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http://dx.doi.org/10.5369/JSST.2011.20.1.40

Fabrication and Characterization of Electrostatically Actuated Microcantilever Mass Sensors  

Lee, Jung-Chul (Department of Mechanical Engineering, Sogang University)
Choi, Bum-Kyoo (Department of Mechanical Engineering, Sogang University)
Publication Information
Journal of Sensor Science and Technology / v.20, no.1, 2011 , pp. 40-45 More about this Journal
Abstract
Microcantilevers have been actively used in probe-based microscopy and gravimetric sensing for biological or chemical analytes. To integrate actuation or detection schemes in the structure, typical fabrication processes include several photolithographic steps along with conventional MEMS fabrication. In this paper, a simple and straightforward way to fabricate and operate silicon microcantilever mass sensors is presented. The fabricated microcantilever sensors which can be electrostatically actuated require only two photolithographic steps. Resonant characteristics of fabricated microcantilevers are measured with a custom optical-lever and results show size-dependent quality factors. Using a $40\;{\mu}m$ long, $7\;{\mu}m$ wide, and $3\;{\mu}m$ thick cantilever, we achieved subfemtogram mass resolution in a 1 Hz bandwidth.
Keywords
MEMS; Microcantilever; Electrostatic Actuation; Optical-Lever;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
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1 Y. Lee, G. Lim, and W. Moon, “A piezoelectric microcantilever bio-sensor using the mass-micro-balancing technique with self-excitation”, Microsyst. Technol. 13, pp. 563-567, 2007.   DOI
2 J. L. Hutter, and J. Bechhoefer, “Calibration of atomicforce microscope tips”, Rev. Sci. Instrum., vol. 64, p. 1868, 1993.   DOI   ScienceOn
3 G. Y. Chen, R. J. Warmack, T. Thundat, D. P. Allison, and A. Huang, “Resonance response of scanning force microscopy cantilevers”, Rev. Sci. Instrum., vol. 65, p. 2532, 1994.   DOI   ScienceOn
4 DongWeon Lee, “A micromachined cantilever for chemically sensitive scanning force microscope applications”, J. Kor. Sensors Soc, vol. 14, no. 1, pp. 1-6, 2005.   과학기술학회마을   DOI   ScienceOn
5 Huihun Jung, Jinsung Park, Jaemoon Yang, Sang Woo Lee, Kilho Eom, Taeyun Kwon, and Dae Sung Yoon, “Study on the chemical environment for conformational change of i-motif DNA by atomic force microscopy cantilever”, J. Kor. Sensors Soc., vol. 19, no. 3, pp. 214-220, 2010.   과학기술학회마을   DOI
6 G. Binnig, C. F. Quate, and C. Gerber, “Atomic force microscope”, Phys. Rev. Lett., vol. 56, pp. 930-933, 1986.   DOI   ScienceOn
7 B. llic, D. Czaplewski, M. Zalalutdinov, H. G. Craighead, P. Neuzil, C. Campagnolo, and C. Batt, “Single cell detection with micromechanical oscillators”, J. Vac. Sci. Technol. B, vol. 19, 2825, 2001.   DOI   ScienceOn
8 B. Rogers, L. Manning, M. Jones, T. Sulchek, K. Murray, B. Beneschott, J. D. Adams, Z. Hu, T. Thundat, H. Cavazos, and S. C. Minne, "Mercury vapor detection with a self-sensing, resonating piezoelectric cantilever", Rev. Sci. Instrum., vol. 74, p. 4899, 2003.   DOI   ScienceOn