• 한국전기전자재료학회논문지
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• 제11권10호
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• pp.815-819
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• 1998

The silicon-nirtide membrane structure for IR sensor was fabricated through the etching and the direct bonding. The PRO($PbTiO_3$ ) layer for a IR detection was coated on the membrane and its characteristics were measured. The a attack of PTO layer during the etching of silicon wafer as well as the thermal isolation of the IR detection layer were eliminated through the method of bonding/etching of silicon wafer. The surface roughness of the membrane was measured by AFM, the micro voids and the non-contacted area were inspected by the PTO layer were measured, too.

• 센서학회지
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• 제29권6호
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• pp.374-381
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• 2020

Hydrogen gas has attracted considerable attention as a promising candidate for future energy resources because of its eco-friendly characteristics; however, its highly combustible characteristics should be thoroughly examined to preclude potential disasters. In this regard, a highly sensitive method for the selective detection of H₂ is extremely important. To achieve excellent H₂ selectivity, the utilization of a metal-organic framework (MOF) membrane can physically screen interfering gas molecules by restricting the size of kinetic diameters that can penetrate its nanopores. This paper summarizes the various endeavors of researchers to utilize the MOF molecular sieving layer for the development of highly selective H₂ sensors. Further, the review affords useful insights into the development of highly reliable H₂ sensors.

• 센서학회지
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• 제21권2호
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• pp.90-95
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• 2012

This paper describes the development of a glucose biosensor based on ion sensitive field effect transistor(ISFET) with a palladium(Pd) modified ion sensing membrane. By adopting Pd as a hydrogen sensitive layer and integrating a screen-printed reference electrode, the sensitivity and stability were considerably improved due to the high permeability and selectivity of the Pd hydrogen selective membrane. This paper suggests a new approach for realizing portable and highly sensitive glucose sensors for diagnosing and treating diabetes mellitus.

• 마이크로전자및패키징학회지
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• 제6권1호
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• pp.81-89
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• 1999

Micromachining을 이용하여 기존의 전자 물품 감시에 사용되는 자기공명센서의 소형화 공정을 연구하였다. 설계 한 구조는 Free Standing Membrane형 과 Diving Board형의 두 가지이며 각자에 대해 적합한 공정 조건을 수립하고 실제로 그 구조를 형성해 보았다. 멤브레인형의 경우는 센서 모양을 여러 가지 형태로 쉽게 바꿀 수 있는 반면에 그 크기가 실리콘 기판의 두께에 의존하여 소형화하는데 한계가 있었으며 다이빙 보드형의 경우 소형화에도 유리하고 센서의 자기변형이 보다 자유로운 구조였다. 실리콘 질화막은 일반 반도체 공정에서의 조건보다 Si의 함량을 크게 하여 열처리 없이도 저응력의 박막형성이 가능하였으며 탄성계수 값이 크지 않아 센서 부분의 자기변형을 크게 구속하지 않아 센서물질의 지지층으로 유리한 물질이었다. 또한 스퍼터링으로 증착된 텅스텐은 자성 센서 물질로 연구되고 있는 Fe-B-Si물질에 대한 식각 선택도가 높아 구조 형성 공정 중 보호 층으로 사용된 후 제거될 수 있음을 알 수 있었다. 따라서 지지층으로 실리콘 질화막을 사용하고 보호층으로 텅스텐 박막을 사용한 다이빙 보드형 구조가 전자 물품 감시(EAS)용 센서의 소형화에 유리 할 것으로 생각된다.

• 센서학회지
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• 제22권3호
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• pp.233-237
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• 2013

We fabricated electrolyte-insulator-semiconductor (EIS) devices using a solution process and measured the sensing properties of EIS devices according to the thicknesses of sensing membrane. For high pH sensitivity and better stability properties, we used $SiO_2/HfO_x$ (OH) layer as a sensing membrane. In this work, $HfO_x$ sensing membranes were deposited on 5 nm thick $SiO_2$ buffer layer by spin coater with thicknesses of 15, 31, 42, 55 nm, respectively. As a result, we founded that the thickness of $HfO_x$ sensing membrane affects to sensitivity and chemical stability of EIS device. Especially, the EIS device with 42 nm thick $HfO_x$ membrane showed superior sensing ability in terms of pH-sensitivity, linearity, hysteresis voltage and drift rate characteristics than the other devices. In conclusion, we confirmed that it is possible to improve the sensing ability and the chemical stability properties using optimized thickness of sensing membrane and proper annealing process.

