• 마이크로전자및패키징학회지
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• 제19권2호
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• pp.67-72
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• 2012

최근에 전자 산업 분야에서 장치의 고용량을 구현 하기 위해 구동 drive IC의 선폭은 좁아지고 집적도는 증가하고 있다. 이러한 반도체, 전자 산업 분야의 초소형화, 고밀도화에 따라 FCCL(Flexible Copper Clad Laminate)의 표면 품질이 더욱 중요해 지고 있다. FCCL의 표면 결함으로는 돌기, 스크레치, 덴트 등이 있다. 특히 돌기가 표면에 존재할 경우 후속 공정에서 쇼트와 같은 불량을 유발할 수 있으며, 제품의 품질 저하를 야기 시킬 수 있다. 하지만 표면에 돌기가 존재한다 하더라도, 전해액의 레벨링 특성이 우수하다면 돌기의 성장을 막을 수 있다.평탄하고, 결함이 없는 도금표면을 얻기 위해서는 첨가제의 역할이 필수적이다. 평탄한 구리 표면을 형성하기 위해서 stock solution에 가속제, 억제제, 레벨러를 첨가하였다. 레벨러를 첨가하는 이유는 평탄한 표면을 얻고, 돌기의 형성을 억제하기 위함이다. 구리도금 표면 형상을 향상시키기 위한 레벨러로는 SO(Safranin O), MV(Methylene Violet), AB(Alcian Blue), JGB(Janus Green B), DB(Diazine Black) and PVP(Polyvinyl Pyrrolidone)가 사용되었다. 도금 첨가제와 도금 조건의 변화를 통해 도금시레벨링 특성을 향상시키고, 레벨링 특성 측정을 위해 니켈 인공돌기를 제작 한 후 레벨링 특성을 측정하였다.

• Transactions on Electrical and Electronic Materials
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• 제13권2호
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• pp.106-109
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• 2012

A low power methane gas sensor with microheater was fabricated by silicon bulk micromachining technology. In order to heat up the sensing layer to operating temperature, a platinum (Pt) micro heater was embedded in the gas sensor. The line width and gap of the microheater was 20 ${\mu}m$ and 4.5 ${\mu}m$, respectively. Zinc oxide (ZnO) nanowhisker arrays were grown on a sensor from a ZnO seed layer using a hydrothermal method. A 200 ml aqueous solution of 0.1 mol zinc nitrate hexahydrate, 0.1 mol hexamethylenetetramine, and 0.02 mol polyethylenimine was used for growing ZnO nanowhiskers. Temperature distribution of the sensor was analyzed by infrared thermal camera. The optimum temperature for highest sensitivity was found to be $250^{\circ}C$ although relatively high (64%) sensitivity was obtained even at as low a temperature as $150^{\circ}C$. The power consumption was 72 mW at $250^{\circ}C$, and only 25 mW at $150^{\circ}C$.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2011년도 제42회 하계학술대회
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• pp.1704-1705
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• 2011

MEMS(Micro Electro Mechanical Systems) 기술과 니켈 전기도금공정을 이용하여 수십 내지 수백개의 탐침을 갖는 일체형 탐침 패드(Probe Pad)를 제작하였다. PI(Polyimide) Film은 일본 UBE사의 $50{\mu}m$ 두께를 갖는 유피렉스를 사용하였다. 일체형 탐침 패드는 Polyimide Film에 Cu를 증착 후 사진식각공정을 통하여 PR Mold 형성한 후 전류가 흐르는 Cu 라인(line) 배선을 형성하기 위해 Cu를 식각하였으며 형성된 Cu Line 위에 니켈 전해도금공정을 실시하여 니켈 배선을 형성하였다. Ni 배선 위에 니켈 범프를 형성하기 위하여 PR Strip을 실시한 후 다시 PR Mold를 형성하였다. PR Mold 형성 후 다시 니켈 전해도 금을 실시하여 니켈 범프(bump)를 형성하였다. 제작된 탐침패드의 니켈배선의 폭은 $18.0{\mu}m$이고 피치(Pitch)는 $35{\mu}m$이며, 니켈 범프의 두께(Thickness)는 $10.0{\mu}m$로 제작되었다. 본 연구에서 제작된 탐침패드를 더욱 더 고집적화(Fine Pitch)하여 일체형 탐침 패드를 제작하게 되면 이를 사용하는 프로브유니트의 제작에 있어서 비용 절감 및 생산성(Throughput)을 크게 향상 시킬 수 있을 것이다.

• Steel and Composite Structures
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• 제25권4호
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• pp.403-413
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• 2017

The fabric braided braking hose that delivers the driver's braking force to brake cylinder undergoes the large deformation cyclic motion according to the steering and bump/rebound motions of vehicle. The cyclic large deformation of braking hose may give rise to two critical problems: the interference with other adjacent vehicle parts and the micro cracking stemming from the fatigue damage accumulation. Hence, both the hose deformation and the fatigue damage become the critical issue in the design of braking hose. In this context, this paper introduces a multi-objective optimization method for minimizing the both quantities. The total length of hose and the helix angles of fabric braided composite layers are chosen for the design variables, and the maximum hose deformation and the critical fatigue life cycle are defined by the individual single objective functions. The trade-off between two single objective functions is made by introducing the weighting factors. The proposed optimization method is validated and the improvement of initial hose design is examined through the benchmark simulation. Furthermore, the dependence of optimum solutions on the weighting factors is also investigated.

