• Journal of the Institute of Electronics and Information Engineers
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• v.51 no.6
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• pp.78-86
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• 2014

In this paper, a novel intensity-based fiber optic vibration sensor using a mass-spring structure, which consists of four serpentine flexure springs and a rectangular aperture within a proof mass, is proposed and its feasibility test is given by the simulation and experiment. An optical collimator is used to broaden the beam which is modulated by the displacement of the rectangular aperture within the proof mass. The proposed fiber optic vibration sensor has been analyzed and designed in terms of the optical and mechanical parts. A mechanical structure has been designed using theoretical analysis, mathematical modeling, and 3D FEM (Finite Element Method) simulation. The relative aperture displacement according to the base vibration is given using FEM simulation, while the output beam power according to the relative displacement is measured by experiment. The simulated sensor sensitivity of $15.731{\mu}W/G$ and detection range of ${\pm}6.087G$ are given. By using reference signal, the output signal with 0.75% relative error shows a good stability. The proposed vibration sensor structure has the advantages of a simple structure, low cost, and multi-point sensing characteristic. It also has the potential to be made by MEMS (Micro-Electro-Mechanical System) technology.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.13 no.3
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• pp.71-78
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• 2013

In this paper, we propose a method to infer the user's behavior and situation through collected data from multi-sensor equipped with a smart clothing and it was implemented as a smartphone App. User context reasoning and behavior determine is very difficult using single sensor depending on the measured value of the sensor varies from environmental noise. So, the reasoning and the digital filter algorithms to determine user behavior reducing noise and are required. In this paper, we used EWMA, Kalman Filter and SVM processing behavior for 3-axis value as a representative value of one.

• Journal of Sensor Science and Technology
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• v.21 no.6
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• pp.402-407
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• 2012

We report a Fabry-Perot interferometer (FPI)-based multi-channel micro-spectrometer used for multi-gas measurement in the spectral range of $3-5{\mu}m$ and its gas sensing performance. The fabricated infrared (IR) spectrometer consists of two parts: an FPI on the top side for selective IR filtering and a $V_2O_5$-based IR detector array on the bottom side for the detection of the filtered IR. Experimental results show that the FPI-based multi-channel gas sensor has reliability and selectivity for simultaneously detecting environmentally harmful gases such as $CH_4$, $CO_2$, $N_2O$ and CO in the spectral range of $3-5{\mu}m$. The fabricated FPI-based multi-channel gas sensor also demonstrated that a reliable and selective detection of gas concentrations ranging from 0 to 500 ppm is feasible. In addition, the electrical characteristics demonstrate a superior response performance in regards to the selectivity in the multi-target gases.

• Proceedings of the KIEE Conference
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• 2005.10b
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• pp.264-266
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• 2005

Recently, on-line diagnosis methods through wired and wireless networks are widely adopted in the diagnosis of industrial Electric Facilities, such as generators, transformers and motors. Also smart sensors which includes sensors, signal conditioning circuits and micro-controller in one board are widely studied in the field of condition monitoring. This paper suggests an self-powered system suitable for condition-monitoring smart sensors, which uses parasitic vibrations of the facilities as energy source. First, vibration-driven noise patterns of the electric facilities are presented. And then, an electromagnetic generator which uses mechanical mass-spring vibration resonance are suggested and designed. Finally energy consumption of the presented smart sensor, which consists of MEMS vibration sensors, signal conditioning circuits, a low-power consumption micro-controller, and a ZIGBEE wireless tranceiver, are presented. The usefulness and limits of the presented electromagnetic generators in the field of electric facility monitoring are also suggested.

• Journal of Sensor Science and Technology
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• v.18 no.2
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• pp.147-153
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• 2009

A thermal flow sensor has been fabricated and characterized, consisting of a center resistive heater surrounded by two upstream and one downstream temperature sensing resistors. The heater and temperature sensing resistors are fabricated from nitrogen-doped(n-type) polycrystalline silicon carbide(poly-SiC) deposited by LPCVD(low pressure chemical vapor deposition) on LPCVD silicon nitride films on a Si substrate. Cavities were etched into the Si substrate from the front side to create suspended silicon nitride membranes carrying the poly-SiC elements. One upstream sensor is located $50{\mu}m$ from the heater and has a sensitivity of $0.73{\Omega}$/sccm with ${\sim}15\;ms$ rise time in a dynamic range of 1000 sccm. N-type poly-SiC has a linear negative temperature coefficient and a TCR(temperature coefficient of resistance) of $-1.24{\times}10^{-3}/^{\circ}C$ from room temperature to $100^{\circ}C$.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.24 no.5
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• pp.381-389
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• 2014

