• Title/Summary/Keyword: MOS device

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Hot-Carrier Induced Degradation in Submicron MOS Transistor (Submicron MOSTransistor에서 Hot-Carrier에 의한 열화현상의 연구)

  • Choi, Byung-Jin;Kang, Kwang-Nham
    • Proceedings of the KIEE Conference
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    • 1987.07a
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    • pp.469-472
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    • 1987
  • The hot-carrier induced degradation in very short-channel MOSFET was studied systematically. Under the traditional DC stress conditions, the threshold voltage shift (${\Delta}Vt$) and the transconductance degradation (${\Delta}Gm$/(Gmo-${\Delta}Gm$)) were confirmed to depend exponentially on the stress time and the dependency between the two parameters was proved to be linear. And the degradation due to the DC stress across gate and drain was studied. As the AC dynamic process is more realistic in actual device operation, the effects of dynamic stresses were studied.

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Morphological and Electrical Characteristics of nc-ZnO/ZnO Thin Films Fabricated by Spray-pyrolysis for Field-effect Transistor Application (전계효과트랜지스터 기반 반도체 소자 응용을 위한 스프레이 공정을 이용한 nc-ZnO/ZnO 박막 제작 및 특성 분석)

  • Cho, Junhee
    • Journal of the Semiconductor & Display Technology
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    • v.20 no.4
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    • pp.1-5
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    • 2021
  • Field-effect transistors based on solution-processed metal oxide semiconductors has attracted huge attention due to their intrinsic characteristics of optical and electrical characteristics with benefits of simple and low-cost process. Especially, spray-pyrolysis has shown excellent device performance which compatible to vacuum-processed Field-effect transistors. However, the high annealing temperature for crystallization of MOS and narrow range of precursors has impeded the progress of the technology. Here, we demonstrated the nc-ZnO/ZnO films performed by spray-pyrolysis with incorporating ZnO nanoparticles into typical ZnO precursor. The films exhibit preserving morphological properties of poly-crystalline ZnO and enhanced electrical characteristics with potential for low-temperature processability. The influence of nanoparticles within the film was also researched for realizing ZnO films providing good quality of performance.

Characterization of Gate Oxides with a Chlorine Incorporated $SiO_2/Si$ Interface (염소(Chlorine)가 도입된 $SiO_2/Si$ 계면을 가지는 게이트 산화막의 특성 분석)

  • Yu, Byoung-Gon;Lyu, Jong-Son;Roh, Tae-Moon;Nam, Kee-Soo
    • Journal of the Korean Vacuum Society
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    • v.2 no.2
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    • pp.188-198
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    • 1993
  • We have developed a technique for growing thin oxides (6~10 nm) by the Last step TCA method. N-channel metal-oxide-semiconductor (n-MOS) capacitor and n-channel metal-oxide-semiconductor field-effect transistor's (MOSFET's) having a gate oxide with chlorine incorporated $SiO_2/Si$ interface have been analyzed by electrical measurements and physical methods, such as secondary ion mass spectrometry (SIMS) and electron spectroscopy for chemical analysis (ESCA). The gate oxide grown with the Last strp TCA method has good characteristics as follows: the electron mobility of the MOSFET's with the Last step TCA method was increased by about 7% and the defect density at the $SiO_2/Si$ interface decreases slightly compared with that with No TCA method. In reliability estimation, the breakdown field was 18 MV/cm, 0.6 MV/cm higher than that of the gate oxide with No TCA method, and the lifetime estimated by TDDB measurement was longer than 20 years. The device lifetime estimated from hot-carrier reliability was proven to be enhanced. As the results, the gate oxide having a $SiO_2/Si$ interface incorporated with chlorine has good characteristics. Our new technique of Last step TCA method may be used to improve the endurance and retention of MOSFET's and to alleviate the degradation of thin oxides in short-channel MOS devices.

