• 제목/요약/키워드: Metrology

검색결과 729건 처리시간 0.029초

이원계 Co-C 공정계 온도 고정점의 특성 (Phase transition features of binary Co-C eutectic temperature fixed-point)

  • 김용규;양인석;감기술
    • 센서학회지
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    • 제14권6호
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    • pp.381-386
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    • 2005
  • A Co-C eutectic cell for thermocouple calibration was manufactured and tested to investigate its phase transition characteristics using Type B thermocouples. It was observed that the freezing plateaus were flatter than those of melting, but the melting points were closer to the true transition temperature than the freezing points. The expanded uncertainty of melting temperature was calculated not to exceed $0.2^{\circ}C$ (k = 2). Based on the observed results, the melting process is recommended for the calibration of thermocouples.

Development of a Four-way Interface for Online Capillary Isoelectric Focusing-Electrospray-Mass Spectrometry (CIEF-ESI-MS)

  • Yu, Hai Dong;Kim, Byungjoo;Shin, Dae-Ho;Ahn, Seonghee
    • Mass Spectrometry Letters
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    • 제4권4호
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    • pp.83-86
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    • 2013
  • A new interface for coupling CIEF and MS using a four-way cross has been developed in a single mechanical system. This new interface could be operated without the electric discontinuity and reinstallation of lines. Additionally, a bare fused silica capillary was facilitated as a spray needle to produce electrospray and to guide catholyte or sheath liquid. Focusing for CIEF was completed in a hanging droplet at the end of spray needle. This capillary spray needle also provided stable spray, enhanced the ionization efficiency and increased sensitivity. Results with carbonic anhydrase I showed that focusing and spraying were well completed with the new interface and the new spray needle.

반도체 제조 가상계측 공정변수를 이용한 웨이퍼 수율 예측 (A Prediction of Wafer Yield Using Product Fabrication Virtual Metrology Process Parameters in Semiconductor Manufacturing)

  • 남완식;김성범
    • 대한산업공학회지
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    • 제41권6호
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    • pp.572-578
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    • 2015
  • Yield prediction is one of the most important issues in semiconductor manufacturing. Especially, for a fast-changing environment of the semiconductor industry, accurate and reliable prediction techniques are required. In this study, we propose a prediction model to predict wafer yield based on virtual metrology process parameters in semiconductor manufacturing. The proposed prediction model addresses imbalance problems frequently encountered in semiconductor processes so as to construct reliable prediction model. The effectiveness and applicability of the proposed procedure was demonstrated through a real data from a leading semiconductor industry in South Korea.

산업용 백금저항온도센서의 결선방식에 따른 측정불확도 평가방법 (Uncertainty assessment of industrial platinum resistance thermometers for different lead-wire connection methods)

  • 김용규;감기술;양인석
    • 센서학회지
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    • 제18권4호
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    • pp.322-326
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    • 2009
  • To estimate the measurement uncertainty for industrial platinum resistance thermometers(IPRTs) made with 3-wire connection, the immersion temperature profile was investigated using a liquid bath. Two types of IPRTs having lead wires made of silver and nickel were constructed and the immersion profiles were measured at temperatures from -50 $^{\circ}C$ to 250 $^{\circ}C$ using 3-wire and 4-wire method. As immersion depth and temperature increased, the resistances measured by 3-wire method increased linearly but not for 4-wire method. To calibrate a 3-wire IPRT, the immersion effect must be accounted for. We propose a linear equation to assess correctly the measurement uncertainty.

10-V 조셉슨접합 어레이의 제작 및 특성 (Fabrication and Characteristics of 10-V Josephson Junction Array)

  • 홍현권;박세일;김규태
    • Progress in Superconductivity
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    • 제4권1호
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    • pp.59-63
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    • 2002
  • 10-V Josephson junction array arranged in 8 parallel stripline paths was fabricated using self-aligning and reactive ion etching techniques. These techniques were introduced in detail with aim of obtaining high-quality junctions. The array has 18,184 Josephson junctions with the area of $12\mu\textrm{m}$$\times$$38\mu\textrm{m}$. The gap voltage and minimum critical current density were about 2.7 ㎷ and /$23 A\textrm{cm}^2$, respectively. And the critical current density and leakage current at 5 volt were about 27 $A/\textrm{cm}^2$ and $5\mu\textrm{A}$, respectively When operated in the frequency range of 76-88 ㎓, the away generated constant voltage steps up to 14-19 V. The step size near 10-V was more than 7 $\mu\textrm{A}$.

