SiGe Surface Changes During Dry Cleaning with NF3 / H2O Plasma |
Park, Seran
(Department of Materials Science and Engineering, Yonsei University)
Oh, Hoon-Jung (BIT Micro Fab Research Center, Yonsei University) Kim, Kyu-Dong (ACN Co. Ltd) Ko, Dae-Hong (Department of Materials Science and Engineering, Yonsei University) |
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