• Title/Summary/Keyword: FOTS

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Surface Characteristics of Silicon Substrates Coated with Self-assembled Mono-layers (자체조립 단일막으로 코팅된 실리콘 기판의 표면특성)

  • 최성훈;강호종
    • Polymer(Korea)
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    • v.28 no.1
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    • pp.3-9
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    • 2004
  • Silane modified perfluoropolyethers (SPFPE) was synthesized as a self-assembled mono-layers (SAMs) thin film for micro-electro mechanical system (MEMS). SPFPE was compared to the Perfluoropolyethers (PFPE) as well as octadecyltrichlorosilane (OTS) and perfluorooctyltrichlorosilane (FOTS) with respect to the development of hydrophobicity in the SAMs surface. SPFPE shows less hydrophobicity than those of OTS and FOTS. Thermal annealing of SPFPE SAMs resulted in the enhancement of hydrophobicity as much as those of OTS and FOTS. The SAMs formed from SPFPE were found to be similar as OTS and FOTS SAMs with smooth R$\sub$a/ values of 0.3 nm. However, the flexible chain mobility of SPFPE resulted in 50% reduction as much as the fiction force in OTS.

FOTS based OCR Implementation for Nutritional Component Recognition (영양 성분 인식을 위한 FOTS 기반 OCR 구현)

  • Lee, Na-hyeon;Shin, Jae-young;Lee, Su-min;Jung, Yu-chul
    • Proceedings of the Korean Society of Computer Information Conference
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    • 2021.01a
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    • pp.21-22
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    • 2021
  • 사람들이 체중을 조절하고 건강을 관리하기 위한 방법 중 하루 영양소 섭취량을 조절이 있다. 현대 사회에선 가공식품의 섭취량이 증가함에 따라 자연스레 가공식품들의 영양소를 파악하고 기록하는 것도 중요한 문제가 되었다. 본 논문에서는 실제 가공 식품의 포장지에 인쇄되어있는 영양성분 표 이미지를 인식할 수 있는 OCR을 FOTS 기반으로 구현 및 실험을 진행하였다. 실제로 시중에서 파는 영양성분 표는 한글과 영어가 섞여 있기 때문에 한글을 인식하는 모델과 영어와 숫자를 인식하는 모델을 따로 학습한 뒤 생성하여 각 언어에 대한 인식률을 향상시켰다.

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Deposition and Characterization of Antistiction Layer for Nanoimprint Lithography by VSAM (Vapor Self Assembly Monolayer) (기상 자기조립박막 법을 이용한 나노임프린트용 점착방지막 형성 및 특성평가)

  • Cha, Nam-Goo;Kim, Kyu-Chae;Park, Jin-Goo;Jung, Jun-Ho;Lee, Eung-Sug;Yoon, Neung-Goo
    • Korean Journal of Materials Research
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    • v.17 no.1
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    • pp.31-36
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    • 2007
  • Nanoimprint lithography (NIL) is a new lithographic method that offers a sub-10nm feature size, high throughput, and low cost. One of the most serious problems of NIL is the stiction between mold and resist. The antistiction layer coating is very effective to prevent this stiction and ensure the successful NIL results. In this paper, an antistiction layer was deposited by VSAM (vapor self assembly monolayer) method on silicon samples with FOTS (perfluoroctyltrichlorosilane) as a precursor for making an antistiction layer. A specially designed LPCVD (low pressure chemical vapor deposition) was used for this experiment. All experiments were achieved after removing the humidity. First, the evaporation test of FOTS was performed for checking the evaporation temperature at low pressure. FOTS was evaporated at 5 Tow and $110^{\circ}C$. In order to evaluate the temperature effect on antistiction layer, chamber temperature was changed from 50 to $170^{\circ}C$ with 0.1ml of FOTS for 1 minute. Good hydrophobicity of all samples was shown at about $110^{\circ}$ of contact angle and under $20^{\circ}$ of hysteresis. The surface energies of all samples calculated by Lewis acid/base theory was shown to be about 15mN/m. The deposited thicknesses of all samples measured by ellipsometry were almost 1nm that was similar value of the calculated molecular length. The surface roughness of all samples was not changed after deposition but the friction force showed relatively high values and deviations deposited at under $110^{\circ}$. Also the white circles were founded in LFM images under $110^{\circ}$. High friction forces were guessed based on this irregular deposition. The optimized VSAM process for FOTS was achieved at $170^{\circ}C$, 5 Torr for 1 hour. The hot embossing process with 4 inch Si mold was successfully achieved after VSAM deposition.

