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Surface Characteristics of Silicon Substrates Coated with Self-assembled Mono-layers  

최성훈 (기능성고분자 신소재연구센터, 단국대학교 고분자공학과)
강호종 (기능성고분자 신소재연구센터, 단국대학교 고분자공학과)
Publication Information
Polymer(Korea) / v.28, no.1, 2004 , pp. 3-9 More about this Journal
Abstract
Silane modified perfluoropolyethers (SPFPE) was synthesized as a self-assembled mono-layers (SAMs) thin film for micro-electro mechanical system (MEMS). SPFPE was compared to the Perfluoropolyethers (PFPE) as well as octadecyltrichlorosilane (OTS) and perfluorooctyltrichlorosilane (FOTS) with respect to the development of hydrophobicity in the SAMs surface. SPFPE shows less hydrophobicity than those of OTS and FOTS. Thermal annealing of SPFPE SAMs resulted in the enhancement of hydrophobicity as much as those of OTS and FOTS. The SAMs formed from SPFPE were found to be similar as OTS and FOTS SAMs with smooth R$\sub$a/ values of 0.3 nm. However, the flexible chain mobility of SPFPE resulted in 50% reduction as much as the fiction force in OTS.
Keywords
self-assembled monolayers; silanemodified perfluoropolyether; MEMS; contact angle; silicon substrates;
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