk direction, and slowly moved toward the dawn flank. The hot, tenuous plasmas filled the central region while the cold, dense plasmas filled the outer region. The hot, tenuous plasmas were moving toward the Earth, pushing the cold, dense plasmas toward the flank. Different types of dynamical processes can be generated in each region, which can affect the development of geomagnetic activities.

• 한국항해항만학회:학술대회논문집
• /
• 한국항해항만학회 2000년도 추계학술대회논문집
• /
• pp.116-119
• /
• 2000

The advantage of plasma-sprayed coating is their good resistance against thermal shock due to the porous state of the coated layer with a consequently low Youngs modulus. However, the existence of many pores with a bimodal distribution and a laminar structure in the coating reduces coating strength and oxidation protection of the base metals. In order to counteract these problems, there have been many efforts to obtain dense coatings by spraying under low pressure or vacuum and by controlling particle size and morphology of the spraying materials. The aim of the present study is to survey the effects of the HIP treatment between 1100 and 130$0^{\circ}C$ on plasma-sprayed oxide coating of A1$_2$O$_3$, A1$_2$O$_3$-SiO$_2$on the metal substrate (type C18N10T stainless steel). These effects were characterized by phase identification, Vickers hardness measurement, and tensile test before and after HIPing. These results show that high-pressure treatment has an advantage for improving adhesive strength and Vickers hardness of plasma-sprayed coatings.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2000년도 추계학술대회 논문집
• /
• pp.116-119
• /
• 2000

The advantage of plasma-sprayed coating is their good resistance against thermal shock due to the porous state of the coated layer with a consequently low Youngs modules. However, the existence of many pores with a bimodal distribution and a laminar structure in the coating reduces coating strength and oxidation protection of the base metals. In order to counteract these problems, there have been many efforts to obtain dense coatings by spraying under low pressure or vacuum and by controlling particle size and morphology of the spraying materials. The aim of the present study is to survey the effects of the HIP treatment between 1100 and 130$0^{\circ}C$ on plasma-sprayed oxide coating of A1$_2$O$_3$, A1$_2$O$_3$-SiO$_2$ on the metal substrate (type C18N10T stainless steel). These effects were characterized by phase identification, Vickers hardness measurement, and tensile test before and after HIPing, These results show that high-pressure treatment has an advantage for improving adhesive strength and Vickers hardness of plasma- sprayed coatings.

• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2000년도 제18회 학술발표회 논문개요집
• /
• pp.210-210
• /
• 2000

Vertically well aligned multi-wall carbon nanotubes (CNT) were grown on nickel coated glass substrates by plasma enhanced hot filament chemical vapor deposition at low temperatures below 600$^{\circ}C$. Acetylene and ammonia gas were used as the carbon source and a catalyst. Effects of growth parameters such as pre-treatment of substrate, plasma intensity, filament current, imput gas flow rate, gas composition, substrate temperature and different substrates on the growth characteristics of CNT were systematically investigated. Figure 1 shows SEM image of CNT grown on Ni coated glass substrate. Diameter of nanotube was 30 to 100nm depending on the growth condition. The diameter of CNT decreased and density of CNT increased as NH3 etching time etching time increased. Plasma intensity was found to be the most critical parameter to determine the growth of CNT. CNT was not grown at the plasma intensity lower than 500V. Growth of CNT without filament current was observed. Raman spectroscopy showed the C-C tangential stretching mode at 1592 cm1 as well as D line at 1366 cm-1. From the microanalysis using HRTEM, nickel cap was observed on the top of the grown CNT and very thin carbon amorphous layer of 5nm was found on the nickel cap. Current-voltage characteristics using STM showed about 34nA of current at the applied voltage of 1 volt. Electron emission from the vertically well aligned CNT was obtained using phosphor anode with onset electric field of 1.5C/um.

• 반도체디스플레이기술학회지
• /
• 제21권2호
• /
• pp.74-84
• /
• 2022

As the semiconductor industry develops, the difficulty of newly required process technology becomes difficult, and the importance of production yield and product reliability increases. As an effort to minimize yield loss in the manufacturing process, interests in the process defect process for facility diagnosis and defect identification are continuously increasing. This research observed the plasma condition changes in the multi oxide/nitride layer deposition (MOLD) process, which is one of the 3D-NAND manufacturing processes through optical emission spectroscopy (OES) and monitored the result of whether the change in plasma characteristics generated in repeated deposition of oxide film and nitride film could directly affect the film. Based on these results, it was confirmed that if a change over a certain period occurs, a change in the plasma characteristics was detected. The change may affect the quality of oxide film, such as the film thickness as well as the interfacial surface roughness when the oxide and nitride thin film deposited by plasma enhenced chemical vapor deposition (PECVD) method.

