Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Analysis of a processed sample surface using SCM and AFM

공초점현미경과 원자현미경을 이용한 가공된 시료 표면의 형상측정

  • 배한성 (고등기술연구원 레이저초정밀공정팀) ;
  • 김경호 (고등기술연구원 레이저초정밀공정팀) ;
  • 문성욱 (고등기술연구원 레이저초정밀공정팀) ;
  • 남기중 (고등기술연구원 레이저초정밀공정팀) ;
  • 권남익 (한국외대 물리학과) ;
  • 김종배 (고등기술연구원 레이저초정밀공정팀)
  • Published : 2006.04.01
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Abstract

Surface qualities of a micro-processed sample with a pulse laser have been investigated by making use of scanning confocal microscope(SCM) and atomic force microscope(AFM). Samples are bump electrodes and ITO glass of LCD module used in a mobile phone and a wafer surface scribed by UV laser. A image of $140{\times}120{\mu}m^2$ is obtained within 1 second by SCM because scan speed of a x-axis and y-axis are 1kHz and 1Hz, respectively. AFM is able to correctly measure the hight and width of ITO, and scribing depth and width of a wafer with a resolution less than 300nm. However, the scan speed is slow and it is difficult to distinguish a surface composed of different kinds of materials. Results show that SCM is preferable to obtain a image of a sample composed of different kinds of material than AFM because the intensity of a reflected light from the surface is different for each material.

Keywords

References

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