Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Fabrication and characteristic of thin-film NTC thermal sensors

박막형 NTC 열형 센서의 제작 및 특성 평가

  • Yoo, Mi-Na (Yeungnam University, Lifelong Education Center) ;
  • Lee, Moon-Ho (Yeungnam University, Department of Materials Science and Engineering) ;
  • Yu, Jae-Yong (Daegu Mirae College, Department of Automobile)
  • 유미나 (영남대학교 평생교육원) ;
  • 이문호 (영남대학교 신소재공학부) ;
  • 유재용 (대구미래대학 자동차과)
  • Published : 2006.01.31
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Abstract

Characteristics of thin-film NTC thermal sensors fabricated by micromachining technology were studied as a function of the thickness of membrane. The overall-structure of thermal sensor has a form of Au/Ti/NTC/$SiO_{X}$/(100)Si. NTC film of $Mn_{1.5}CoNi_{0.5}O_{4}$ with 0.5 mm in thickness was deposited on $SiO_{X}$ layer (1.2 mm) by PLD (pulsed laser deposition) and annealed at 873-1073 K in air for 1 hour. Au(200 nm)/Ti(100 nm) electrode was coated on NTC film by dc sputtering. By the results of microstructure, X-ray and NTC analysis, post-annealed NTC films at 973 K for 1 hour showed the best characteristics as NTC thermal sensing film. In order to reduce the thermal mass and thermal time constant of sensor, the sensing element was built-up on a thin membrane with the thickness of 20-65 mm. Sensors with thin sensing membrane showed the good detecting characteristics.

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References

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