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http://dx.doi.org/10.4313/JKEM.2010.23.4.317

Characteristics of Surface Micromachined Capacitive Pressure Sensors for High Temperature Applications  

Seo, Jeong-Hwan (대양전기공업(주) 연구소)
Noh, Sang-Soo (대양전기공업(주) 연구소)
Kim, Kwang-Ho (부산대학교 재료공학부)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.23, no.4, 2010 , pp. 317-322 More about this Journal
Abstract
This paper reports the fabrication and characterization of surface micromachined poly 3C-SiC capacitive pressure sensors on silicon wafer operable in touch mode and normal mode for high temperature applications. FEM(finite elements method) simulation has been performed to verify the analytical mode. The sensing capacitor of the capacitive pressure sensor is composed of the upper metal and the poly 3C-SiC layer. Measurements have been performed in a temperature range from $25^{\circ}C$ to $500^{\circ}C$. Fabrication process of designed poly 3C-SiC touch mode capacitive pressure sensor was optimized and would be applicable to capacitive pressure sensors that are required high precision and sensitivity at high pressure and temperature.
Keywords
Poly 3C-SiC; Capacitive pressure sensors; Surface MEMS; FEM;
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