• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.1902-1907
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• 2008

The current work presents a design and fabrication technique for a microchannel system to measure the local temperature distribution inside microchannel. This micro channel system fabricated by MEMS technique is integrated with a heater and an array of temperature sensors so that detailed heat transfer phenomena inside micro-scale channel can be studied. Materials widely used in semiconductor process were selected to fabricate a heater and temperature sensors on a silicon wafer. On these heater and sensors a channel wall was fabricated with SU-8. The friction constant and the local Nusselt number distribution measured for the deionized water flow in the microchannel is presented.

• 대한기계학회논문집A
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• 제28권9호
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• pp.1297-1305
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• 2004

Reliability of MEMS devices is receiving more attention as they are heading towards commercial production. In particular are the reliability and long-term stability of wafer level vacuum packaged MEMS gyroscope sensors subjected to cyclic mechanical stresses at high frequencies. In this study, we carried out several reliability tests such as environmental storage, fatigue, shock, and vibration, and we investigated the failure mechanisms of the anodically bonded vacuum gyroscope sensors. It was found that successful vacuum packaging could be achieved through reducing outgassing inside the cavity by deposition of titanium as well as by pre-taking process. The current gyroscope structure is found to be safe from fatigue failure for 1000 hours of operation test. The gyroscope sensor survives the drop and vibration tests without any damage, indicating robustness of the sensor. The reliability test results presented in this study demonstrate that MEMS gyroscope sensor is very close to commercialization.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2007년도 춘계학술대회논문집
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• pp.448-452
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• 2007

Many industrial operations require continuous or nearly-continuous operation of machines, which if interrupted can result in significant financial loss. The condition monitoring of these machines has received considerable attention recent years. Rapid developments in semiconductor, computing, and communication with a remote site have led to a new generation of sensor called "smart" sensors which are capable of wireless communication with a remote site. The purpose of this research is the development of smart sensor using which can on-line perform condition monitoring. This system is addressed to detect conditions that may lead to equipment failure when it is running. Moreover it will reduce condition monitoring expense using low cost MEMS accelerometer. This sensor can receive data in real-time or periodic time from MEMS accelerometer. Furthermore, this system is capable for signal preprocessing task (High Pass Filter, Low Pass Filter and Gain Amplifier) and analog to digital converter (A/D) which is controlled by CPU. A/D converter that converts 10bit digital data is used. This sensor communicates with a remote site PC using TCP/IP protocols. Wireless LAN contain IEEE 802.11i-PSK or WPA (PSK, TKIP) encryption. Developed sensor executes performance tests for data acquisition accuracy estimations.

• 한국항공우주학회지
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• 제34권8호
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• pp.63-70
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• 2006

초소형 비행체는 초소형, 초경량이기 때문에 매우 작고 가벼운 MEMS형 센서만이 초소형 비행체 자동 비행 장치에 적용될 수 있다. 본 논문에서는 이러한 MEMS 형 관성센서의 항법 성능을 향상시키기 위해 가속도계와 자이로를 혼합하는 알고리즘으로 자세 비교 보상을 이용한 혼합 방법을 제시하고 기존의 퍼지 추정을 이용한 혼합 방법과 시뮬레이션을 통해 성능을 비교한다. 이를 통하여 자세 비교 보상 방법을 이용한 혼합 방법이 기존의 퍼지를 기반으로 하는 혼합 방법보다 초소형 비행체 자세 추정에 보다 더 우수한 성능을 가짐을 보인다.

• 한국공간구조학회논문집
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• 제18권4호
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• pp.49-59
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• 2018

Wireless sensors are more favorable in measuring structural response compared to conventional sensors. This is because they are easier to use with no issues with cables and are considerably cheaper. There are several applications that can be used in recording and analyzing data from MEMS sensor installed on an iPhone. The Vibration App is one of the applications used and there has not been adequate research conducted in analyzing the performance of this App. This paper analyzed the performance of the Vibration App by comparing it with the performance of an ICP sensor. Results show that natural frequency results are more accurate (error less than 5%) in comparison to the amplitude results. This means that built- in MEMS sensor in smartphones are good at estimating natural frequency of structures. In addition, it was seen that the results became more accurate at higher frequencies (5.0Hz and 10.0Hz).