This study is concerned with the estimation of vibration-field of a cylindrical structure by modal expansion method(MEM). MEM is a technique that identifies modal participation factors using some of vibration signals and natural modes of the structure: The selection of sensor locations has a big influence on predicted vibration results. Therefore, this paper deals with four optimal sensor placement( OSP) methods, EFI, EFI-DPR, EVP, AutoMAC, for the estimation of vibration field. It also finds optimal sensor locations of the cylindrical structure by each OSP method and then performs MEMs. Predicted vibration results compared with reference ones obtained by forced response analysis. The standard deviations of errors between reference and predicted results were also calculated. It is utilized to select the most suitable OSP method for estimation of vibration field of the cylindrical structure.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.33 no.8
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• pp.573-579
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• 2009

A thermal mass air flow sensor, which consists of a micro-heater and thermal sensors on the silicon-nitride thin membrane structure, is micro-fabricated by MEMS processes. Three thermo-resistive sensors, one for the measurement of microheater temperature, the others for the measurement of membrane temperature upstream and downstream of the micro-heater respectively, are used. The micro-heater is operated under the constant temperature difference mode via a real time controller, based on inlet air temperature. Two design models for microfabricated flow sensor are compared with experimental results and confirmed their applicabilities and limitations. The thermal characteristics are measured to find the best flow indicator. It is found that two normalized temperature indicators can be adopted with some advantages in practice. The flow sensor with this control mode can be adopted for wide capability of high speed and sensitivity in the very low and medium velocity ranges.

• Journal of the Korean Society of Safety
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• v.16 no.2
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• pp.121-129
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• 2001

This paper demonstrates the development of optical temperature sensor based on the etched planar waveguide Bragg grating. Topics include design and fabrication of the etched planar waveguide Bragg grating, investigation of the grating reflection characteristics, and temperature measurement capabilities. The typical bandwidth and reflectivity of the surface etched grating has been ~0.2nm and ~7%, respectively, at a wavelength of ～1552nm. The temperature-induced wavelength change of the optical sensor is found to be slightly non-linear over ～20$0^{\circ}C$ temperature range. Theoretical models for the grating response of the sensor based on waveguide and plate deformation theories agree with experiments to within acceptable tolerance.

• Journal of Sensor Science and Technology
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• v.19 no.3
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• pp.197-201
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• 2010

This paper describes the fabrication and characteristics of a NO sensor using ZnO thin film integrated 3C-SiC micro heater based on polycrystalline 3C-SiC thin film of operation in harsh environments. The sensitivity, response time, and operating properties in high temperature and voltages of NO sensors based SiC MEMS are measured and analyzed. The sensitivity of device with pure ZnO thin film at the heater operating power of 13.5 mW ($300^{\circ}C$) is 0.875 in NO gas concentration of 0.046 ppm. In the case of Pt doping, the sensitivity of at power consumption of 5.9 mW ($250^{\circ}C$) was 1.92 at same gas flow rate. The ZnO with doped Pt was showed higher sensitivity, lower working temperature and faster adsorption characteristics to NO gas than pure ZnO thin film. The NO gas sensor integrated SiC micro heater is more strength than others in high voltage and temperature environments.

• Journal of Biomedical Engineering Research
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• v.37 no.5
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• pp.168-177
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• 2016

In this paper we present an implantable pressure sensor to measure real-time blood pressure by monitoring mechanical movement of artery. Sensor is composed of inductors (L) and capacitors (C) which are formed by microfabrication and direct bonding on two biocompatible substrates (quartz). When electrical potential is applied to the sensor, the inductors and capacitors generates a LC resonance circuit and produce characteristic resonant frequencies. Real-time variation of the resonant frequency is monitored by an external measurement system using inductive coupling. Structural and electrical simulation was performed by Computer Aided Engineering (CAE) programs, ANSYS and HFSS, to optimize geometry of sensor. Ultrafast laser (femto-second) cutting and MEMS process were executed as sensor fabrication methods with consideration of brittleness of the substrate and small radial artery size. After whole fabrication processes, we got sensors of $3mm{\times}15mm{\times}0.5mm$. Resonant frequency of the sensor was around 90 MHz at atmosphere (760 mmHg), and the sensor has good linearity without any hysteresis. Longterm (5 years) stability of the sensor was verified by thermal acceleration testing with Arrhenius model. Moreover, in-vitro cytotoxicity test was done to show biocompatiblity of the sensor and validation of real-time blood pressure measurement was verified with animal test by implant of the sensor. By integration with development of external interrogation system, the proposed sensor system will be a promising method to measure real-time blood pressure.