• 한국기계가공학회지
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• 제13권6호
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• pp.30-36
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• 2014

Many different cells types have been found to be highly sensitive to mechanical force imposed by their surroundings. The cellular response to external mechanical forces has very important effects on numerous biological phenomena. In spite of its importance in biological processes, the cell adhesion force remains difficult to measure quantitatively at the cellular level. In this paper, to enhance quantitative measurements of cell adhesive interactions, a new attaching system and a method in which a glass bead can be attached to an AFM cantilever was designed and fabricated, and the degree of range displacement was controlled in the system. In an experiment, the movement of the stage in the attaching system and the attaching process were measured. The effectiveness of this system was confirmed as well in the experiment. In addition, through a commercial AFM system, the spring constant of the modified AFM probe could be measured.

• 한국전산구조공학회논문집
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• 제31권1호
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• pp.17-21
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• 2018

오늘날까지 적층 마이크로 외팔보의 고유진동수에 대하여 연구가 진행되었다. 마이크로 보는 실리콘 재질로 만들어 지지만, 그것의 상하 표면은 얇은 금 박막층(~30nm)이 증착되어 있다. 초음파 검사를 위해 초음파 테스트 플랫폼을 사용했으며, 시간영역 신호는 광학적으로 측정되었다. 고유진동수는 파형을 고속 Fourier 변환을 통해 정량화하였으며, 결과적으로 고전적인 보 이론과 일치하는 결과를 보여 주었다. 본 연구는 마이크로/나노스케일 재료와 마이크로 구조에 대한 동적평가기법을 제공할 것으로 기대된다.

• 한국생산제조학회지
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• 제24권5호
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• pp.475-480
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• 2015

Ultrasonic atomic force microscopy (Ultrasonic-AFM) has been used to investigate the elastic property of the ultra-thin coating layer in a thin-film system. The modified Hertzian theory was applied to predict the contact resonance frequency through accurate theoretical analysis of the dynamic characteristics of the cantilever. We coat 200 nm thick Aluminum and Titanium thin films on the substrate using the DC Magnetron sputtering method. The amplitude and phase of the contact resonance frequency of a vibrating cantilever varies in response to the local stiffness constant. Ultrasonic-AFM images were obtained using the variations in the elastic property of the materials. The morphology of the surface was clearly observed in the Ultrasonic-AFM images, but was barely visible in the topography. This research demonstrates that Ultrasonic-AFM is a promising technique for visualizing the distribution of local stiffness in the nano-scale thin coatings.

• 전기전자학회논문지
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• 제19권1호
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• pp.52-57
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• 2015

커패시턴스 용량의 변화를 측정할 수 있는 박막 Si3N4 캔틸레버 센서 어레이를 이용한 질병진단 시스템을 설계하고 구현하였다. 시스템은 32 비트 RISC 프로세서, 메모리, 버스, 통신용 IP, ADC, LCD 디스플레이로 구성되어 있다. 10개 내외의 마커를 이용하여 수십 개의 마커를 사용했을 경우와 같은 정확도를 얻을 수 있는 마커선정 방법을 제안한다. 개발된 진단기의 커패시턴스 분해능은 1fF 이하이고, 트롬빈 10nM 까지 감지할 수 있다.

• Transactions on Electrical and Electronic Materials
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• 제14권2호
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• pp.63-66
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• 2013

This paper describes the highly productive process technologies of microprobe arrays, which were used for a probe card to test a Dynamic Random Access Memory (DRAM) chip with fine pitch pads. Cantilever-type microprobe arrays were fabricated using conventional micro-electro-mechanical system (MEMS) process technologies. Bonding material, gold-tin (Au-Sn) paste, was used to bond the Ni-Co alloy microprobes to the ceramic space transformer. The electrical and mechanical characteristics of a probe card with fabricated microprobes were measured by a conventional probe card tester. A probe card assembled with the fabricated microprobes showed good x-y alignment and planarity errors within ${\pm}5{\mu}m$ and ${\pm}10{\mu}m$, respectively. In addition, the average leakage current and contact resistance were approximately 1.04 nA and 0.054 ohm, respectively. The proposed highly productive microprobes can be applied to a MEMS probe card, to test a DRAM chip with fine pitch pads.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.3365-3370
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• 2007

We developed micro power generation system using piezoelectric materials. In our system, the ambient vibrating energy is converting to electric energy by deflection of piezoelectric beams. The system consists of energy generating parts, converting enhancement parts, electric regulation and charging parts, and interface with small-energy-consuming mobile devices. The geometry of piezoelectric beams, the source of vibrating energy, and the electric load of target application determine the characteristics of generating electric power, such as impedance, voltage, current and power density. Therefore, we made a model for analysis of generating power with given information such as piezoelectric materials, geometry, vibration type, and mass. With this model, we can calculate capacitance of piezoelectric beams, generating voltage, current, and power. To obtain maximum energy transfer efficiency, we approached this study in the view of material, electrical, and mechanical engineering

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.741-745
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• 2007

Supplying power to microsystems that have no physical connection to the outside is difficult, and using batteries is not always appropriate. This paper discusses how to generate electricity from mechanical energy when vibrated in a cantilever beam. A model for the system predicts that the output power of the system is maximized when the mechanical damping in the system is minimized. Furthermore, to cover a wide frequency range and to be useful in a number of applications, a system of beams with different resonant frequencies has been designed and optimized. This information makes it possible to determine what design alternatives are feasible for the creation of a micro power supply for any specific application of MEMS.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2000년도 하계학술대회 논문집 C
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• pp.2236-2238
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• 2000

The paper represents the fabrication of an electrostatic micro actuator for optical devices. The micro actuator consists of a plate suspended four p+ silicon cantilevers and an electrode on a glass substrate. The cantilever curls down because of the residual stress gradient in p+ silicon. When input voltage is applied between the p+ cantilevers and the electrode. the cantilevers are pulled toward the electrode by the electrostatic force. The displacement of the plate is measured with a laser displacement meter for various input voltage and frequencies.

• 센서학회지
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• 제17권6호
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• pp.425-428
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• 2008

This paper describes the resonant characteristics of polycrystalline SiC micro resonators. The $1{\mu}m$ thick polycrystalline 3C-SiC cantilevers with different lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at room temperature. For the $100{\sim}40{\mu}m$ long cantilevers, the fundamental frequency appeared at $147.2kHz{\sim}856.3kHz$. The $100{\mu}m$ and $80{\mu}m$ long cantilevers have second mode resonant frequency at 857.5.kHz and 1.14.MHz, respectively. Therefore, polycrystalline 3C-SiC resonators are suitable for RF MEMS devices and bio/chemical sensor applications.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.251-251
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• 2008

In this work, appropriate corrugated structure is suggested to increase resonant frequency of resonators. Micro beam resonators based on polycrystalline 3C-SiC films which have a two-side corrugation along the length of beams were simulated by finite element method and compared to a same - size flat rectangular. With the dimension of $36\times12\times0.5{\mu}m^3$, the flat cantilever has resonant frequency of 746 kHz. Meanwhile, with this size only corrugation width of $6{\mu}m$ and depth of $0.4{\mu}m$, the corrugated cantilever reaches the resonant frequency at 1.252 MHz, and is 68% larger than that of flat type.