Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
권호 표지
DOI QR코드

DOI QR Code

Fabrication of NO sensor integrated SiC micro heaters for harsh environments and its characteristics

SiC 마이크로 히터가 내장된 극한 환경용 NO 센서의 제작과 특성

  • 김강산 (울산대학교 전기전자정보시스템공학부) ;
  • 정귀상 (울산대학교 전기전자정보시스템공학부)
  • Received : 2010.02.23
  • Accepted : 2010.04.01
  • Published : 2010.05.31
Download PDF
⟨ Previous Next ⟩

Abstract

This paper describes the fabrication and characteristics of a NO sensor using ZnO thin film integrated 3C-SiC micro heater based on polycrystalline 3C-SiC thin film of operation in harsh environments. The sensitivity, response time, and operating properties in high temperature and voltages of NO sensors based SiC MEMS are measured and analyzed. The sensitivity of device with pure ZnO thin film at the heater operating power of 13.5 mW ($300^{\circ}C$) is 0.875 in NO gas concentration of 0.046 ppm. In the case of Pt doping, the sensitivity of at power consumption of 5.9 mW ($250^{\circ}C$) was 1.92 at same gas flow rate. The ZnO with doped Pt was showed higher sensitivity, lower working temperature and faster adsorption characteristics to NO gas than pure ZnO thin film. The NO gas sensor integrated SiC micro heater is more strength than others in high voltage and temperature environments.

Keywords

References

  1. J. C. Belmonte, J. Puigcorbe, J. Arbiol, A. Vila, J. R. Morante, N. Sabate, I. Gracia, and C. Cane, “High-temperature low-power performing micro-machined suspended micro-hotplate for gas sensing applications”, Sen. Actu. B, vol, 114, pp. 826-935, 2006. https://doi.org/10.1016/j.snb.2005.07.057
  2. J. D. Prades, A. Cirera, J. R. Morante, J. M. Pruneda, and P. Ordejon, “Ab initio study of NOx compounds adsorption on $SnO_2$ surface”, Sen. Actu. B, vol. 126, pp. 62-67, 2007. https://doi.org/10.1016/j.snb.2006.10.040
  3. S. C. Navale, V. Ravi, I. S. Mulla, S. W. Gosavi, and S. K. Kulkarni, “Low temperature synthesis and NOx sensing properties of nanostructured Al-doped ZnO”, Sen. Actu. B, vol. 126, pp. 382-386, 2007. https://doi.org/10.1016/j.snb.2007.03.019
  4. M. Ali, Ch. Y. Wang, C. –C. Rohlig, V. Cimalla, Th. Stauden, O. Ambacher, “NOx sensing properties of $In_2O_3$ thin films grown by MOCVD”, Sen. Actu. B, vol. 129, pp. 467-472, 2008. https://doi.org/10.1016/j.snb.2007.08.011
  5. D. S. Lee, S. D. Han, Y. M. Son, and D. D. Lee, “Fabrication and NOx sensing characteristics of $WO_3$ based thick film devices doped with $TiO_2$ and noble metals”, J. of the Kor. Sen. Soc., vol. 6, no.4, pp. 274-279, 1997.
  6. F. Solzbacher, C. Imawan, H. Steffes, E. Obermeier, and M. Eickhoff, “A highly stable SiC based micro-hotplate $NO_2$ gas-sensor”, Sen. Actu. B, vol, 78, pp. 216-220, 2001. https://doi.org/10.1016/S0925-4005(01)00815-2
  7. J. Komiyama, K. Eriguchi, Y. Abe, S. Suzuki, H. Naknishi, T. Yamane, H. Murakami, and A. Koukitu, “Polarities of AlN films and underlying 3C-SiC intermediate layers grown on (111) Si substrates”, J. Cryst. Growth, vol. 310, pp. 96-100, 2008. https://doi.org/10.1016/j.jcrysgro.2007.10.017
  8. G. S. Chung and J. M. Jeong, “Fabrication of 3C-SiC micro heaters and its characteristics”, J. of the Kor. Sen. Soc., vol. 18, no. 4, pp. 311-315, 2009. https://doi.org/10.5369/JSST.2009.18.4.311
  9. N. Koshizaki and T. Oyama, “Sensing characteristics of ZnO-based $NO_x$ sensor”, Sen. Actu. B, vol, 66, pp. 119-121, 2000. https://doi.org/10.1016/S0925-4005(00)00323-3
  10. P. K. basu, P. Bhattacharyya, N. Saha, H. Saha, and S. Basu, “The superior performance of the electrochemically grown ZnO thin films as methane sensor”, Sen. Actu. B, vol. 133, pp. 357-363, 2008. https://doi.org/10.1016/j.snb.2008.02.035
  11. V. Khatko, J. Calderer, E. Llobet, and X. Correig, “New technology of metal oxide thin film preparation for chemical sensor application”, Sen. Actu. B, vol, 109, pp. 128-134, 2005. https://doi.org/10.1016/j.snb.2005.03.073
  12. S. L. Lee, “Fabrication of microsensor for detection of CO and NOx using nanostructures metallic oxide”, Kyungpook national Univ., Doctoral thesis, Daegu, pp. 50-52, 2006.