A Study on Tribological Characteristics of Materials for MEMS/NEMS Using Chemically Modified AFM tip (AFM을 이용한 MEMS/NEMS 공정용 재료의 트라이볼로지 특성에 관한 연구)

  • Heo, Jung-Chul;Kim, Kwang-Seop;Kim, Kyung-Woong
    • Tribology and Lubricants
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    • v.24 no.2
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    • pp.63-71
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    • 2008
  • Friction and adhesion tests were conducted to investigate tribological characteristics of materials for MEMS/NEMS using atomic force microscope (AFM). AFM Si tips were chemically modified with a self-assembled monolayer (SAM) derived from trichlorosilane like octadecyltrichlorosilane (OTS) and (1H, 1H, 2H, 2H-perfluorooctyl) trichlorosilane (FOTS), and various materials, such as Si, Al, Au, Cu, Ti and PMMA films, were prepared for the tests. SAMs were coated on Si wafer by dipping method prior to AFM tip to determine a proper dipping time. The proper dipping time was determined from the measurements of contact angle, surface energy and thickness of the SAMs. AFM tips were then coated with SAMs by using the same coating condition. Friction and adhesion forces between the AFM Si tip modified with SAM and MEMS/NEMS materials were measured. These forces were compared to those when AFM tip was uncoated. According to the results, after coating OTS and FOTS, the friction and adhesion forces on all materials used in the tests decreased; however, the effect of SAM on the reduction of friction and adhesion forces could be changed according to counterpart materials. OTS was the most effective to reduce the friction and adhesion forces when counterpart material was Cu film. In case of FOTS, friction and adhesion forces decreased the most effectively on Au films.

Silicon Oil-Based 2-Channel Fiber-Optic Temperature Sensor Using a Subtraction Method (감법을 이용한 실리콘 오일 기반의 2채널 광섬유 온도 센서)

  • Lee, Dong Eun;Yoo, Wook Jae;Shin, Sang Hun;Kim, Mingeon;Song, Young Beom;Kim, Hye Jin;Jang, Kyoung Won;Tack, Gye Rae;Lee, Bongsoo
    • Journal of Sensor Science and Technology
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    • v.25 no.5
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    • pp.344-348
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    • 2016
  • We developed a 2-channel fiber-optic temperature sensor (FOTS) using a temperature sensing probe, a fiber-optic coupler, transmitting optical fiber, and an optical time domain reflectometer (OTDR). The temperature sensing probe is divided into a sensing probe and a reference probe for accurate thermometry. A sensing probe is composed of a silicon oil, a FC terminator, a brass pipe, and a singlemode optical fiber and the structure of a reference probe is identical with that of the sensing probe excluding a silicon oil. In this study, we measured the modified optical powers of the light signals reflected from the temperature sensing probe placed inside of the water with a thermal variation from 5 to $70^{\circ}C$. Although the optical power of the reference probe was constant regardless of the temperature change, the optical power of the sensing probe decreased linearly as the temperature increased. As experimental results, the FOTS using a subtraction method showed a small difference (i.e., hysteresis) in its response due to heating and cooling. The reversibility and reproducibility of the FOTS were also evaluated.

Fiber-optic Temperature Sensor Using a Silicone Oil and an OTDR (OTDR을 이용한 실리콘 오일 기반의 광섬유 온도 센서)

  • Jang, Jae Seok;Yoo, Wook Jae;Shin, Sang Hun;Lee, Dong Eun;Kim, Mingeon;Kim, Hye Jin;Song, Young Beom;Jang, Kyoung Won;Cho, Seunghyun;Lee, Bongsoo
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.64 no.11
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    • pp.1592-1597
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    • 2015
  • In this study, we developed a fiber-optic temperature sensor (FOTS) based on a silicone oil and an optical time domain reflectometer (OTDR) to apply the measurement of a coolant leakage in the nuclear power plant. The sensing probe of the FOTS consists of a silicone oil, a stainless steel cap, a FC terminator, and a single mode optical fiber. Fresnel reflection arising at the interface between the silicone oil and the single mode optical fiber in the sensing probe is changed by varying the refractive index of the silicone oil according to the temperature. Therefore, we measured the optical power of the light signals reflected from the sensing probe. The measurable temperature range of the FOTS using a Cu-coated silica fiber is from $70^{\circ}C$ to $340^{\circ}C$ and the maximum operation temperature of the FOTS is sufficient for usage at the secondary system in the nuclear power plant.