• 한국전산구조공학회논문집
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• 제26권4호
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• pp.271-274
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• 2013

경사계 센서는 여러분야에서 널리 적용되고 있는 센서 중의 하나이다. 특히 건축분야에서는 초고층 건물의 수직도와 수평도를 계측하고 모니터링하는데 적용되어 왔다. 최근 미소전기기계 시스템(MEMS: Micro Electro-Mechanical System)기술의 발달로 인해 많은 센서들이 개발되었다. 본 논문에서 논하고자 하는 MEMS형 경사계는 MEMS형 가속도계를 기반으로 한다. 정지한 상태에서 가속도계로 계측되는 정적 가속도와 중력가속도 사이의 관계를 이용하면 센서에 발생하는 경사를 계측할 수 있기 때문이다. 이러한 원리 때문에 좀 더 정확하고 이점을 갖는 경사계가 개발되었다. 보 실험을 통하여서 레이저 변위계와의 차이를 검증하였다. 실험결과 무선 MEMS형 경사계 센서 시스템은 높은 정확도, 안정성, 장기모니터링에 대한 경제성을 갖는 유용한 시스템임을 확인할 수 있었다. 결론적으로 무선 MEMS형 경사계 센서 시스템은 건축분야에서 그리고 다른 여러 산업분야에서 정확하고 편리한 모니터링 시스템으로 적용될 수 있을 것으로 판단된다.

• 한국전기전자재료학회논문지
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• 제23권4호
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• pp.317-322
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• 2010

This paper reports the fabrication and characterization of surface micromachined poly 3C-SiC capacitive pressure sensors on silicon wafer operable in touch mode and normal mode for high temperature applications. FEM(finite elements method) simulation has been performed to verify the analytical mode. The sensing capacitor of the capacitive pressure sensor is composed of the upper metal and the poly 3C-SiC layer. Measurements have been performed in a temperature range from $25^{\circ}C$ to $500^{\circ}C$. Fabrication process of designed poly 3C-SiC touch mode capacitive pressure sensor was optimized and would be applicable to capacitive pressure sensors that are required high precision and sensitivity at high pressure and temperature.

• 센서학회지
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• 제20권1호
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• pp.40-45
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• 2011

Microcantilevers have been actively used in probe-based microscopy and gravimetric sensing for biological or chemical analytes. To integrate actuation or detection schemes in the structure, typical fabrication processes include several photolithographic steps along with conventional MEMS fabrication. In this paper, a simple and straightforward way to fabricate and operate silicon microcantilever mass sensors is presented. The fabricated microcantilever sensors which can be electrostatically actuated require only two photolithographic steps. Resonant characteristics of fabricated microcantilevers are measured with a custom optical-lever and results show size-dependent quality factors. Using a $40\;{\mu}m$ long, $7\;{\mu}m$ wide, and $3\;{\mu}m$ thick cantilever, we achieved subfemtogram mass resolution in a 1 Hz bandwidth.

• 정보보호학회논문지
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• 제31권3호
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• pp.411-422
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• 2021

무인이동체에 탑재되는 자율주행 시스템은 여러 센서를 통해 외부 환경을 인식하고 이를 통해 최적의 제어값을 도출한다. 무인이동체의 자율주행 시스템은 최근들어 사이버공격의 타겟이 되고 있다. 예를 들어, 무인이동체의 센서를 대상으로 신호오류 주입공격을 수행함으로써 센서 데이터를 악의적으로 조작하는 PHY 레벨 (Physical level) 공격과 관련한 연구 결과들이 발표되고 있다. PHY 레벨에서 수행되는 신호오류 주입공격은 주변 환경에 물리적 조작을 가하여 센서가 잘못된 데이터를 측정하게 하므로 소프트웨어 레벨에서 공격을 탐지하기 어렵다는 특징을 갖고 있다. 신호오류 주입공격을 탐지하기 위해서는 센서가 측정하는 데이터의 신뢰성을 검증하는 과정이 필요하다. 현재까지 자율주행 시스템에 탑재되는 센서들을 대상으로 PHY 레벨 공격을 시도하는 다양한 방법이 제시되었으나 이를 탐지하고 방어하는 연구는 아직까지는 부족한 상황이다. 본 논문에서는 무인이동체 환경에서 널리 쓰이고 있는 MEMS 방식의 센서를 대상으로 신호오류 주입공격을 재연하고, 이러한 공격을 탐지하는 방법을 제안한다. 제안하는 방법의 정확도를 분석하기 위해서 신호오류 주입 탐지 모델을 구축하였으며, 실험실 환경에서 유효성을 검증하였다.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2004년도 ICCAS
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• pp.592-595
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• 2004

This paper presents a study on the development of a multi-sensing inertial sensor with a single mechanical structure, which can be used both as a gyroscope and an accelerometer. The proposed MEMS gyro-accelerometer is designed to detect the angular rate and the acceleration at the same time using two separate detection circuits for one proof mass. In this study, the detection and signal processing circuit for an effective signal processing of different inertial measurements is designed, fabricated, and tested. The experimental results show that the performances of the gyro-accelerometer have resolutions of 1mg and 0.025deg/sec and nonlinearities of less than 0.5% for the accelerometer and the gyroscope, respectively, which are similar results with those of sensors with different structures and different detection circuits. The size of the sensor is reduced almost by 50% comparing with the sensors of separated proof mass.