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Accurate Determination of Spring Constants of Micro Cantilevers for Quantified Force Metrology in AFM  

Kim, Min-Seok (한국표준과학연구원(KRISS) 기반표준부 역학그룹)
Choi, Jae-Hyuk (한국표준과학연구원(KRISS) 기반표준부 역학그룹)
Kim, Jong-Ho (한국표준과학연구원(KRISS) 기반표준부 역학그룹)
Park, Yon-Kyu (한국표준과학연구원(KRISS) 기반표준부 역학그룹)
Publication Information
Journal of the Korean Society for Precision Engineering / v.24, no.6, 2007 , pp. 96-104 More about this Journal
Abstract
Calibration of the spring constants of atomic force microscopy (AFM) cantilevers is one of the issues in biomechanics and nanomechanies for quantified force metrology at pieo- or nano Newton level. In this paper, we present an AFM cantilever calibration system: the Nano Force Calibrator (NFC), which consists of a precision balance and a one-dimensional stage. Three types of AFM cantilevers (contact and tapping mode) with different shapes (beam and V) and spring constants (42, 1, 0.06 N $m^{-1}$) are investigated using the NFC. The calibration results show that the NFC can calibrate the micro cantilevers ranging from 0.01 ${\sim}$ 100 N $m^{-1}$ with relative uncertainties of less than 2%.
Keywords
AFM; cantilever; spring constant; force metrology;
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Times Cited By KSCI : 3  (Citation Analysis)
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