실행시간 V2X 안전 서비스 통신 성능 평가를 위한 가상 환경 기반 시뮬레이션 플랫폼 설계

  • O, Jun-Ho;Park, Pyeong-Seon;Mun, Hui-Seok;Jeong, Jae-Il
    • Information and Communications Magazine
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    • v.29 no.2
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    • pp.39-45
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    • 2012
  • V2X 차량 안전 시스템은 ITS 환경에서 주행하는 모든 차량들이 V2V 혹은 V2I 기반의 협력통신을 통해 안전 서비스를 제공하는 기술이다. 이는 실제 도로환경에서의 실험, 즉 Field Operational Tests(FOTs)를 통한 검증과 평가 수행이 요구된다. 그러나, 일반적으로 실 도로환경에서 시스템 및 서비스에 대한 검증과 평가는 많은 시간과 비용을 필요로 한다. 따라서 실제 도로 주행 테스트 전에 V2X 안전 서비스의 기본적인 성능을 검증할 V2X 시뮬레이션 방안이 필요하다. 본 논문에서는 국외의 V2X 시뮬레이터 기술 개발 동향과 함께 차량 간 통신 시뮬레이션 분야에서 연구되고 있는 주요 이슈들을 알아보고 이를 극복하기 위한 연구 방호별 제시한다.

Plasma treatment on PMMA, PET & ABS for Superhydrophobicity (플라즈마 처리에 의한 PMMA, PET, ABS의 초발수 효과)

  • Choi, Gyoung-Rin;Noh, Jung-Hyun;Lee, Jun-Hee;Kim, Wan-Doo;Lim, Hyun-Eui
    • Proceedings of the KSME Conference
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    • 2008.11a
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    • pp.1582-1584
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    • 2008
  • This paper reports a simple fabrication method for creating the superhydrophobic polymer surface using a plasma etching. Generally, it is necessary for the superhydrophobic surfaces to have a rough structure on surface with the composition of the low surface energy. In this study, Poly(methyl methacrylate) (PMMA), poly(ethylene terephthalate) (PET), acrylonitrile butadiene styrene (ABS) with superhydrophobic surface were fabricated using $O_2$ plasma etching and vapor deposition with the fluoroalkylsilane self-assembled monolayers. The plasma treated polymer surfaces are covered with the nano-pillar shaped structures after treatment for $1{\sim}2min$. And these samples with FOTS SAMs coating are showed the superhydrophobicity having the water contact angle of around $150^{\circ}$ and sometimes around $180^{\circ}$ depending on the treatment time. Furthermore the nanostructured polymer is transparent for the visible light.

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Leidenfrost Points Tuned via Surface Coating and Structures

  • Jeon, Deok-Jin;Lee, Jun-Young;Yeo, Jong-Souk
    • Proceedings of the Korean Vacuum Society Conference
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    • 2015.08a
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    • pp.126.1-126.1
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    • 2015
  • A quantitative relationship between Leidenfrost point and surface characteristics such as surface material and roughness is investigated. Based on the relationship, we have fabricated the surfaces with their Leidenfrost points (LFP) tuned by controlling surface coating and structures. As discovered by Leidenfrost, liquids placed on a hot plate levitate on the gas phase-air gap formed by the vaporization of liquids. This phenomenon is called 'Leidenfrost effect'. A change of LFP has attracted many researchers for several years but the ability to tune LFP is still a remaining issue. Many of previous work has progressed for various conditions so the systematic approach and analysis are needed to clearly correlate the LFP and the surface conditions. In this report, we investigate a relation of surface energy and LFP using various coating materials such as Octadecyltrichlorosilane (OTS) and 1H, 1H, 2H, 2H-Perfluorooctyltrichlorosilane (FOTS). Also, we analyze how surface roughness affects LFP via surface micro structuring with ICP-RIE fabrication process. The improved understanding can have potential applications such as the control of liquid droplet behavior at elevated temperatures for efficient cooling system.

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