센서학회지 (Journal of Sensor Science and Technology)

  • 제17권6호
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  • Pages.425-428
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  • 2008
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  • 1225-5475(pISSN)
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  • 2093-7563(eISSN)
한국센서학회 (The Korean Sensors Society)
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다결정 SiC 마이크로 공진기의 제작과 그 특성

Fabrication and characteristics of polycrystalline SiC micro resonators

  • 정귀상 (울산대학교 전기전자정보시스템공학부) ;
  • 이태원 (울산대학교 전기전자정보시스템공학부)
  • 발행 : 2008.11.30
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초록

This paper describes the resonant characteristics of polycrystalline SiC micro resonators. The $1{\mu}m$ thick polycrystalline 3C-SiC cantilevers with different lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at room temperature. For the $100{\sim}40{\mu}m$ long cantilevers, the fundamental frequency appeared at $147.2kHz{\sim}856.3kHz$. The $100{\mu}m$ and $80{\mu}m$ long cantilevers have second mode resonant frequency at 857.5.kHz and 1.14.MHz, respectively. Therefore, polycrystalline 3C-SiC resonators are suitable for RF MEMS devices and bio/chemical sensor applications.

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참고문헌

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