• Journal of Electrochemical Science and Technology
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• 제12권2호
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• pp.225-229
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• 2021

Commercially available continuous glucose sensors require the operation stability for more than two weeks. Typically, the sensor comprises a sensing layer and an over-coating layer for the stable operation inside the body. In the sensing layer, enzymes and mediators are cross-linked together for the effective sensing of the glucose. The over-coating layer limits the flux of glucose and works as a biocompatible layer to the body fluids. Here, we report the simple preparation of the flux-limiting layer by the condensation of polyethyleneimine (PEI), tri-epoxide linker, and trimethylolpropane triglycidyl ether (PTGE). The sensor is constructed by a layer-by-layer drop-coating of the sensing layer containing glucose dehydrogenase and the PEI-derived blocking layer. It is stable for more than 14 days, which is enough for the sensor in the continuous monitor glucose monitoring (CGM) system.

• Bulletin of the Korean Chemical Society
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• 제25권2호
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• pp.177-181
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• 2004

A PVC membrane electrode for silver ion based on a new cone shaped calix[4]arene (CASCA) as membrane carrier was prepared. The electrode exhibits a Nernstian response for $Ag^+$ over a wide concentration range ($1.0{\times}10^{-1}-8.0{\times}10^{-6}$M) with a slope of 58.2 {\pm}$ 0.5 mV per decade. The limit of detection of the sensor is $5.0{\times}10^{-6}$M. The sensor has a very fast response time (~5 s) in the concentration range of ${\leq}=1.0{\times}10^{-3}$ M, and a useful working pH range of 4.0-9.5. The proposed sensor displays excellent discriminating ability toward $Ag^+$ ion with respect to common alkali, alkaline earth, transition and heavy metal ions. It was used as an indicator electrode in potentiometric titration of $Ag^+$ with EDTA and in direct determination of silver ion in wastewater of silver electroplating.

• 센서학회지
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• 제15권1호
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• pp.65-70
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• 2006

Characteristics of thin-film NTC thermal sensors fabricated by micromachining technology were studied as a function of the thickness of membrane. The overall-structure of thermal sensor has a form of Au/Ti/NTC/$SiO_{X}$/(100)Si. NTC film of $Mn_{1.5}CoNi_{0.5}O_{4}$ with 0.5 mm in thickness was deposited on $SiO_{X}$ layer (1.2 mm) by PLD (pulsed laser deposition) and annealed at 873-1073 K in air for 1 hour. Au(200 nm)/Ti(100 nm) electrode was coated on NTC film by dc sputtering. By the results of microstructure, X-ray and NTC analysis, post-annealed NTC films at 973 K for 1 hour showed the best characteristics as NTC thermal sensing film. In order to reduce the thermal mass and thermal time constant of sensor, the sensing element was built-up on a thin membrane with the thickness of 20-65 mm. Sensors with thin sensing membrane showed the good detecting characteristics.

• Bulletin of the Korean Chemical Society
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• 제34권10호
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• pp.3088-3092
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• 2013

A novel PVC membrane sensor for perindopril based on perindopril-phosphotungstate ion pair complex was prepared. The influence of membrane composition (i.e. percent of PVC, plasticizer, ion-pair complex, and kind of plasticizer), inner solution, pH of test solution and foreign cations on the electrode performance was investigated. The optimized membrane demonstrates Nernstian response ($30.9{\pm}1.0$ mV per decade) for perindopril cations over a wide linear range from $9.0{\times}10^{-7}$ to $1{\times}10^{-2}$ M at $25^{\circ}C$. The potentiometric response is independent of the pH in the range of 4.0-9.5. The proposed sensor has the advantages of easy preparation, fast response time. The selectivity coefficients indicate excellent selectivity for perindopril over many common cations (e.g., $Na^+$, $K^+$, $Mg^{2+}$, $Cu^{2+}$, $Ni^{2+}$, rhamnose, maltose, glycine and benzamide. The practical applications of this electrode was demonstrated by measuring the concentrations of perindopril in pure solutions and pharmaceutical preparations with satisfactory results.

• Bulletin of the Korean Chemical Society
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• 제26권6호
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• pp.882-886
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• 2005

Copper(II) ion-selective PVC membrane electrode based on 2-mercaptobenzoxazole as a new ionophore and o-nitrophenyl octyl ether (o-NPOE) as plasticizer is proposed. This electrode revealed good selectivity for $Cu^{2+}$ over a wide variety of other metal ions. Effects of experimental parameters such as membrane composition, nature and amount of plasticizer, and concentration of internal solution on the potential response of $Cu^{2+}$ sensor were investigated. The electrode exhibits good response for $Cu^{2+}$ in a wide linear range of 5.0 ${\times}$ 10−.6-1.6 ${\times}$ $10^{-2}$ mol/L with a slope of 29.2 ${\pm}$ 2.0 mV/decade. The response time of the sensor is less than 10 s, and the detection limit is 2.0 ${\times}$ $10^{-6}$ mol/L. The electrode response was stable in pH range of 4-6. The lifetime of the electrode was about 2 months. The electrode revealed comparatively good selectivities with respect to many alkali, alkaline earth, and transition metal ions.