Browse > Article
http://dx.doi.org/10.5369/JSST.2010.19.3.197

Fabrication of NO sensor integrated SiC micro heaters for harsh environments and its characteristics  

Kim, Kang-San (School of Electrical Eng., University of Ulsan)
Chung, Gwiy-Sang (School of Electrical Eng., University of Ulsan)
Publication Information
Journal of Sensor Science and Technology / v.19, no.3, 2010 , pp. 197-201 More about this Journal
Abstract
This paper describes the fabrication and characteristics of a NO sensor using ZnO thin film integrated 3C-SiC micro heater based on polycrystalline 3C-SiC thin film of operation in harsh environments. The sensitivity, response time, and operating properties in high temperature and voltages of NO sensors based SiC MEMS are measured and analyzed. The sensitivity of device with pure ZnO thin film at the heater operating power of 13.5 mW ($300^{\circ}C$) is 0.875 in NO gas concentration of 0.046 ppm. In the case of Pt doping, the sensitivity of at power consumption of 5.9 mW ($250^{\circ}C$) was 1.92 at same gas flow rate. The ZnO with doped Pt was showed higher sensitivity, lower working temperature and faster adsorption characteristics to NO gas than pure ZnO thin film. The NO gas sensor integrated SiC micro heater is more strength than others in high voltage and temperature environments.
Keywords
NO gas sensor; ZnO; SiC micro heater; harsh environment;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
1 F. Solzbacher, C. Imawan, H. Steffes, E. Obermeier, and M. Eickhoff, “A highly stable SiC based micro-hotplate $NO_2$ gas-sensor”, Sen. Actu. B, vol, 78, pp. 216-220, 2001.   DOI   ScienceOn
2 J. Komiyama, K. Eriguchi, Y. Abe, S. Suzuki, H. Naknishi, T. Yamane, H. Murakami, and A. Koukitu, “Polarities of AlN films and underlying 3C-SiC intermediate layers grown on (111) Si substrates”, J. Cryst. Growth, vol. 310, pp. 96-100, 2008.   DOI   ScienceOn
3 G. S. Chung and J. M. Jeong, “Fabrication of 3C-SiC micro heaters and its characteristics”, J. of the Kor. Sen. Soc., vol. 18, no. 4, pp. 311-315, 2009.   DOI   ScienceOn
4 N. Koshizaki and T. Oyama, “Sensing characteristics of ZnO-based $NO_x$ sensor”, Sen. Actu. B, vol, 66, pp. 119-121, 2000.   DOI   ScienceOn
5 P. K. basu, P. Bhattacharyya, N. Saha, H. Saha, and S. Basu, “The superior performance of the electrochemically grown ZnO thin films as methane sensor”, Sen. Actu. B, vol. 133, pp. 357-363, 2008.   DOI   ScienceOn
6 V. Khatko, J. Calderer, E. Llobet, and X. Correig, “New technology of metal oxide thin film preparation for chemical sensor application”, Sen. Actu. B, vol, 109, pp. 128-134, 2005.   DOI   ScienceOn
7 S. L. Lee, “Fabrication of microsensor for detection of CO and NOx using nanostructures metallic oxide”, Kyungpook national Univ., Doctoral thesis, Daegu, pp. 50-52, 2006.
8 S. C. Navale, V. Ravi, I. S. Mulla, S. W. Gosavi, and S. K. Kulkarni, “Low temperature synthesis and NOx sensing properties of nanostructured Al-doped ZnO”, Sen. Actu. B, vol. 126, pp. 382-386, 2007.   DOI   ScienceOn
9 J. C. Belmonte, J. Puigcorbe, J. Arbiol, A. Vila, J. R. Morante, N. Sabate, I. Gracia, and C. Cane, “High-temperature low-power performing micro-machined suspended micro-hotplate for gas sensing applications”, Sen. Actu. B, vol, 114, pp. 826-935, 2006.   DOI   ScienceOn
10 J. D. Prades, A. Cirera, J. R. Morante, J. M. Pruneda, and P. Ordejon, “Ab initio study of NOx compounds adsorption on $SnO_2$ surface”, Sen. Actu. B, vol. 126, pp. 62-67, 2007.   DOI   ScienceOn
11 M. Ali, Ch. Y. Wang, C. –C. Rohlig, V. Cimalla, Th. Stauden, O. Ambacher, “NOx sensing properties of $In_2O_3$ thin films grown by MOCVD”, Sen. Actu. B, vol. 129, pp. 467-472, 2008.   DOI   ScienceOn
12 D. S. Lee, S. D. Han, Y. M. Son, and D. D. Lee, “Fabrication and NOx sensing characteristics of $WO_3$ based thick film devices doped with $TiO_2$ and noble metals”, J. of the Kor. Sen. Soc., vol. 6, no.4, pp. 274-279, 1997.