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Salient Region Detection Algorithm for Music Video Browsing (뮤직비디오 브라우징을 위한 중요 구간 검출 알고리즘)

  • Kim, Hyoung-Gook;Shin, Dong
    • The Journal of the Acoustical Society of Korea
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    • v.28 no.2
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    • pp.112-118
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    • 2009
  • This paper proposes a rapid detection algorithm of a salient region for music video browsing system, which can be applied to mobile device and digital video recorder (DVR). The input music video is decomposed into the music and video tracks. For the music track, the music highlight including musical chorus is detected based on structure analysis using energy-based peak position detection. Using the emotional models generated by SVM-AdaBoost learning algorithm, the music signal of the music videos is classified into one of the predefined emotional classes of the music automatically. For the video track, the face scene including the singer or actor/actress is detected based on a boosted cascade of simple features. Finally, the salient region is generated based on the alignment of boundaries of the music highlight and the visual face scene. First, the users select their favorite music videos from various music videos in the mobile devices or DVR with the information of a music video's emotion and thereafter they can browse the salient region with a length of 30-seconds using the proposed algorithm quickly. A mean opinion score (MOS) test with a database of 200 music videos is conducted to compare the detected salient region with the predefined manual part. The MOS test results show that the detected salient region using the proposed method performed much better than the predefined manual part without audiovisual processing.

Study of Al Doping Effect on HfO2 Dielectric Thin Film Using PEALD (PEALD를 이용한 HfO2 유전박막의 Al 도핑 효과 연구)

  • Min Jung Oh;Ji Na Song;Seul Gi Kang;Bo Joong Kim;Chang-Bun Yoon
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.36 no.2
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    • pp.125-128
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    • 2023
  • Recently, as the process of the MOS device becomes more detailed, and the degree of integration thereof increases, many problems such as leakage current due to an increase in electron tunneling due to the thickness of SiO2 used as a gate oxide have occurred. In order to overcome the limitation of SiO2, many studies have been conducted on HfO2 that has a thermodynamic stability with silicon during processing, has a higher dielectric constant than SiO2, and has an appropriate band gap. In this study, HfO2, which is attracting attention in various fields, was doped with Al and the change in properties according to its concentration was studied. Al-doped HfO2 thin film was deposited using Plasma Enhanced Atomic Layer Deposition (PEALD), and the structural and electrical characteristics of the fabricated MIM device were evaluated. The results of this study are expected to make an essential cornerstone in the future field of next-generation semiconductor device materials.

The design of the high efficiency DC-DC Converter with Dynamic Threshold MOS switch (Dynamic Threshold MOS 스위치를 사용한 고효율 DC-DC Converter 설계)

  • Ha, Ka-San;Koo, Yong-Seo;Son, Jung-Man;Kwon, Jong-Ki;Jung, Jun-Mo
    • Journal of IKEEE
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    • v.12 no.3
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    • pp.176-183
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    • 2008
  • The high efficiency power management IC(PMIC) with DTMOS(Dynamic Threshold voltage MOSFET) switching device is proposed in this paper. PMIC is controlled with PWM control method in order to have high power efficiency at high current level. DTMOS with low on-resistance is designed to decrease conduction loss. The control parts in Buck converter, that is, PWM control circuits consist of a saw-tooth generator, a band-gap reference circuit, an error amplifier and a comparator circuit as a block. The Saw-tooth generator is made to have 1.2 MHz oscillation frequency and full range of output swing from ground to supply voltage(VDD:3.3V). The comparator is designed with two stage OP amplifier. And the error amplifier has 70dB DC gain and $64^{\circ}$ phase margin. DC-DC converter, based on Voltage-mode PWM control circuits and low on-resistance switching device, achieved the high efficiency near 95% at 100mA output current. And DC-DC converter is designed with LDO in stand-by mode which fewer than 1mA for high efficiency.

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OFD(Over Flow Drain) pixel architecture design of the CIS which has wide dynamic range with a CMOS process (넓은 동적 범위를 가지는 CMOS Image Sensors OFD(Over Flow Drain) 픽셀 설계)

  • Kim, Jin-Su;Kwon, Bo-Min;Jung, Jin-Woo;Park, Ju-Hong;Kim, Jong-Min;Lee, Je-Won;Kim, Nam-Tae;Song, Han-Jung
    • Journal of Sensor Science and Technology
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    • v.18 no.1
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    • pp.77-85
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    • 2009
  • We propose a new image pixel architecture which has OFD(Over Flow Device) node by improving conventional 3TR pixel structure. Newly designed pixel consists of photo diode which is verified with HSPICE simulation, PMOS reset transistor, several NMOS and several PMOS transistors. Photodiode signals from each PMOS and NMOS are detected by Reset PMOS. These output signals give enough chances to detect wide operation coverage because OFD node has overflow photocurrent. According to various light intensity, we analyzed characteristic of the output voltage with a SPICE tool. Proposed pixel output has specific value which can detect possible from $0.1{\mu}W/cm^2$ to $10W/cm^2$ light intensity. It has wide-dynamic range of 160 dB.

