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http://dx.doi.org/10.7232/JKIIE.2015.41.6.572

A Prediction of Wafer Yield Using Product Fabrication Virtual Metrology Process Parameters in Semiconductor Manufacturing  

Nam, Wan Sik (Department of Industrial Management Engineering, Korea University)
Kim, Seoung Bum (Department of Industrial Management Engineering, Korea University)
Publication Information
Journal of Korean Institute of Industrial Engineers / v.41, no.6, 2015 , pp. 572-578 More about this Journal
Abstract
Yield prediction is one of the most important issues in semiconductor manufacturing. Especially, for a fast-changing environment of the semiconductor industry, accurate and reliable prediction techniques are required. In this study, we propose a prediction model to predict wafer yield based on virtual metrology process parameters in semiconductor manufacturing. The proposed prediction model addresses imbalance problems frequently encountered in semiconductor processes so as to construct reliable prediction model. The effectiveness and applicability of the proposed procedure was demonstrated through a real data from a leading semiconductor industry in South Korea.
Keywords
Classification; Yield prediction; Virtual metrology; Semiconductor industry;
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Times Cited By KSCI : 2  (Citation Analysis)
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