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http://dx.doi.org/10.5369/JSST.2006.15.1.065

Fabrication and characteristic of thin-film NTC thermal sensors  

Yoo, Mi-Na (Yeungnam University, Lifelong Education Center)
Lee, Moon-Ho (Yeungnam University, Department of Materials Science and Engineering)
Yu, Jae-Yong (Daegu Mirae College, Department of Automobile)
Publication Information
Journal of Sensor Science and Technology / v.15, no.1, 2006 , pp. 65-70 More about this Journal
Abstract
Characteristics of thin-film NTC thermal sensors fabricated by micromachining technology were studied as a function of the thickness of membrane. The overall-structure of thermal sensor has a form of Au/Ti/NTC/$SiO_{X}$/(100)Si. NTC film of $Mn_{1.5}CoNi_{0.5}O_{4}$ with 0.5 mm in thickness was deposited on $SiO_{X}$ layer (1.2 mm) by PLD (pulsed laser deposition) and annealed at 873-1073 K in air for 1 hour. Au(200 nm)/Ti(100 nm) electrode was coated on NTC film by dc sputtering. By the results of microstructure, X-ray and NTC analysis, post-annealed NTC films at 973 K for 1 hour showed the best characteristics as NTC thermal sensing film. In order to reduce the thermal mass and thermal time constant of sensor, the sensing element was built-up on a thin membrane with the thickness of 20-65 mm. Sensors with thin sensing membrane showed the good detecting characteristics.
Keywords
thin-film; NTC(Negative Temperature Coefficient); membrane;
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Times Cited By KSCI : 2  (Citation Analysis)
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