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조셉슨접합 스트립라인의 마이크로파 감쇠에 대한 실험적인 조사 (Experimental Study on Microwave Attenuation in Josephson Junction Stripline)

  • 홍현권;박세일;김규태
    • Progress in Superconductivity
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    • 제4권1호
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    • pp.64-67
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    • 2002
  • The attenuation of millimeter waves (70-100 ㎓) propagating along Josephson Junction stripline had been measured by pattern recognition near gap voltage and proximity current bump. Test series arrays of 2000, 3000, and 4000 Josephson junctions with the area of $12\mu\textrm{m}$$\times$ $38\mu\textrm{m}$ had two sub-arrays with 50 Junctions at both ends. The arrays were fabricated with and without applying a plasma nitridation process to Nb ground plane. The effects of a nitridationprocess measured by the pattern recognition near gap voltage and proximity current bump were about 1.3-1.7 ㏈ and 1.6-1.8 ㏈, respectively. This means that the last sub-arrays with a nitridation process receive 26-34% more power than those without a nitridation process.

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Effect of Particles Size on Magnetic Performance of Dielectromagnetics

  • Gaworska, Dominika;Hodgson, Simon N.B.;Koniarek, Jaroslaw;Weglinski, Bogumil
    • 한국분말야금학회:학술대회논문집
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    • 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part2
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    • pp.792-793
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    • 2006
  • In the paper, the influence of different particle size $D:D>125{\mu}m$, $D<50{\mu}m$ and between on magnetic properties of a standardized dielectromagnetic is presented. The tests were taken at frequencies of between 50Hz, and 500Hz. Presented in the paper results provide important materials property data to allow the selection of the most appropriate dielectromagnetic particle size for different applications.

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Analysis on Transition between Index- and Bandgap-guided Modes in Photonic Crystal Fiber

  • Hong, Kee Suk;Lim, Sun Do;Park, Hee Su;Kim, Seung Kwan
    • Journal of the Optical Society of Korea
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    • 제20권6호
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    • pp.733-738
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    • 2016
  • We calculate optical properties of guided modes of a hybrid-guiding photonic crystal fiber. The design and modeling of such hybrid-guiding PCF is made by replacing air holes with inserts of high refractive index material layer by layer in order. The optical properties such as mode intensity profile, mode dispersion, optical birefringence, confinement loss, and chromatic dispersion during transition of the guiding mechanism are analyzed and discussed. The guided modes in the hybrid-guiding region are also compared with those of reference index-guiding and bandgap-guiding photonic crystal fibers.

AFM에서의 정량적 힘 측정을 위한 마이크로 캔틸레버의 강성 교정 (Accurate Determination of Spring Constants of Micro Cantilevers for Quantified Force Metrology in AFM)

  • 김민석;최재혁;김종호;박연규
    • 한국정밀공학회지
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    • 제24권6호
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    • pp.96-104
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    • 2007
  • Calibration of the spring constants of atomic force microscopy (AFM) cantilevers is one of the issues in biomechanics and nanomechanies for quantified force metrology at pieo- or nano Newton level. In this paper, we present an AFM cantilever calibration system: the Nano Force Calibrator (NFC), which consists of a precision balance and a one-dimensional stage. Three types of AFM cantilevers (contact and tapping mode) with different shapes (beam and V) and spring constants (42, 1, 0.06 N $m^{-1}$) are investigated using the NFC. The calibration results show that the NFC can calibrate the micro cantilevers ranging from 0.01 ${\sim}$ 100 N $m^{-1}$ with relative uncertainties of less than 2%.