• 한국정밀공학회지
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• 제23권4호
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• pp.52-59
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• 2006

Surface qualities of a micro-processed sample with a pulse laser have been investigated by making use of scanning confocal microscope(SCM) and atomic force microscope(AFM). Samples are bump electrodes and ITO glass of LCD module used in a mobile phone and a wafer surface scribed by UV laser. A image of $140{\times}120{\mu}m^2$ is obtained within 1 second by SCM because scan speed of a x-axis and y-axis are 1kHz and 1Hz, respectively. AFM is able to correctly measure the hight and width of ITO, and scribing depth and width of a wafer with a resolution less than 300nm. However, the scan speed is slow and it is difficult to distinguish a surface composed of different kinds of materials. Results show that SCM is preferable to obtain a image of a sample composed of different kinds of material than AFM because the intensity of a reflected light from the surface is different for each material.

• 대한용접접합학회:학술대회논문집
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• 대한용접접합학회 2006년도 춘계 학술대회 개요집
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• pp.218-220
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• 2006

Sn-3.0Ag-0.5Cu solder is widely used as micro-joining materials of flip chip package(FCP) because of the fact that it causes less dissolution and has good thermal fatigue property. However, compared with ternary electroplating in the manufacturing process, binary electroplating is still used in industrial field because of easy to make plating solution and composition control. The objective of this research is to fabricate Sn-3.0Ag-0.5Cu solder bumping having accurate composition. The ternary Sn-3.0Ag-0.5Cu solder bumping could be made on a Cu pad by sequent binary electroplating of Sn-Cu and Sn-Ag. Composition of the solder was estimated by EDS and ICP-OES. The thickness of the bump was measured using SEM and the microstructure of intermetallic-compounds(IMCs) was observed by SEM and EDS. From the results, contents of Ag and CU found to be at $2.7{\pm}0.3wt%\;and\;0.4{\pm}0.1wt%$, respectively.

• Transactions on Electrical and Electronic Materials
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• 제13권6호
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• pp.305-309
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• 2012

In this study, ZnO nanorods and $SnO_2$-CuO heterogeneous oxide were grown on membrane-type gas sensor platforms and the sensing characteristics for carbon monoxide (CO) were studied. Diaphragm-type gas sensor platforms with built-in Pt micro-heaters were made using a conventional bulk micromachining method. ZnO nanorods were grown from ZnO seed layers using the hydrothermal method, and the average diameter and length of the nanorods were adjusted by changing the concentration of the precursor. Thereafter, $SnO_2$-CuO heterogeneous oxide thin films were grown from evaporated Sn and Cu thin films. The average diameters of the ZnO nanorods obtained by changing the concentration of the precursor were between 30 and 200 nm and the ZnO nanorods showed a sensitivity value of 21% at a working temperature of $350^{\circ}C$ and a carbon monoxide concentration of 100 ppm. The $SnO_2$-CuO heterogeneous oxide thin films showed a sensitivity value of 18% at a working temperature of $200^{\circ}C$ and a carbon monoxide concentration of 100 ppm.

• 한국마이크로전자및패키징학회:학술대회논문집
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• 한국마이크로전자및패키징학회 2002년도 추계기술심포지움논문집
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• pp.21-26
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• 2002

Solder flip chip bumping and subsequent coining processes on PCB were investigated to solve the warpage problem of organic substrates for high pin count flip chip assembly by providing good co-planarity. Coining of solder bumps on PCB has been successfully demonstrated using a modified tension/compression tester with height, coining rate and coining temperature variables. It was observed that applied loads as a function of coined height showed three stages as coining deformation : (1) elastic deformation at early stage, (2) linear increase of applied load, and (3) rapid increase of applied load. In order to reduce applied loads for coining solder bumps on PCB, effects of coining process parameters were investigated. Coining loads for solder bump deformation strongly depended on coining rates and coining temperatures. As coining rates decreased and process temperature increased, coining loads decreased. Among the effect of two factors on coining loads, it was found that process temperature had more significant effect to reduce applied coining loads during the coining process. Lower coining loads were needed to prevent substrate damages such as micro-via failure and build-up dielectric layer thickness change during applying loads. For flip chip assembly, 97Pb/Sn flip chip bumped devices were successfully assembled on organic substrates with 37Pb/Sn coined flip chip bumps.

• 반도체디스플레이기술학회지
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• 제19권2호
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• pp.45-50
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• 2020

We investigated the Si_1-xGe_x surface properties when dry cleaning the films using NF₃ / H₂O remote plasma. After the dry cleaning process, it was found that about 80-250 nm wide bumps were formed on the SiGe surface regardless of Ge concentration in the rage of x = 0.1 ~ 0.3. In addition, effects of the dry cleaning processing parameters such as pressure, substrate temperature, and H₂O flow rates were examined. It was found that the surface bump is significantly dependent on the flow rate of H₂O. Based on these observations, we would like to provide additional guidelines for implementing the dry cleaning process to SiGe materials.

• 마이크로전자및패키징학회지
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• 제14권4호
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• pp.79-85
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• 2007

본 연구의 목적은 OSP, 전해 Au과 무전해 Ni/Au로써 표면처리를 달리한 연성회로기판 상에 Au 스터드 플립칩 범프의 초음파 접합 가능성을 연구하는 것이었다. Au 스터드 범프는 표면처리 방법에 상관없이 성공적으로 연성회로기판의 패드 상에 초음파 접합되었다 접합 강도는 접합 시간에 민감하게 영향을 받았다. 접합 시간이 길어짐에 따라 접합 강도는 증가하였으나, 2초 이상의 접합 시간에서는 이웃 범프끼리 단락되는 bridge 현상이 발생하였다. 최적 접합조건은 OSP 처리된 가판상에 0.5초간 초음파 접합하는 것이었다.