Journal of the Korean Society of Manufacturing Process Engineers (한국기계가공학회지)

The Korean Society of Manufacturing Process Engineers (한국기계가공학회)
권호 표지

Application and Parameter Optimization of EP-MAP Hybrid Machining for Micro Pattern Deburring

미세 패턴의 디버링을 위한 전해-자기연마 복합가공의 적용과 공정 최적화에 관한 연구

  • Published : 2013.04.30
⟨ Previous Next ⟩

Abstract

An EP(Electrolytic Polishing)-MAP(Magnetic Abrasive Polishing) hybrid process was applied to remove burr on the micro pattern. Micro pattern fabrication processes are combined with micro milling and EP-MAP hybrid process for deburring. Depending on the micro milling conditions which are applied, micro burrs are formed around the side and top of the pattern. The EP-MAP deburring is used to remove these burrs effectively. To optimize removal rate and form error in the EP-MAP hybrid process, a design of experiment was performed. The effect of deburring process and form error of micro pattern are evaluated via SEM images and the results of AFM.

Keywords

References

  1. Je, T. J., Choi, D. S., Jeon, E. S., Park, E. S. and Choi, H. J., "Trends of Flat Mold Machining Technology with Micro Pattern," Journal of KSMPE, Vol. 11, No. 2, pp. 1-6, 2012.
  2. Jeong, Y. H., Yoo, B. H., Lee, H. U., Min, B. K., Cho, D. W. and Lee, S. J., "Deburring Microfeatures Using Micro-EDM," Journal of Materials Processing Technology, Vol. 209, No. 14, pp. 5399-5406, 2009. https://doi.org/10.1016/j.jmatprotec.2009.04.021
  3. Kwak, T. K. and Kwak, J. S., "A Study of Micro-Channel Fabrication by Micro-Milling and Magnetic Abrasive Deburring," Trans. of the KSME A, Vol. 35, No. 8, pp. 899-904, 2011.
  4. Le, D., Lee, J. M., Kim, S. J., Lee, D. Y. and Lee, S. W., "Burr analysis in microgrooving," The International Journal of Advanced Manufacturing Technology, Vol. 50, pp. 569-577, 2010. https://doi.org/10.1007/s00170-010-2516-7
  5. Lee, S. J. and Lai, J. J., "The effects of electro polishing (EP) process parameters on corrosion resistance of 316L stainless steel," Materials Processing Technology, Vol. 140, No. 1, pp. 206-210, 2003. https://doi.org/10.1016/S0924-0136(03)00785-4
  6. Kwak, T. K. and Kwak, J. S., "A study on the application of CNT particle in high-precision magnetic abrasive polishing process," Korean Society of Manufacturing Technology Engineers, Vol. 20, No. 3, pp. 274-279, 2011.