• Journal of the Semiconductor & Display Technology
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• v.18 no.2
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• pp.58-62
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• 2019

Diffractive Optical Elements(DOEs) diffracts incident light using the diffraction phenomenon of light to generate a desired diffraction image. In recent years, the use of diffraction optics, which can replace existing refractive optical elements with flat plates, has been increased by implementing various optical functions that could not be implemented in refractive optical devices and by becoming miniaturized and compacted optical elements. Direct laser lithography is typically used to effectively fabrication such a diffractive optical element in a large area with a low process cost. In this study, the process conditions for fabricating patterns of diffractive optical elements in various shapes were found using direct laser lithographic system, and optical performance evaluation was performed through fabrication.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.1
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• pp.199-206
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• 2005

Mask manufacturing is a high COC and COO process in developing of semiconductor devices because of mask production tool with high resolution. Direct writing has been thought to be the one of the patterning method to cope with development or small-lot production of the device. This study consists two categories. One is the additional process of the direct and maskless patterning generation using SLA for easy and convenient application and the other is a removal process using wet-etching process. In this study, cured status of epoxy pattern is most important parameter because of the beer-lambert law according to the diffusion of UV light. In order to improve the contact force between patterns and substrate, prime process was performed and to remove the semi-cured resin which makes a bad effects to the pattern, spin cleaning process using TPM was also performed. At a removal process, contact force between photo-curable resin as an etching mask and Si wafer is important parameter.

• Journal of the Korean Society of Industry Convergence
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• v.23 no.4_2
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• pp.693-699
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• 2020

355nm UV pulse laser is irradiated on the surface of polyimide (PI) by LDW (Laser Direct Writing) method to produce a high sensitivity flexible humidity sensor using a simple one-step process. The LDW method continuously investigates 2-D CAD data using a galvano scanner and an F-lens. This method is non-contact, so it minimizes physical strain on the PI. Laser-induced graphene (LIG) produced by lasers has a high surface area due to its high flexibility and numerous pores and oxidizers compared to conductors. For this reason, it is highly useful as a flexible humidity sensor. The humidity sensor produced in this study was attached to the inside of a mask filter, which has become a hot topic recently, and its applicability was confirmed.The measurement of humidity measured the sensitivity, reactivity, stability and recovery behavior of the sensor by measuring changes in capacitance and resistance.

• Proceedings of the Optical Society of Korea Conference
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• 2002.07a
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• pp.40-41
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• 2002

광 집적회로의 필요성에 의해 평면형 광소자의 개발이 다각도로 연구되고 있다. 그 중 유리의 광민감성을 이용한 것으로 직접 UV를 조사하여 광도파로를 만드는 방법이 최근 관심을 얻고 있다. 이러한 direct UV-writing 방법을 이용한 경우는 광도과로를 위한 식각 과정을 거치지 않고도 광도파로를 제작할 수 있는 장점이 있다. UV-writing을 이용한 광도파로 형성을 위해서는 undercladding층, core층, overcladding층으로 이루어진 구조의 박막을 제조해야 하며, 특히 빛이 도파되는 core 부분은 UV 조사에 따라 굴절률이 증가하는 광민감성이 높은 물질로 구성되어야 한다. UV조사에 따라 굴절률이 증가하는 광민감성이 높은 물질로 구성되어야 한다. (중략)

• English Language & Literature Teaching
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• v.15 no.2
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• pp.151-168
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• 2009

The present study investigates the impact of trained peer feedback on the quantity and quality of revisions made by EFL students at a low-intermediate level. Peer review training was carried out in experimental group through four in-class training sessions and four peer dyad-instructor conferences after class. Students' $1^{st}$ drafts with written peer feedback and revised drafts prior to and post training were collected and analyzed. Results reveal that after training the students produced more revisions in response to their peer comments (96% of total revisions) and those revisions were counted as enhanced in quality (93% of peer-triggered revisions). In contrast, the results of paired t-test within control group indicate that there was no significant difference between two data collected from week 3 and week 16 (t = -.57, df =19, p = .577 at p < .05). The findings suggest that training as an ongoing process of teacher intervention contributes to effectiveness of the peer feedback activity. The study provides pedagogical implications for how to structure and implement peer review training for the sake of its direct strength in an EFL writing class.