Characterization and Comparison of Doping Concentration in Field Ring Area for Commercial Vertical MOSFET on 8" Si Wafer (8인치 Si Power MOSFET Field Ring 영역의 도핑농도 변화에 따른 전기적 특성 비교에 관한 연구)

  • Kim, Gwon Je;Kang, Ye Hwan;Kwon, Young-Soo
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.26 no.4
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    • pp.271-274
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    • 2013
  • Power Metal Oxide Semiconductor Field Effect Transistor's (MOSFETs) are well known for superior switching speed, and they require very little gate drive power because of the insulated gate. In these respects, power MOSFETs approach the characteristics of an "ideal switch". The main drawback is on-resistance RDS(on) and its strong positive temperature coefficient. While this process has been driven by market place competition with operating parameters determined by products, manufacturing technology innovations that have not necessarily followed such a consistent path have enabled it. This treatise briefly examines metal oxide semiconductor (MOS) device characteristics and elucidates important future issues which semiconductor technologists face as they attempt to continue the rate of progress to the identified terminus of the technology shrink path in about 2020. We could find at the electrical property as variation p base dose. Ultimately, its ON state voltage drop was enhanced also shrink chip size. To obtain an optimized parameter and design, we have simulated over 500 V Field ring using 8 Field rings. Field ring width was $3{\mu}m$ and P base dose was $1e15cm^2$. Also the numerical multiple $2.52cm^2$ was obtained which indicates the doping limit of the original device. We have simulated diffusion condition was split from $1,150^{\circ}C$ to $1,200^{\circ}C$. And then $1,150^{\circ}C$ diffusion time was best condition for break down voltage.

Development of SiGe Heterostructure Epitaxial Growth and Device Fabrication Technology using Reduced Pressure Chemical Vapor Deposition (저압화학증착을 이용한 실리콘-게르마늄 이종접합구조의 에피성장과 소자제작 기술 개발)

  • Shim, K.H;Kim, S.H;Song, Y.J;Lee, N.E;Lim, J.W;Kang, J.Y
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.18 no.4
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    • pp.285-296
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    • 2005
  • Reduced pressure chemical vapor deposition technology has been used to study SiGe heterostructure epitaxy and device issues, including SiGe relaxed buffers, proper control of Ge component and crystalline defects, two dimensional delta doping, and their influence on electrical properties of devices. From experiments, 2D profiles of B and P presented FWHM of 5 nm and 20 nm, respectively, and doses in 5×10/sup 11/ ∼ 3×10/sup 14/ ㎝/sup -2/ range. The results could be employed to fabricate SiGe/Si heterostructure field effect transistors with both Schottky contact and MOS structure for gate electrodes. I-V characteristics of 2D P-doped HFETs revealed normal behavior except the detrimental effect of crystalline defects created at SiGe/Si interfaces due to stress relaxation. On the contrary, sharp B-doping technology resulted in significant improvement in DC performance by 20-30 % in transconductance and short channel effect of SiGe HMOS. High peak concentration and mobility in 2D-doped SiGe heterostructures accompanied by remarkable improvements of electrical property illustrate feasible use for nano-sale FETs and integrated circuits for radio frequency wireless communication in particular.

Study on 40 nm Electron Beam Patterning by Optimization of Digitizing Method and Post Exposure Bake (전자선 석판 기술에서 디지타이징과 노광후굽기 최적화를 통한 40 nm 급 패턴 제작에 관한 연구)

  • Han, Sang-Yeon;Shin, Hyung-Cheol;Lee, Kwy-Ro
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.36D no.10
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    • pp.23-30
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    • 1999
  • We experimented on the sub 50nm patterning using E-beam lithography system. SAL601 negative E-beam resist was used for this experiment. In order to utilize the maximum ability of E-beam system, firstly, we reduced the PR thickness to 100nm, and the field size to 200 ${um}m$. Then PEB (Post Expose Bake) time/temperature, which is one of the very important factors when SAL601 is used, were reduced for minimum line width. In addition, digitizing is optimized for better results. Quantum wire and quantum dot which can be used for nanoscale memory device, such as single electron memory device, are fabricated using these developed lithography techniques.

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