Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2008.11a
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- Pages.251-251
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- 2008
Characteristics of corrugated polycrystalline 3C-SiC resonators
주름진 다결정 3C-SiC 공진기의 특성
- Nhan, Duong The (School of Electrical Eng., University of Ulsan) ;
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Chung, Gwiy-Sang
(School of Electrical Eng., University of Ulsan)
- Published : 2008.11.06
Abstract
In this work, appropriate corrugated structure is suggested to increase resonant frequency of resonators. Micro beam resonators based on polycrystalline 3C-SiC films which have a two-side corrugation along the length of beams were simulated by finite element method and compared to a same - size flat rectangular. With the dimension of