• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.7
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• pp.1288-1295
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• 2002

The column-type sensing element in building and mechanical construction parts was designed as three forces and three moments sensor by attaching strain gages approximately. Compared to conventional multi-component sensor, the designed sensor has high stiffness and low cost. The radius of the column was designed analytically and compared with finite element analysis. The interference errors between components were minimized by using addition and subtraction procedure of signals. The fabricated sensor was tested by using a deadweight force standard machine and a six-component force calibration machine. The calibration results showed that the 6-component forces and moments sensor had interference error less than 7.3 % between $F_x$ and $M_x$ components, and 5.0 % in case of other components.

• Journal of Information Processing Systems
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• v.10 no.3
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• pp.429-442
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• 2014

In this paper, we investigated the use of seasonal autoregressive integrated moving average (SARIMA) time series models for fault detection in semiconductor etch equipment data. The derivative dynamic time warping algorithm was employed for the synchronization of data. The models were generated using a set of data from healthy runs, and the established models were compared with the experimental runs to find the faulty runs. It has been shown that the SARIMA modeling for this data can detect faults in the etch tool data from the semiconductor industry with an accuracy of 80% and 90% using the parameter-wise error computation and the step-wise error computation, respectively. We found that SARIMA is useful to detect incipient faults in semiconductor fabrication.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.8
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• pp.613-619
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• 1998

Ultrasonic probes of 400kHz, 1MHz were fabricated using PZT-5Z plates. Epoxy was used for backing layer materials onthe plates. Nondestructive Test was carried using these probes. Pulse lobe width of impulse response was reduced 15.4% compare 1MHz with 400kHz and 96.6% compare 3MHz with 400kHz. The attenuation in aluminum was 2.05[dB/m] at 400kHz, 4/91[dB/m] at 1MHz, 7.35[dB/m] at 3HMz. Hole detection error of the first hole was 22.4% at 1HMz, 9.% at 3HMz, The second hole 11.6% at 1HMz, 4.7% at 3HMz. In the result of experiment of the hole detection error and resolution, 3HMz probe was the best among them.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.12 no.2
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• pp.114-120
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• 2013

An EP(Electrolytic Polishing)-MAP(Magnetic Abrasive Polishing) hybrid process was applied to remove burr on the micro pattern. Micro pattern fabrication processes are combined with micro milling and EP-MAP hybrid process for deburring. Depending on the micro milling conditions which are applied, micro burrs are formed around the side and top of the pattern. The EP-MAP deburring is used to remove these burrs effectively. To optimize removal rate and form error in the EP-MAP hybrid process, a design of experiment was performed. The effect of deburring process and form error of micro pattern are evaluated via SEM images and the results of AFM.

• Journal of the Korea Institute of Military Science and Technology
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• v.10 no.3
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• pp.120-128
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• 2007

In order to reduce the lead-time and cost, the technology of rapid prototyping(RP) has been widely used. This paper describes the methodology to fabricate a large object by using the principle of rapid prototyping. By laminating thick and sloping polystyrene foam plates, we can make the large model which has three dimensional, continuous surfaces faster and easier than conventional processes. Estimated error was much smaller than other RP products which have stepped effect. For accuracy improvement and post processing, machined metal plates are added between the thick plates. To keep the continuity of surface and strengthen the model, pilot holes and guide rods are applied. By the methodology described in this paper, a missile body with flush air intake was fabricated.

• Journal of the Semiconductor & Display Technology
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• v.20 no.2
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• pp.51-55
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• 2021

With the recent development of various smartphone designs in the smartphone market, the use of curved cover glass has been required, and interest in curved glass production has increased. In this paper, we designed a pressurization system that simplified the size of the system using a wedge amplification mechanism for smartphone curved glass molding systems. The pressurization system consisted of a linear motor, a wedge, and a force sensor. The wedge was used to amplify the force, and the piezoelectric sensor was used to measure the force. In addition, the proposed amplification mechanism was confirmed to have an error of 1.27% through an experiment compared to the simulation, and the pressurization error of 0.76% for the pressurization profile 3,500N was verified through an experiment.

• Journal of the Korean Institute of Telematics and Electronics
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• v.23 no.3
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• pp.340-344
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• 1986

This paper shows that we can design a vector-coordinate rotation processor and obtain the approximate evaluations of sine and cosine based upon the use of residue number systems. The algorithm results in the considerable improvement of the computation speed when compared to CORDIC algorithm. The results from computer simulation show that the mean error of sine and cosine is 0.0025 and the mean error of coordinate rotation arithmatic is 0.65. Also, the proposed processor has the efficiency for the design and fabrication of integrated circuit, because it consists of the array of idecntially structured look-up tables.

• Journal of the Korean Institute of Telematics and Electronics
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• v.23 no.3
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• pp.345-350
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• 1986

This paper deseribes the design of a vector-coordinate rotation processor and the apporoximate evaluations of sine and consine based upon the use of residue number systems. The proposed algorithm results in a considerable improvement of computational speed as compared to the CORDIC algorithm. According to the results of computer simulation, the mean error of sine and cosine is 0.0025, and the mean error of coorcinate rotation arithmatic is 0.65. The proposed processor has the efficiency for the design and fabrication of integrated circuits, because it consists of an array of identical lookup tables.

• Journal of the Optical Society of Korea
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• v.6 no.4
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• pp.180-184
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• 2002

In this study, we investigated mask errors, photo errors with attenuated phase shift mask and off-axis illumination, and etch errors in dry etch conditions. We propose that total process proximity correction (TPPC), a concept merging every process step error correction, is essential in a lithography process when minimum critical dimension (CD) is smaller than the wavelength of radiation. A correction rule table was experimentally obtained applying TPPC concept. Process capability of controlling gate CD in DRAM fabrication should be improved by this method.

• Proceedings of the IEEK Conference
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• 2000.11a
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• pp.349-352
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• 2000

In this paper, predistorter for PCS has been designed and fabricated. In predistorter system IMD signal generator was very important element. In this LPA IMD signal generator was fabricated using main signal cancellation and error signal cancellation of feedforward method and two amplifier that had same IMD characteristics. This LPA showed IMD characteristics of 52㏈c operation in 48㏈m(60W) and made 12㏈ IMD characteristic improvement when it was excited by two tone. In this LPA, to make more IMD characteristic improvement the IMD characteristic resemblance between main amplifier and predistortion amplifier is very important.