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http://dx.doi.org/10.5369/JSST.2008.17.6.425

Fabrication and characteristics of polycrystalline SiC micro resonators  

Chung, Gwiy-Sang (School of Electrical Eng., University of Ulsan)
Lee, Tae-Won (School of Electrical Eng., University of Ulsan)
Publication Information
Journal of Sensor Science and Technology / v.17, no.6, 2008 , pp. 425-428 More about this Journal
Abstract
This paper describes the resonant characteristics of polycrystalline SiC micro resonators. The $1{\mu}m$ thick polycrystalline 3C-SiC cantilevers with different lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at room temperature. For the $100{\sim}40{\mu}m$ long cantilevers, the fundamental frequency appeared at $147.2kHz{\sim}856.3kHz$. The $100{\mu}m$ and $80{\mu}m$ long cantilevers have second mode resonant frequency at 857.5.kHz and 1.14.MHz, respectively. Therefore, polycrystalline 3C-SiC resonators are suitable for RF MEMS devices and bio/chemical sensor applications.
Keywords
Polycrystalline 3C-SiC; resonator; cantilever;
Citations & Related Records
Times Cited By KSCI : 4  (Citation Analysis)
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