• Nutritional Sciences
• /
• 제6권4호
• /
• pp.201-208
• /
• 2003

This research was conducted to study the effects of the supplementation of multi-extracts of mori folium (MF) and of exercise on plasma insulin and glucose levels in streptozotocin (STZ)-induced diabetic rats. Eight male Sprague-Dawley rats, 4 weeks old, were assigned to each experimental group and were raised in the laboratory for 10 weeks. The animal groups consisted of a normal-control group, a STZ-control group, 3 STZ-induced diabetic groups supplemented ad libitum with various amounts of MF extracts (MF-720, MF-360, and MF-180 groups), and a STZ-induced diabetic group supplemented with MF-360 along with exercise. In the normal-control group, glucose tolerance tests resulted in the peak blood glucose level being achieved in 15 minutes and a fasting blood glucose level being achieved in 60 minutes. In the STZ-control group, the peak blood glucose level was reached after 60 minutes and, even after 90 minutes, blood glucose shown at a significantly higher level compared to the fasting levels. In the groups supplemented with MF extracts, the blood glucose level peaked after 30 minutes of glucose challenge, and returned to the fasting level after 90 minutes; the MF-360 and MF-360+exercise groups showed the best levels of glucose tolerance. Blood glucose levels in the STZ-induced diabetic groups were significantly higher compared to the normal-control group. However, after 7 weeks of supplementation with MF extracts, a significant lowering of blood glucose levels was observed in all groups supplemented with the MF extract. The best effect was observed in the group given MF extract combined with exercise. Compared to the normal-control group, blood insulin levels were significantly lower in all STZ-induced diabetic groups; however, a significantly higher level of insulin was observed in the groups given MF extracts compared to the STZ-control group. This study shows that the supplementation of MF extracts in STZ-induced diabetic rats resulted in increased blood insulin levels and lower blood glucose levels.

• 폴리머
• /
• 제30권4호
• /
• pp.291-297
• /
• 2006

본 연구에서는 아민화 polyolefin-g-GMA 복합음이온 교환섬유를 이용하여 플라스마 산화된 NO의 흡착특성을 고찰하였다. 플라스마 산화에 의한 $NO_2$ 전환율은 NO 200 ppm, 산소 10%, 유속 30 L/min 일 때 최대 49% 이었다. 또한 복합음이온 교환섬유의 $NO_2$ 흡착량은 함수율이 높을수록 증가하였고 함수율이 최대 1.5 g $H_2O/g$ IEF 이었으며, 복합음이온 교환섬유의 $NO_2$ 흡착은 10 분까지 빠르게 진행되었고 120 분에서 최대 80% 흡착되었다. 이온교환 용량은 함수율이 증가함에 따라 증가하였으며, 흡착컬럼 충전 비가 L/D=5에서 0.6 mmol/g IEF로 가장 높았다. 또한 이온교환 섬유의 흡착은 Langmuir 등온흡착 모델보다 Freundlich 등온흡착 모델에 가까웠으며, 다분자층에서의 흡착이 우세하게 발생한 것을 확인할 수 있었다.

• 한국표면공학회:학술대회논문집
• /
• 한국표면공학회 2012년도 춘계학술발표회 논문집
• /
• pp.346-346
• /
• 2012

탄소 탄소 복합재료(C/C Composites)는 모재의 성분이 탄소로 구성되어 있어 약 $500^{\circ}C$이상의 산화분위기에서는 쉽게 산화되는 결점을 가지고 있다. 본 연구에서는 내산화성을 향상시키기 위한 방법으로서 Plasma Spray 코팅방법을 사용하여 다층 코팅막을 형성시킨 후 $1500^{\circ}C$에서 10시간동안 산화시험을 하였다.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2004년도 춘계학술대회 논문집 방전 플라즈마 유기절연재료 초전도 자성체연구회
• /
• pp.115-119
• /
• 2004

This paper is investigated about the effect of vibration of the water surface for hydrogen gas generation by non-thermal plasma. The vibration of the water surface is more powerful with increasing applied voltage. In this experimental reactor which is made of multi-needle and plate, the maximum acquired hydrogen production rate is about 6.8[ml/sec]. Although the generation of hydrogen gas is increased with elevating time, it is saturated after specific time due to the volume of reactor and the saturation of taylor cone.