• Journal of Korean Elementary Science Education
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• v.38 no.1
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• pp.130-148
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• 2019

This study compared the characteristics of scientific poems written by scientifically-gifted and general elementary students, and their perceptions of writing scientific poem. To do this, 5~6 graders (n=100) at two gifted science education institutes and 5~6 graders (n=93) at a elementary school in Seoul were selected. Scientific poems written by the students were analyzed according to their numbers and types. Their perceptions of writing scientific poems were also analyzed through a questionnaire and group interviews. The analysis of the results revealed that the general students wrote more scientific poems than the scientifically-gifted students for thirty minutes. The general students mainly named the titles in a direct way, while scientifically-gifted students did it in an implicit way. The free verse poems in both general students and scientifically-gifted students appeared most frequently, and the prose or narrative poems also often appeared. The general and scientifically-gifted students frequently used impersonation, and some students did not use metaphors. They didn't connect the scientific knowledge for multiple grade. While the poems of the general students evenly included the scientific knowledge for various academic fields, those of scientifically-gifted students tended to include the scientific knowledge for physics or chemistry. The poems of scientifically-gifted students tended to include more science process skills, especially in basic inquiry skills, than those of general students. The scientifically-gifted students wrote scientific poems in a more expanded form regarding the scientific knowledge, than the general students. Scientifically-gifted students perceived the educational benefits of writing scientific poems more positively based on various cognitive and affective aspects. However, many scientifically-gifted and general students had also several difficulties in the processes of writing scientific poems. Educational implications of these findings are discussed.

• Laser Solutions
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• v.6 no.1
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• pp.33-40
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• 2003

The ablative decomposition mechanism of PMMA(polymethyl methacrylate) and PET(polyethylene terephthalate) with KrF excimer laser(λ : 248nm, pulse duration: 5㎱) is investigated. The UV/Vis spectrometer analysis showed that PMMA is a weak absorber and PET is a strong absorber at the wavelength of 248nm. The results(surface debris, melt, etch depth, etching shape) from drilling and direct writing experiments imply that ablation mechanism of PMMA is dominated by photothermal process, while that of PET is dominated by photochemical process.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1857-1860
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• 2003

The ablative decomposition mechanism of PMMA(polymethyt methacrylate), PET(polyethylene terephthalate) and PC(polycarbonate) with KrF excimer laser(λ: 248nm, pulse duration: 5ns) is investigated. The UV/Vis spectrometer analysis showed that PMMA is a weak absorber and PET, PC are a strong absorber at the wavelength of 248nm. The results(surface debris, melt, etch depth, etching shape) from drilling and direct writing experiments imply that ablation mechanism of PMMA is dominated by photothermal process, while that of PET, PC are dominated by photochemical process.

• Laser Solutions
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• v.10 no.2
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• pp.5-15
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• 2007

A new printing process for LCD color filter is proposed in this work by using the localized laser heating, which is called laser-induced spray printing (LISP) process. The LISP is a non-contact process, which injects the ink from the donor substrate to the glass substrate by the bubble pressure induced by laser heating. The temperature distribution of the donor substrate is calculated numerically to explain the ink ejection phenomena. The composition of the ink was includes the red pigment, n-butanol, xylene, BCA and epoxy. Experiments were conducted by using the fiber laser system, and the color filter patterns were deposited successfully under the proper laser heating conditions.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.5
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• pp.57-63
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• 2009

Interface friction in blanking dies, cold forging and extrusion of aluminum alloys is a major cause of inefficient process. This paper describes an investigation of femtosecond laser texturing for reduction of interface friction on sliding surfaces in forming process. Femtosecond direct writing technology was used to fabricate a laser micro-machined die and to create microgroove patterns with varying size and density on metal forming dies. A systematic approach to find the optimum parameters and computer simulation comparison of friction coefficients are provided to study the relation of friction coefficients and die profiles. In metal forming tests, the effectiveness of various laser-machined patterns for enhancing interface lubrication is determined.