Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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A Multi-Channel Gas Sensor Using Fabry-Perot Interferometer-Based Infrared Spectrometer

  • Choi, Ju Chan (Graduate School of Electrical Engineering and Computer Science, IT3-213A, Kyungpook National University) ;
  • Lee, June Kyoo (Graduate School of Electrical Engineering and Computer Science, IT3-213A, Kyungpook National University) ;
  • Kong, Seong Ho (Graduate School of Electrical Engineering and Computer Science, IT3-213A, Kyungpook National University)
  • Received : 2012.06.26
  • Accepted : 2012.09.12
  • Published : 2012.11.30
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Abstract

We report a Fabry-Perot interferometer (FPI)-based multi-channel micro-spectrometer used for multi-gas measurement in the spectral range of $3-5{\mu}m$ and its gas sensing performance. The fabricated infrared (IR) spectrometer consists of two parts: an FPI on the top side for selective IR filtering and a $V_2O_5$-based IR detector array on the bottom side for the detection of the filtered IR. Experimental results show that the FPI-based multi-channel gas sensor has reliability and selectivity for simultaneously detecting environmentally harmful gases such as $CH_4$, $CO_2$, $N_2O$ and CO in the spectral range of $3-5{\mu}m$. The fabricated FPI-based multi-channel gas sensor also demonstrated that a reliable and selective detection of gas concentrations ranging from 0 to 500 ppm is feasible. In addition, the electrical characteristics demonstrate a superior response performance in regards to the selectivity in the multi-target gases.

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References

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